{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,7,30]],"date-time":"2025-07-30T11:21:36Z","timestamp":1753874496006,"version":"3.41.2"},"reference-count":19,"publisher":"AIP Publishing","issue":"2","content-domain":{"domain":["pubs.aip.org"],"crossmark-restriction":true},"short-container-title":[],"published-print":{"date-parts":[[2023,2,1]]},"abstract":"<jats:p>A laser scanning microscope for measuring 3D pyroelectric distributions inside thin vinylidene fluoride-trifluoroethylene copolymer films using the Laser Intensity Modulation Method was developed. The setup consists of a laser unit, a laser driver, an xyz-stepper motor unit, a transimpedance amplifier, and a lock-in amplifier. The focus lens at the laser unit is fixed by magnetic levitation and can correct a defocusing of the system or a tilt of the sample surface. It has been demonstrated in different samples that the system has a lateral resolution of 1\u00a0\u03bcm for measuring the topological surface structure or the pyroelectric distributions. The self-developed laser driver and transimpedance amplifier combined with a fast lock-in amplifier are able to measure small pyroelectric currents and their variation inside a pyroelectric sample in the range of some 1 pA. The maximum measure frequency of 4\u00a0MHz and the fast lock-in make it possible to measure the 3D pyroelectric distributions with high resolution. A 3D scan of 30 different layers with depths of 100 nm\u20135\u00a0\u03bcm inside the sample and 100 \u00d7 100 points in the xy-direction per layer is performed in 3 days.<\/jats:p>","DOI":"10.1063\/5.0131144","type":"journal-article","created":{"date-parts":[[2023,2,6]],"date-time":"2023-02-06T16:02:29Z","timestamp":1675699349000},"update-policy":"https:\/\/doi.org\/10.1063\/aip-crossmark-policy-page","source":"Crossref","is-referenced-by-count":0,"title":["Measuring 3D pyroelectric distributions with high resolution in thin films by a laser scanning microscope"],"prefix":"10.1063","volume":"94","author":[{"ORCID":"https:\/\/orcid.org\/0000-0003-2183-463X","authenticated-orcid":false,"given":"D.","family":"Smykalla","sequence":"first","affiliation":[{"name":"Department of Scitec, University of Applied Sciences 1 , Carl-Zeiss-Promenade 2, 07745 Jena, Germany"},{"name":"Faculty of Chemistry and Earth Sciences, University of Jena 2 , Humboldtstr. 11, 07743 Jena, Germany"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"B.","family":"Ploss","sequence":"additional","affiliation":[{"name":"Department of Scitec, University of Applied Sciences 1 , Carl-Zeiss-Promenade 2, 07745 Jena, Germany"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"D. 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