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The SPM head contains seven identical MEMS probes, and each of them integrates a displacement sensor and a Z-axis actuator. Force constant mode is designed based on the force feedback strategy rather than on the position feedback strategy for this kind of SPM head. A nano-measuring machine is equipped with the lateral XY scanners, which can reach a motion range of 25 mm \u00d7 25 mm. After calibration, the measurement of one-dimensional grating has been made to demonstrate the capability of multiprobe scanning.<\/jats:p>","DOI":"10.1063\/5.0015897","type":"journal-article","created":{"date-parts":[[2020,12,3]],"date-time":"2020-12-03T13:26:18Z","timestamp":1607001978000},"update-policy":"https:\/\/doi.org\/10.1063\/aip-crossmark-policy-page","source":"Crossref","is-referenced-by-count":0,"title":["Multiprobe scanning probe microscope using a probe-array head"],"prefix":"10.1063","volume":"91","author":[{"ORCID":"https:\/\/orcid.org\/0000-0001-7680-0600","authenticated-orcid":false,"given":"Fengming","family":"Sun","sequence":"first","affiliation":[{"name":"Sino-European Institute of Aviation Engineering, Civil Aviation University of China 1 , Tianjin 300300, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Zhenyu","family":"Zhu","sequence":"additional","affiliation":[{"name":"Changcheng Institute of Metrology and Measurement 2 , Beijing 100095, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-6692-1879","authenticated-orcid":false,"given":"Long","family":"Ma","sequence":"additional","affiliation":[{"name":"Sino-European Institute of Aviation Engineering, Civil Aviation University of China 1 , Tianjin 300300, China"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"317","published-online":{"date-parts":[[2020,12,3]]},"reference":[{"key":"2023080606112602000_c1","doi-asserted-by":"publisher","first-page":"930","DOI":"10.1103\/physrevlett.56.930","volume":"56","year":"1986","journal-title":"Phys. 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