{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,9,25]],"date-time":"2026-09-25T11:09:36Z","timestamp":1790334576441,"version":"4.1.0"},"reference-count":32,"publisher":"AIP Publishing","issue":"12","funder":[{"DOI":"10.13039\/501100003130","name":"Fonds Wetenschappelijk Onderzoek","doi-asserted-by":"publisher","award":["K217624N"],"award-info":[{"award-number":["K217624N"]}],"id":[{"id":"10.13039\/501100003130","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100001871","name":"Funda\u00e7\u00e3o para a Ci\u00eancia e a Tecnologia","doi-asserted-by":"publisher","award":["UID\/FIS\/00068\/2025"],"award-info":[{"award-number":["UID\/FIS\/00068\/2025"]}],"id":[{"id":"10.13039\/501100001871","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100001871","name":"Funda\u00e7\u00e3o para a Ci\u00eancia e a Tecnologia","doi-asserted-by":"publisher","award":["FCT\/Mobility\/1309167586\/2024-25"],"award-info":[{"award-number":["FCT\/Mobility\/1309167586\/2024-25"]}],"id":[{"id":"10.13039\/501100001871","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":["pubs.aip.org"],"crossmark-restriction":true},"short-container-title":[],"published-print":{"date-parts":[[2026,9,28]]},"abstract":"<jats:p>Pentafluorophenyl triflate has been explored as a highly absorbing neutral photoacid generator (PAG) candidate for next-generation chemically amplified resists used in extreme ultraviolet (EUV) lithography. Although increased fluorination enhances EUV absorption, this study demonstrates that such an approach does not necessarily improve photoacid generation efficiency. Using photoelectron\u2013photoion coincidence spectroscopy at the 92\u00a0eV photon energy of the EUV scanners in combination with quantum-chemical calculations, the dissociative photoionization of pentafluorophenyl triflate was systematically investigated. The photoionization mass spectrum reveals extensive fragmentation, with the parent ion contributing only 3.1% of the total signal and CF3+ representing the dominant product ion. Computed appearance energies align well with experimental trends and support a sequential fragmentation pathway involving loss of SO2, CF3, and CO. Crucially, none of the major dissociation channels yield precursors capable of forming triflic acid, the strong photoacid required for efficient deprotection reactions in chemically amplified resists. Combined with previous dissociative electron attachment studies indicating similarly unfavorable fragmentation, the results demonstrate that despite its high EUV absorption cross section, pentafluorophenyl triflate is unsuitable as a PAG for EUV lithography. The findings highlight the importance of understanding fundamental photoionization and electron-interaction mechanisms to guide the rational design of next-generation high-performance EUV photoresists.<\/jats:p>","DOI":"10.1063\/5.0349498","type":"journal-article","created":{"date-parts":[[2026,9,25]],"date-time":"2026-09-25T10:32:20Z","timestamp":1790332340000},"update-policy":"https:\/\/doi.org\/10.1063\/aip-crossmark-policy-page","source":"Crossref","is-referenced-by-count":0,"title":["More is not always better: Dissociative photoionization limits the EUV absorbing photoacid generator pentafluorophenyl triflate in photolithography"],"prefix":"10.1063","volume":"165","author":[{"ORCID":"https:\/\/orcid.org\/0000-0001-8749-5330","authenticated-orcid":false,"given":"Fabian","family":"Holzmeier","sequence":"first","affiliation":[{"name":"IMEC 1 , Kapeldreef 75, 3001 Leuven,","place":["Belgium"]}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0003-0557-5260","authenticated-orcid":false,"given":"Michiel J.","family":"van Setten","sequence":"additional","affiliation":[{"name":"IMEC 1 , Kapeldreef 75, 3001 Leuven,","place":["Belgium"]}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0003-2167-8374","authenticated-orcid":false,"given":"Ragnar","family":"Bj\u00f6rnsson","sequence":"additional","affiliation":[{"name":"Chemistry and Biology of Metals Laboratory, UMR 5249 CNRS-CEA-UGA 2 , 17 Rue des Martyrs, 38054 Grenoble Cedex 9,","place":["France"]}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-8585-626X","authenticated-orcid":false,"given":"Robert","family":"Richter","sequence":"additional","affiliation":[{"name":"Elettra-Sincrotrone Trieste, Area Science Park 3 , Basovizza, 34149 Trieste,","place":["Italy"]}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-2182-2965","authenticated-orcid":false,"given":"Filipe","family":"Ferreira da Silva","sequence":"additional","affiliation":[{"name":"CEFITEC, Department of Physics, NOVA University Lisbon, School of Science and Technology 4 , 2829-516 Caparica,","place":["Portugal"]}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-7100-9438","authenticated-orcid":false,"given":"Oddur","family":"Ing\u00f3lfsson","sequence":"additional","affiliation":[{"name":"Department of Chemistry, University of Iceland, Science Institute 5 , Dunhagi 3, 107 Reykjavik,","place":["Iceland"]}],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"317","published-online":{"date-parts":[[2026,9,25]]},"reference":[{"issue":"1","key":"2026092506321101200_c1","doi-asserted-by":"publisher","first-page":"84","DOI":"10.1038\/s43586-024-00361-z","volume":"4","year":"2024","journal-title":"Nat. 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