{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,9,10]],"date-time":"2026-09-10T13:29:37Z","timestamp":1789046977419,"version":"build-2803163510"},"reference-count":26,"publisher":"AIP Publishing","issue":"9","funder":[{"DOI":"10.13039\/100020595","name":"National Science and Technology Council","doi-asserted-by":"publisher","award":["NSTC 113-2221-E-002-088-"],"award-info":[{"award-number":["NSTC 113-2221-E-002-088-"]}],"id":[{"id":"10.13039\/100020595","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/100020595","name":"National Science and Technology Council","doi-asserted-by":"publisher","award":["NSTC 115-2218-E-390-001-"],"award-info":[{"award-number":["NSTC 115-2218-E-390-001-"]}],"id":[{"id":"10.13039\/100020595","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/100020595","name":"National Science and Technology Council","doi-asserted-by":"publisher","award":["NSTC 115-2221-E-390-015-"],"award-info":[{"award-number":["NSTC 115-2221-E-390-015-"]}],"id":[{"id":"10.13039\/100020595","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":["pubs.aip.org"],"crossmark-restriction":true},"short-container-title":[],"published-print":{"date-parts":[[2026,9,1]]},"abstract":"<jats:p>Electromagnetic interference has a significant impact on semiconductor manufacturing quality and product yield. The image quality of the high precision equipment, such as scanning electron microscopes and electron beam lithography machines, is often degraded by electromagnetic interference. Conventional filtered-x least mean squares (FxLMS) algorithm used for active magnetic field cancellation is subject to hardware-induced processing delays on the order of 5\u201320\u00a0ms, which can degrade the noise suppression performance. This paper presents a novel algorithm-based approach that integrates long short-term memory (LSTM) networks with FxLMS adaptive filtering to mitigate the hardware limitations via predictive compensation. The proposed LSTM-enhanced FxLMS algorithm employs the adaptive sequence length calculation and the dynamic step size adjustment to compensate the hardware-induced system latency. Compared to the conventional FxLMS algorithm, the proposed algorithm achieves an 8.75% improvement for single-frequency input and a 13.58% enhancement for multi-frequency cases. Furthermore, the proposed algorithm maintains stable noise suppression performance under processing delays of up to 40\u00a0ms.<\/jats:p>","DOI":"10.1063\/5.0305429","type":"journal-article","created":{"date-parts":[[2026,9,10]],"date-time":"2026-09-10T12:52:36Z","timestamp":1789044756000},"update-policy":"https:\/\/doi.org\/10.1063\/aip-crossmark-policy-page","source":"Crossref","is-referenced-by-count":0,"title":["Design of a novel intelligent active magnetic canceling system for mitigating extremely low frequency magnetic interference in high tech fab"],"prefix":"10.1063","volume":"97","author":[{"ORCID":"https:\/\/orcid.org\/0000-0002-9539-588X","authenticated-orcid":false,"given":"Yu-Lin","family":"Song","sequence":"first","affiliation":[{"name":"Department of Bioinformatics and Medical Engineering, Asia University 1 , Taichung, Taiwan"},{"name":"Department of Computer Science & Information Engineering, Asia University 2 , Taichung, Taiwan"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Yung-Yi","family":"Cheng","sequence":"additional","affiliation":[{"name":"Department of Bioinformatics and Medical Engineering, Asia University 1 , Taichung, Taiwan"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0009-0000-2431-1709","authenticated-orcid":false,"given":"Hung-Yi","family":"Lin","sequence":"additional","affiliation":[{"name":"Department of Electrical Engineering, National University of Kaohsiung 3 , Kaohsiung, Taiwan"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Luh-Maan","family":"Chang","sequence":"additional","affiliation":[{"name":"High-Tech Fab Facility Research Center, National Taiwan University 4 , Taipei, Taiwan"},{"name":"Department of Civil Engineering, National Taiwan University 5 , Taipei, Taiwan"}],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"317","published-online":{"date-parts":[[2026,9,10]]},"reference":[{"key":"2026091008523280600_c1","article-title":"Guide for semiconductor manufacturing equipment electromagnetic compatibility"},{"issue":"1","key":"2026091008523280600_c2","doi-asserted-by":"publisher","first-page":"488","DOI":"10.1109\/TPWRD.2004.838644","article-title":"An integro-differential equation technique for the computation of radiated EMI due to corona on HV power transmission lines","volume":"20","year":"2005","journal-title":"IEEE Trans. Power Delivery"},{"key":"2026091008523280600_c3","first-page":"15","article-title":"Active magnetic field canceling system","year":"2014"},{"issue":"24","key":"2026091008523280600_c4","doi-asserted-by":"publisher","first-page":"11984","DOI":"10.3390\/app112411984","article-title":"Control of EMI in high-technology nano fab by exploitation power transmission method with ideal permutation","volume":"11","year":"2021","journal-title":"Appl. Sci."},{"issue":"6","key":"2026091008523280600_c5","doi-asserted-by":"publisher","first-page":"3664","DOI":"10.3390\/ijerph19063664","article-title":"A magnetic field canceling system design for diminishing electromagnetic interference to avoid environmental hazard","volume":"19","year":"2022","journal-title":"Int. J. Environ. Res. Public Health"},{"key":"2026091008523280600_c6","first-page":"1","article-title":"A magnetic field cancelling system design for mitigating extremely low frequency magnetic field in a high tech fab","year":"2021"},{"key":"2026091008523280600_c7","doi-asserted-by":"publisher","first-page":"10021","DOI":"10.1038\/s41598-020-66563-z","article-title":"Active control of broadband sound through the open aperture of a full-sized domestic window","volume":"10","year":"2020","journal-title":"Sci. Rep."},{"issue":"6","key":"2026091008523280600_c8","doi-asserted-by":"publisher","first-page":"943","DOI":"10.1109\/5.763310","article-title":"Active noise control: A tutorial review","volume":"87","year":"1999","journal-title":"Proc. IEEE"},{"key":"2026091008523280600_c9","doi-asserted-by":"publisher","first-page":"2465","DOI":"10.1063\/1.1149779","article-title":"Active shielding to reduce low frequency disturbances in direct current near biomagnetic measurements","volume":"70","year":"1999","journal-title":"Rev. Sci. Instrum."},{"key":"2026091008523280600_c10","doi-asserted-by":"publisher","first-page":"044702","DOI":"10.1063\/1.5080093","article-title":"Magnetic field stabilization system for atomic physics experiments","volume":"90","year":"2019","journal-title":"Rev. Sci. Instrum."},{"key":"2026091008523280600_c11","doi-asserted-by":"publisher","first-page":"085107","DOI":"10.1063\/5.0007464","article-title":"Quieting an environmental magnetic field without shielding","volume":"91","year":"2020","journal-title":"Rev. Sci. Instrum."},{"key":"2026091008523280600_c12","doi-asserted-by":"publisher","first-page":"124702","DOI":"10.1063\/5.0062650","article-title":"A high performance active noise control system for magnetic fields","volume":"92","year":"2021","journal-title":"Rev. Sci. Instrum."},{"issue":"3\u20135","key":"2026091008523280600_c13","doi-asserted-by":"publisher","first-page":"647","DOI":"10.1016\/j.jsv.2009.07.023","article-title":"Improving performance of FxLMS algorithm for active noise control of impulsive noise","volume":"327","year":"2009","journal-title":"J.\u00a0Sound Vib."},{"issue":"11","key":"2026091008523280600_c14","doi-asserted-by":"publisher","first-page":"2313","DOI":"10.3390\/app8112313","article-title":"Frequency-domain Filtered-x LMS algorithms for active noise control: A review and new insights","volume":"8","year":"2018","journal-title":"Appl. Sci."},{"key":"2026091008523280600_c15","doi-asserted-by":"publisher","first-page":"105047","DOI":"10.1016\/j.micpro.2024.105047","article-title":"Hardware accelerated active noise cancellation system using Haar wavelets","volume":"107","year":"2024","journal-title":"Microprocessors Microsyst."},{"issue":"8","key":"2026091008523280600_c16","doi-asserted-by":"publisher","first-page":"1735","DOI":"10.1162\/neco.1997.9.8.1735","article-title":"Long short-term memory","volume":"9","year":"1997","journal-title":"Neural Comput."},{"key":"2026091008523280600_c17","doi-asserted-by":"publisher","first-page":"105971","DOI":"10.1016\/j.engappai.2023.105971","article-title":"DnoiseNet: Deep learning-based feedback active noise control in various noisy environments","volume":"121","year":"2023","journal-title":"Eng. Appl. Artif. Intell."},{"key":"2026091008523280600_c18","doi-asserted-by":"publisher","first-page":"085208","DOI":"10.1063\/5.0271372","article-title":"sEMG-based recognition of wrist-hand movements using a composite transformer-LSTM model","volume":"96","year":"2025","journal-title":"Rev. Sci. Instrum."},{"key":"2026091008523280600_c19","doi-asserted-by":"publisher","first-page":"064701","DOI":"10.1063\/5.0258358","article-title":"EEG-ConvoBLSTM: A novel hybrid model for efficient EEG signal classification","volume":"96","year":"2025","journal-title":"Rev. Sci. Instrum."},{"issue":"1","key":"2026091008523280600_c20","doi-asserted-by":"publisher","first-page":"388","DOI":"10.1016\/j.ijforecast.2020.06.008","article-title":"Recurrent neural networks for time series forecasting: Current status and future directions","volume":"37","year":"2021","journal-title":"Int. J. Forecast."},{"key":"2026091008523280600_c21","first-page":"121","article-title":"Long short-term memory and convolutional neural networks for active noise control","year":"2019"},{"key":"2026091008523280600_c22","first-page":"230","article-title":"A noise suppression of LSTM algorithm combined with Kalman filter for agriculture automation","year":"2023"},{"issue":"15","key":"2026091008523280600_c23","doi-asserted-by":"publisher","first-page":"29492","DOI":"10.1109\/jsen.2025.3580220","article-title":"A new adaptive sound zone strategy-based hybrid FxNLMS and CNN-LSTM network for multichannel active noise control in a rehabilitation room","volume":"25","year":"2025","journal-title":"IEEE Sens. J."},{"issue":"9","key":"2026091008523280600_c24","doi-asserted-by":"publisher","first-page":"1979","DOI":"10.1109\/tasl.2013.2263143","article-title":"Complete parallel narrowband active noise control systems","volume":"21","year":"2013","journal-title":"IEEE Trans. Audio, Speech, Lang. Process."},{"key":"2026091008523280600_c25","first-page":"1","article-title":"Decoupled weight decay regularization,\" in The Seventh International Conference on Learning Representations (ICLR 2019) (OpenReview.net","year":"2019"},{"key":"2026091008523280600_c26","doi-asserted-by":"publisher","first-page":"095107","DOI":"10.1063\/5.0222123","article-title":"Ambulatory ECG noise reduction algorithm for conditional diffusion model based on multi-kernel convolutional transformer","volume":"95","year":"2024","journal-title":"Rev. Sci. Instrum."}],"container-title":["Review of Scientific Instruments"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/pubs.aip.org\/aip\/rsi\/article-pdf\/doi\/10.1063\/5.0305429\/21133553\/094706_1_5.0305429.pdf","content-type":"application\/pdf","content-version":"vor","intended-application":"syndication"},{"URL":"https:\/\/pubs.aip.org\/aip\/rsi\/article-pdf\/doi\/10.1063\/5.0305429\/21133553\/094706_1_5.0305429.pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2026,9,10]],"date-time":"2026-09-10T12:52:37Z","timestamp":1789044757000},"score":1,"resource":{"primary":{"URL":"https:\/\/pubs.aip.org\/rsi\/article\/97\/9\/094706\/3404150\/Design-of-a-novel-intelligent-active-magnetic"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2026,9,1]]},"references-count":26,"journal-issue":{"issue":"9","published-print":{"date-parts":[[2026,9,1]]}},"URL":"https:\/\/doi.org\/10.1063\/5.0305429","relation":{},"ISSN":["0034-6748","1089-7623"],"issn-type":[{"value":"0034-6748","type":"print"},{"value":"1089-7623","type":"electronic"}],"subject":[],"published-other":{"date-parts":[[2026,9]]},"published":{"date-parts":[[2026,9,1]]},"article-number":"094706"}}