{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,3,27]],"date-time":"2026-03-27T16:49:31Z","timestamp":1774630171954,"version":"3.50.1"},"reference-count":47,"publisher":"AIP Publishing","issue":"2","funder":[{"DOI":"10.13039\/501100018537","name":"National Science and Technology Major Project","doi-asserted-by":"publisher","award":["2016ZX02201"],"award-info":[{"award-number":["2016ZX02201"]}],"id":[{"id":"10.13039\/501100018537","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":["pubs.aip.org"],"crossmark-restriction":true},"short-container-title":[],"published-print":{"date-parts":[[2023,2,1]]},"abstract":"<jats:p>Multi-degree of freedom piezoelectric actuators are strongly needed for industrial applications, especially when manipulating a large and heavy mirror or lens in an optical system. A novel three-degree-of-freedom piezoelectric actuator, which is driven by two pairs of piezo-stack actuator with spatial compliant mechanisms designed to guide the motion and preload the piezo-stack actuators, is herein proposed. The structure and working principle of the proposed actuator are illustrated and its kinematic characteristic is analyzed. The stiffness of the spatial compliant mechanisms is modeled, and the dynamic characteristics are analyzed, Finite Element method is utilized to validate the correctness of the stiffness modeling and the free vibration analysis of the proposed actuator. A prototype actuator is fabricated and its output performances have been tested. Working space of X ranging from \u22127.1 to 5.6\u00a0\u03bcm, Y ranging from \u22126.2 to 8.2\u00a0\u03bcm and Z ranging from \u22122.3 to 2.1\u00a0\u03bcm, displacement resolutions of 15\/16\/21\u00a0nm along X-\/Y-\/Z-axis and average velocities of 52.3, 82.8 and 29.5 \u00b5m\/s along X-axis, Y-axis, and Z-axis with carrying load up to 2\u00a0kg and driving frequency of 500\u00a0Hz have been achieved by the prototype actuator. The method of waveform generating for the proposed actuator has been developed with the inverse hysteresis compensation, and test results indicate that the positioning accuracy of the prototype actuator in the open loop has been improved from 0.94 to 0.23\u00a0\u03bcm for a circular trajectory tracking, from 0.48 to 0.29 \u03bcmm for an elliptical trajectory tracking, and from 0.61 to 0.32\u00a0\u03bcm for a rectangular trajectory tracking with the compensated waveform of driving voltage.<\/jats:p>","DOI":"10.1063\/5.0114030","type":"journal-article","created":{"date-parts":[[2023,2,1]],"date-time":"2023-02-01T14:25:52Z","timestamp":1675261552000},"update-policy":"https:\/\/doi.org\/10.1063\/aip-crossmark-policy-page","source":"Crossref","is-referenced-by-count":9,"title":["Development of a three-degree-of-freedom piezoelectric actuator"],"prefix":"10.1063","volume":"94","author":[{"ORCID":"https:\/\/orcid.org\/0000-0001-5654-083X","authenticated-orcid":false,"given":"Fenglong","family":"Wei","sequence":"first","affiliation":[{"name":"Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences 1 , Changchun 130033, China"},{"name":"University of Chinese Academy of Sciences 2 , Beijing 100049, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Xueliang","family":"Wang","sequence":"additional","affiliation":[{"name":"Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences 1 , Changchun 130033, China"},{"name":"University of Chinese Academy of Sciences 2 , Beijing 100049, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Jingshi","family":"Dong","sequence":"additional","affiliation":[{"name":"School of Mechanical and Aerospace Engineering, Jilin University 3 , Changchun 130025, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Kang","family":"Guo","sequence":"additional","affiliation":[{"name":"Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences 1 , Changchun 130033, China"},{"name":"University of Chinese Academy of Sciences 2 , Beijing 100049, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Yongxin","family":"Sui","sequence":"additional","affiliation":[{"name":"Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences 1 , Changchun 130033, China"},{"name":"University of Chinese Academy of Sciences 2 , Beijing 100049, China"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"317","published-online":{"date-parts":[[2023,2,1]]},"reference":[{"key":"2023081020264920800_c1","doi-asserted-by":"publisher","first-page":"1701","DOI":"10.1016\/j.jmatprotec.2011.05.015","article-title":"Experimental study on ultrasonic elliptical vibration cutting of hardened steel using PCD tools","volume":"211","year":"2011","journal-title":"J. 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