{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,12,20]],"date-time":"2025-12-20T22:14:34Z","timestamp":1766268874305},"reference-count":15,"publisher":"AIP Publishing","issue":"6","content-domain":{"domain":["pubs.aip.org"],"crossmark-restriction":true},"short-container-title":[],"published-print":{"date-parts":[[2000,8,7]]},"abstract":"<jats:p>Air-gap resonators composed of bridges of hydrogenated amorphous silicon and aluminum bilayers on glass and polyethylene terephthalate substrates are realized using surface micromachining techniques. The resonance frequency of structures on plastic substrates was found to vary inversely with the square of the length of the bridge span. On glass substrates, this dependence is seen for lengths &amp;gt;100\u200a\u03bcm, while for lengths &amp;lt;100\u200a\u03bcm, a decrease in the frequency is attributed to compressive stress. Resonance frequencies of \u223c500\u200akHz to \u223c2\u200aMHz were measured in bridges with lengths from 160 \u03bcm down to \u223c80\u200a\u03bcm.<\/jats:p>","DOI":"10.1063\/1.1306912","type":"journal-article","created":{"date-parts":[[2002,7,26]],"date-time":"2002-07-26T13:36:40Z","timestamp":1027690600000},"page":"907-909","update-policy":"http:\/\/dx.doi.org\/10.1063\/aip-crossmark-policy-page","source":"Crossref","is-referenced-by-count":38,"title":["Amorphous silicon air-gap resonators on large-area substrates"],"prefix":"10.1063","volume":"77","author":[{"given":"M.","family":"Boucinha","sequence":"first","affiliation":[{"name":"Instituto de Engenharia de Sistemas e Computadores (INESC), Rua Alves Redol, 9, 1000-029\u2009Lisbon, Portugal"}]},{"given":"P.","family":"Brogueira","sequence":"additional","affiliation":[{"name":"Department of Physics, Instituto Superior T\u00e9cnico, 1049-001\u2009Lisbon, Portugal"}]},{"given":"V.","family":"Chu","sequence":"additional","affiliation":[{"name":"Instituto de Engenharia de Sistemas e Computadores (INESC), Rua Alves Redol, 9, 1000-029\u2009Lisbon, Portugal"}]},{"given":"J. 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