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Our modular design encapsulates the particularities of the hardware behind a Python interface that communicates with the ALD control software via transmission control protocol. This interface is compatible with model context protocol interfaces used in agentic frameworks. We have integrated our tool with a simple AI agent that leverages a large language model to transform user-supplied queries into ALD processes that are then run in our reactor. Our approach uses a JavaScript object notation schema to encode ALD processes. Our experimental results show that the AI interface does not impose a significant overhead to our control software, at least within our fastest 10\u00a0ms scale. We also carried out a detailed evaluation of the agent performance using leading models in two classes of tasks: basic instruction and process discovery tasks, where the agent is presented with a target material and needs to identify the correct ALD process compatible with the reactor configuration. Despite the simplicity of our agent design, we observed that most of the advanced models excelled at the instruction tasks. However, only recent models, such as o1, o3, GPT-5, and Claude Opus 4, performed well in process discovery tasks. We also observed significant variability in the response for the hardest challenges. While the results obtained are promising, we identify areas where AI research could improve the performance of agents for ALD.<\/jats:p>","DOI":"10.1063\/5.0318770","type":"journal-article","created":{"date-parts":[[2026,5,21]],"date-time":"2026-05-21T12:40:26Z","timestamp":1779367226000},"update-policy":"https:\/\/doi.org\/10.1063\/aip-crossmark-policy-page","source":"Crossref","is-referenced-by-count":3,"title":["Design and performance of AI agents interfacing with an atomic layer deposition tool"],"prefix":"10.1063","volume":"97","author":[{"ORCID":"https:\/\/orcid.org\/0000-0001-8207-3825","authenticated-orcid":false,"given":"Angel","family":"Yanguas-Gil","sequence":"first","affiliation":[{"name":"Argonne National Laboratory, Applied Materials Division , Lemont, Illinois 60439,","place":["USA"]}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-7475-4620","authenticated-orcid":false,"given":"Jessica C.","family":"Jones","sequence":"additional","affiliation":[{"name":"Argonne National Laboratory, Applied Materials Division , Lemont, Illinois 60439,","place":["USA"]}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-7906-3693","authenticated-orcid":false,"given":"Sungjoon","family":"Kim","sequence":"additional","affiliation":[{"name":"Argonne National Laboratory, Applied Materials Division , Lemont, Illinois 60439,","place":["USA"]}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-8379-7315","authenticated-orcid":false,"given":"Chi Thang","family":"Nguyen","sequence":"additional","affiliation":[{"name":"Argonne National Laboratory, Applied Materials Division , Lemont, Illinois 60439,","place":["USA"]}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-5861-2996","authenticated-orcid":false,"given":"Jeffrey W.","family":"Elam","sequence":"additional","affiliation":[{"name":"Argonne National Laboratory, Applied Materials Division , Lemont, Illinois 60439,","place":["USA"]}],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"317","published-online":{"date-parts":[[2026,5,21]]},"reference":[{"key":"2026052108402001600_c1","doi-asserted-by":"publisher","first-page":"282","DOI":"10.1016\/j.trechm.2019.02.007","volume":"1","year":"2019","journal-title":"Trends Chem."},{"key":"2026052108402001600_c2","doi-asserted-by":"publisher","first-page":"86","DOI":"10.1038\/s41586-023-06734-w","volume":"624","year":"2023","journal-title":"Nature"},{"key":"2026052108402001600_c3","doi-asserted-by":"publisher","first-page":"2514","DOI":"10.1039\/d4sc03921a","volume":"16","year":"2025","journal-title":"Chem. 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