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However, cross-coupling motions are major sources of positioning errors, particularly in multi-axis, multi-stage systems. Here, we develop a visual sensing-based compliant dual-stage nano-manipulator driven by piezoelectric actuators for decoupled motion control. It comprises a XY stage for lateral motion and a Z stage for axial motion, both designed using symmetrical four-bar flexure mechanisms. The load\u2013displacement relationships of both stages were analyzed theoretically and their dimensions were optimized according to a maximum-stiffness criterion. A visual sensing-based position measurement and closed-loop control system was implemented to enable real-time motion compensation. Experimental results demonstrate good decoupling performance, with cross-coupling errors below 0.4% and 0.7% for the XY and Z stages, respectively. These errors can be further compensated in real time via visual servo control. The system capability was demonstrated by fabricating a micro-droplet array through droplet sliding on a hydrophobic surface.<\/jats:p>","DOI":"10.1063\/5.0311983","type":"journal-article","created":{"date-parts":[[2026,1,26]],"date-time":"2026-01-26T13:42:43Z","timestamp":1769434963000},"update-policy":"https:\/\/doi.org\/10.1063\/aip-crossmark-policy-page","source":"Crossref","is-referenced-by-count":2,"title":["Design and visual servo control of a three-axis piezo-flexural micro\/nano-manipulator with suppressed coupling motions"],"prefix":"10.1063","volume":"97","author":[{"ORCID":"https:\/\/orcid.org\/0009-0000-7165-1829","authenticated-orcid":false,"given":"Buyun","family":"Chen","sequence":"first","affiliation":[{"name":"Robotics Institute, School of Mechanical Engineering and Automation, Beihang University 1 , Beijing 100191,","place":["China"]}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Xiaomeng","family":"Cui","sequence":"additional","affiliation":[{"name":"Robotics Institute, School of Mechanical Engineering and Automation, Beihang University 1 , Beijing 100191,","place":["China"]}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Zhaoxin","family":"Lian","sequence":"additional","affiliation":[{"name":"Robotics Institute, School of Mechanical Engineering and Automation, Beihang University 1 , Beijing 100191,","place":["China"]}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0009-0001-7329-4957","authenticated-orcid":false,"given":"Shusheng","family":"Bi","sequence":"additional","affiliation":[{"name":"Robotics Institute, School of Mechanical Engineering and Automation, Beihang University 1 , Beijing 100191,","place":["China"]}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-6130-4321","authenticated-orcid":false,"given":"Yuliang","family":"Wang","sequence":"additional","affiliation":[{"name":"Robotics Institute, School of Mechanical Engineering and Automation, Beihang University 1 , Beijing 100191,","place":["China"]},{"name":"Ningbo Institute of Technology, Beihang University 2 , Ningbo 315832,","place":["China"]}],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"317","published-online":{"date-parts":[[2026,1,26]]},"reference":[{"issue":"2","key":"2026012608423631700_c1","doi-asserted-by":"publisher","first-page":"229","DOI":"10.1016\/j.bbagen.2017.07.010","volume":"1862","year":"2018","journal-title":"Biochim. 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