{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,3,1]],"date-time":"2026-03-01T01:27:31Z","timestamp":1772328451092,"version":"3.50.1"},"reference-count":20,"publisher":"AIP Publishing","issue":"14","content-domain":{"domain":["pubs.aip.org"],"crossmark-restriction":true},"short-container-title":[],"published-print":{"date-parts":[[2000,10,2]]},"abstract":"<jats:p>We report on the lattice location of ion-implanted Cu67 in p+- and n+-Si using the emission channeling technique. Following room-temperature implantation, the majority of Cu was found on near-substitutional sites in both p+- and n+-Si. Annealing in the temperature range 200\u2013600\u200a\u00b0C resulted in changes of near-substitutional Cu to random sites in p+-Si, while in n+- Si all of the near-substitutional Cu was converted to ideal substitutional lattice sites. The activation energy for dissociation is estimated to be 1.7\u20132.0 eV for near-substitutional Cu in p+-Si and 2.9(2) eV for ideal substitutional Cu in n+-Si.<\/jats:p>","DOI":"10.1063\/1.1314876","type":"journal-article","created":{"date-parts":[[2002,7,26]],"date-time":"2002-07-26T13:59:53Z","timestamp":1027691993000},"page":"2142-2144","update-policy":"https:\/\/doi.org\/10.1063\/aip-crossmark-policy-page","source":"Crossref","is-referenced-by-count":23,"title":["Lattice location of implanted Cu in highly doped Si"],"prefix":"10.1063","volume":"77","author":[{"given":"U.","family":"Wahl","sequence":"first","affiliation":[{"name":"Instituut voor Kern-en Stralingsfysica, University of Leuven, Celestijnenlaan 200 D, B-3001\u2009Leuven, Belgium"}]},{"given":"A.","family":"Vantomme","sequence":"additional","affiliation":[{"name":"Instituut voor Kern-en Stralingsfysica, University of Leuven, Celestijnenlaan 200 D, B-3001\u2009Leuven, Belgium"}]},{"given":"G.","family":"Langouche","sequence":"additional","affiliation":[{"name":"Instituut voor Kern-en Stralingsfysica, University of Leuven, Celestijnenlaan 200 D, B-3001\u2009Leuven, Belgium"}]},{"given":"J. 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