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We demonstrate a single-shot angle-resolved spectroscopic micro-ellipsometry (SAR-SE) system integrating snapshot channeled spectropolarimetry with high-numerical-aperture (high-NA) microscopy. SAR-SE\u00a0enables the simultaneous acquisition of angularly and spectrally resolved ellipsometric information in a single exposure, achieving a spectral range of 410\u2013790\u00a0nm, incident angles spanning 0\u00b0\u201370\u00b0, a focused spot size of 3.15\u201312.6\u00a0\u03bcm, a lateral resolution better than 0.78\u00a0\u03bcm, and acquisition times down to 150\u00a0ms. A comprehensive system model incorporates residual polarization effects arising from high-NA objectives and beam splitters, as well as alignment errors, providing theoretical guidance for snapshot micro-ellipsometry design. An in situ calibration using a single spherical mirror determines retarder retardances and residual polarization factors without pre-calibrated references. Combined with physics-informed reconstruction, SAR-SE\u00a0achieves robust Mueller-matrix recovery despite azimuthal misalignment and noise, demonstrating an accuracy better than \u00b10.005 for the spherical mirror. Experiments on a series of SiO2\/Si films show good overall agreement with commercial spectroscopic ellipsometers and yield a thickness repeatability of 0.017\u20130.045\u00a0nm. These results validate SAR-SE\u2019s potential for monitoring nanoscale films and sub-micrometer structures in high-volume manufacturing.<\/jats:p>","DOI":"10.1063\/5.0332259","type":"journal-article","created":{"date-parts":[[2026,8,21]],"date-time":"2026-08-21T12:53:51Z","timestamp":1787316831000},"update-policy":"https:\/\/doi.org\/10.1063\/aip-crossmark-policy-page","source":"Crossref","is-referenced-by-count":0,"title":["Single-shot angle-resolved spectroscopic micro-ellipsometry with full-field imaging capability"],"prefix":"10.1063","volume":"97","author":[{"ORCID":"https:\/\/orcid.org\/0000-0001-7498-0038","authenticated-orcid":false,"given":"Jing","family":"Hu","sequence":"first","affiliation":[{"name":"State Key Laboratory of Intelligent Manufacturing Equipment and Technology, Huazhong University of Science and Technology 1 , Wuhan 430074,","place":["China"]}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-7067-5084","authenticated-orcid":false,"given":"Xiuguo","family":"Chen","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Intelligent Manufacturing Equipment and Technology, Huazhong University of Science and Technology 1 , Wuhan 430074,","place":["China"]},{"name":"Optics Valley Laboratory 2 , Wuhan 430074,","place":["China"]}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0009-0009-2177-8296","authenticated-orcid":false,"given":"Shilong","family":"Yang","sequence":"additional","affiliation":[{"name":"Department of Precision Instrument, Tsinghua University 3 , Beijing 100084,","place":["China"]}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-4498-8642","authenticated-orcid":false,"given":"Zirong","family":"Tang","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Intelligent Manufacturing Equipment and Technology, Huazhong University of Science and Technology 1 , Wuhan 430074,","place":["China"]},{"name":"Optics Valley Laboratory 2 , Wuhan 430074,","place":["China"]}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-0756-1439","authenticated-orcid":false,"given":"Shiyuan","family":"Liu","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Intelligent Manufacturing Equipment and Technology, Huazhong University of Science and Technology 1 , Wuhan 430074,","place":["China"]},{"name":"Optics Valley Laboratory 2 , Wuhan 430074,","place":["China"]}],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"317","published-online":{"date-parts":[[2026,8,21]]},"reference":[{"key":"2026082108534598100_c1","doi-asserted-by":"publisher","first-page":"3683","DOI":"10.1021\/acs.nanolett.4c06007","volume":"25","year":"2025","journal-title":"Nano Lett."},{"key":"2026082108534598100_c2","doi-asserted-by":"publisher","first-page":"754","DOI":"10.1038\/s41467-025-68217-y","volume":"17","year":"2026","journal-title":"Nat. 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