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In some cases, such as lithography, controlled damage of a molecular resist is a desirable process and is the basis for the entire semiconductor industry. In other cases, such as environmental exposure or probing of the molecular structure, the induced damage is a major problem that has limited advances in science and technology. We report here the use of an in situ probe that is minimally invasive to detect real-time damage induced in organic materials. Specifically, we use metastable excited helium atoms in the 3S1 state to characterize the damage caused by a low-energy electron beam \u223c30 eV on an organic self-assembled monolayer of 11-bromo-1-undecanethiol on a gold substrate. We were able to monitor the damage caused by the electron beam without introducing any additional observed damage by the probing metastable atoms.<\/jats:p>","DOI":"10.1063\/5.0036827","type":"journal-article","created":{"date-parts":[[2021,1,19]],"date-time":"2021-01-19T16:08:57Z","timestamp":1611072537000},"update-policy":"https:\/\/doi.org\/10.1063\/aip-crossmark-policy-page","source":"Crossref","is-referenced-by-count":1,"title":["Monitoring damage of self-assembled monolayers using metastable excited helium atoms"],"prefix":"10.1063","volume":"154","author":[{"ORCID":"https:\/\/orcid.org\/0000-0002-1346-8417","authenticated-orcid":false,"given":"Georgios","family":"Stratis","sequence":"first","affiliation":[{"name":"Department of Physics, University of Texas at Austin 1 , Austin, Texas 78712, USA"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-8299-0903","authenticated-orcid":false,"given":"Jordan D.","family":"Zesch","sequence":"additional","affiliation":[{"name":"Department of Physics, University of Texas at Austin 1 , Austin, Texas 78712, USA"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-1323-037X","authenticated-orcid":false,"given":"Henry S.","family":"Pan","sequence":"additional","affiliation":[{"name":"McKetta Department of Chemical Engineering, University of Texas at Austin 2 , Austin, Texas 78712, USA"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-9999-5500","authenticated-orcid":false,"given":"Lauren J.","family":"Webb","sequence":"additional","affiliation":[{"name":"Department of Chemistry, University of Texas at Austin 3 , Austin, Texas 78712, USA"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Mark G.","family":"Raizen","sequence":"additional","affiliation":[{"name":"Department of Physics, University of Texas at Austin 1 , Austin, Texas 78712, USA"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"317","published-online":{"date-parts":[[2021,1,19]]},"reference":[{"key":"2023062603523053800_c1","doi-asserted-by":"publisher","first-page":"1","DOI":"10.1016\/j.physrep.2011.06.004","volume":"508","year":"2011","journal-title":"Phys. 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