{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,10,29]],"date-time":"2025-10-29T03:16:18Z","timestamp":1761707778336,"version":"3.41.2"},"reference-count":70,"publisher":"AIP Publishing","issue":"9","content-domain":{"domain":["pubs.aip.org"],"crossmark-restriction":true},"short-container-title":[],"published-print":{"date-parts":[[2005,5,1]]},"abstract":"<jats:p>Doped hydrogenated amorphous silicon microbridge resonators are fabricated at temperatures below 110\u00b0C on glass substrates using thin-film technology and surface micromachining. The microelectromechanical structures are electrostatically actuated by using a superposition of dc and ac voltage components. The resulting deflection is optically detected. The effects of the measurement pressure, actuation voltage, and geometrical dimensions of the structures on the resonance frequency and quality factor are studied and the results are interpreted using electromechanical models. Resonance frequencies between 600kHz and 31MHz are observed for the micron-sized structures, corresponding to effective elastic spring constants in the range from 10 to 4000N\u2215m, for both the fundamental flexural mode and the symmetry-allowed harmonics. Young\u2019s moduli of 146 and 80GPa are extracted for hydrogenated amorphous silicon and aluminum, respectively. At a measurement pressure of 10\u22126Torr, these resonators present quality factors as high as 5000 in the small-deflection limit. The value of the quality factor is very sensitive to both the measurement pressure and excitation voltage amplitude.<\/jats:p>","DOI":"10.1063\/1.1877820","type":"journal-article","created":{"date-parts":[[2005,4,15]],"date-time":"2005-04-15T22:03:21Z","timestamp":1113602601000},"update-policy":"https:\/\/doi.org\/10.1063\/aip-crossmark-policy-page","source":"Crossref","is-referenced-by-count":29,"title":["Electrostatically actuated thin-film amorphous silicon microbridge resonators"],"prefix":"10.1063","volume":"97","author":[{"given":"J.","family":"Gaspar","sequence":"first","affiliation":[{"name":"Instituto de Engenharia de Sistemas e Computadores-Microsistemas e Nanotecnologias (INESC MN) , Rua Alves Redol 9, 1000-029 Lisbon, Portugal"}]},{"given":"V.","family":"Chu","sequence":"additional","affiliation":[{"name":"Instituto de Engenharia de Sistemas e Computadores-Microsistemas e Nanotecnologias (INESC MN) , Rua Alves Redol 9, 1000-029 Lisbon, Portugal"}]},{"given":"J. P.","family":"Conde","sequence":"additional","affiliation":[{"name":"Instituto de Engenharia de Sistemas e Computadores-Microsistemas e Nanotecnologias (INESC MN) , Rua Alves Redol 9, 1000-029 Lisbon, Portugal and Department of Chemical Engineering, , Avenida Rovisco Pais, 1049-001 Lisbon, Portugal"},{"name":"Instituto Superior T\u00e9cnico (IST) , Rua Alves Redol 9, 1000-029 Lisbon, Portugal and Department of Chemical Engineering, , Avenida Rovisco Pais, 1049-001 Lisbon, Portugal"}]}],"member":"317","published-online":{"date-parts":[[2005,4,18]]},"reference":[{"volume-title":"Mechanical Microsensors","year":"2001","key":"2023080110135675800_c1"},{"key":"2023080110135675800_c2","doi-asserted-by":"publisher","first-page":"440","DOI":"10.1109\/4.753677","volume":"34","year":"1999","journal-title":"IEEE J. Solid-State Circuits"},{"volume-title":"An Introduction to Microelectromechanical Systems Engineering","year":"2000","key":"2023080110135675800_c3"},{"volume-title":"Hydrogenated Amorphous Silicon","year":"1991","key":"2023080110135675800_c4"},{"key":"2023080110135675800_c5","doi-asserted-by":"publisher","first-page":"3812","DOI":"10.1063\/1.371292","volume":"86","year":"1999","journal-title":"J. Appl. Phys."},{"volume-title":"Technology and Applications of Amorphous Silicon","year":"2000","key":"2023080110135675800_c6"},{"key":"2023080110135675800_c7","doi-asserted-by":"crossref","first-page":"41","DOI":"10.1109\/JSEN.2001.923586","volume":"1","year":"2001","journal-title":"IEEE Sens. J."},{"key":"2023080110135675800_c8","doi-asserted-by":"crossref","first-page":"327","DOI":"10.1557\/PROC-507-327","volume":"507","year":"1998","journal-title":"Mater. Res. Soc. Symp. Proc."},{"first-page":"233","article-title":"Proceedings of OPTO 98","year":"1998","key":"2023080110135675800_c9"},{"key":"2023080110135675800_c10","doi-asserted-by":"crossref","first-page":"A21","DOI":"10.1557\/PROC-609-A2.1","volume":"609","year":"2000","journal-title":"Mater. Res. Soc. Symp. Proc."},{"key":"2023080110135675800_c11","first-page":"1224","volume":"299\u2013302","year":"2002","journal-title":"J. Non-Cryst. Solids"},{"key":"2023080110135675800_c12","doi-asserted-by":"publisher","first-page":"502","DOI":"10.1063\/1.121914","volume":"73","year":"1998","journal-title":"Appl. Phys. Lett."},{"key":"2023080110135675800_c13","doi-asserted-by":"publisher","first-page":"622","DOI":"10.1063\/1.1644319","volume":"84","year":"2004","journal-title":"Appl. Phys. Lett."},{"first-page":"633","volume-title":"Proceedings of the 17th IEEE MEMS Conference, Maastricht, The Netherlands","year":"2004","key":"2023080110135675800_c14"},{"key":"2023080110135675800_c15","first-page":"A2","volume":"782","year":"2003","journal-title":"Mater. Res. Soc. Symp. Proc."},{"key":"2023080110135675800_c16","doi-asserted-by":"publisher","first-page":"10018","DOI":"10.1063\/1.1573344","volume":"93","year":"2003","journal-title":"J. Appl. Phys."},{"key":"2023080110135675800_c17","doi-asserted-by":"publisher","first-page":"550","DOI":"10.1109\/JMEMS.2003.817890","volume":"12","year":"2003","journal-title":"J. Microelectromech. Syst."},{"key":"2023080110135675800_c18","doi-asserted-by":"publisher","first-page":"7774","DOI":"10.1063\/1.1451896","volume":"91","year":"2002","journal-title":"J. Appl. Phys."},{"key":"2023080110135675800_c19","doi-asserted-by":"crossref","first-page":"A14","DOI":"10.1557\/PROC-609-A1.4","volume":"609","year":"2000","journal-title":"Mater. Res. Soc. Symp. Proc."},{"key":"2023080110135675800_c20","doi-asserted-by":"publisher","first-page":"930","DOI":"10.1103\/PhysRevLett.56.930","volume":"56","year":"1986","journal-title":"Phys. Rev. Lett."},{"key":"2023080110135675800_c21","doi-asserted-by":"publisher","first-page":"122","DOI":"10.1016\/S0925-4005(01)00683-9","volume":"77","year":"2001","journal-title":"Sens. Actuators B"},{"key":"2023080110135675800_c22","doi-asserted-by":"publisher","first-page":"3091","DOI":"10.1063\/1.1514825","volume":"81","year":"2002","journal-title":"Appl. Phys. Lett."},{"key":"2023080110135675800_c23","doi-asserted-by":"publisher","first-page":"2697","DOI":"10.1063\/1.1569050","volume":"82","year":"2003","journal-title":"Appl. Phys. Lett."},{"key":"2023080110135675800_c24","doi-asserted-by":"publisher","first-page":"1976","DOI":"10.1063\/1.1667011","volume":"84","year":"2004","journal-title":"Appl. Phys. Lett."},{"key":"2023080110135675800_c25","doi-asserted-by":"publisher","first-page":"2682","DOI":"10.1063\/1.1642738","volume":"95","year":"2004","journal-title":"J. Appl. Phys."},{"key":"2023080110135675800_c26","first-page":"J12","volume":"741","year":"2003","journal-title":"Mater. Res. Soc. Symp. Proc."},{"key":"2023080110135675800_c27","doi-asserted-by":"publisher","first-page":"1486","DOI":"10.1109\/22.780400","volume":"47","year":"1999","journal-title":"IEEE Trans. Microwave Theory Tech."},{"key":"2023080110135675800_c28","doi-asserted-by":"publisher","first-page":"534","DOI":"10.1109\/84.809070","volume":"8","year":"1999","journal-title":"J. Microelectromech. Syst."},{"volume-title":"Foundations of Nanomechanics-From Solid-State Theory to Device Applications","year":"2002","key":"2023080110135675800_c29"},{"key":"2023080110135675800_c30","doi-asserted-by":"publisher","first-page":"215","DOI":"10.1016\/S0924-4247(02)00149-8","volume":"101","year":"2002","journal-title":"Sens. Actuators, A"},{"key":"2023080110135675800_c31","doi-asserted-by":"publisher","first-page":"162","DOI":"10.1063\/1.1338959","volume":"78","year":"2001","journal-title":"Appl. Phys. Lett."},{"key":"2023080110135675800_c32"},{"key":"2023080110135675800_c33"},{"key":"2023080110135675800_c34","doi-asserted-by":"publisher","first-page":"1048","DOI":"10.1116\/1.1586275","volume":"21","year":"2003","journal-title":"J. Vac. Sci. Technol. A"},{"year":"2001","key":"2023080110135675800_c35"},{"key":"2023080110135675800_c36"},{"key":"2023080110135675800_c37"},{"key":"2023080110135675800_c38"},{"key":"2023080110135675800_c39","doi-asserted-by":"publisher","first-page":"1482","DOI":"10.1063\/1.1340559","volume":"72","year":"2001","journal-title":"Rev. Sci. Instrum."},{"key":"2023080110135675800_c40","doi-asserted-by":"publisher","first-page":"3549","DOI":"10.1116\/1.1313571","volume":"18","year":"2000","journal-title":"J. Vac. Sci. Technol. B"},{"volume-title":"Microsystem Design","year":"2001","key":"2023080110135675800_c41"},{"key":"2023080110135675800_c42","doi-asserted-by":"publisher","first-page":"775","DOI":"10.1109\/JMEMS.2002.805208","volume":"11","year":"2002","journal-title":"J. Microelectromech. Syst."},{"first-page":"1110","article-title":"Technical Digest of IEEE 11th International Conference Solid-State Sensors Actuators (Transducers\u201901)","year":"2001","key":"2023080110135675800_c43"},{"key":"2023080110135675800_c44","unstructured":"Y.-J.\u2008Yang, Ph.D. thesis, MIT, Boston, 1998."},{"key":"2023080110135675800_c45","doi-asserted-by":"publisher","first-page":"085416","DOI":"10.1103\/PhysRevB.66.085416","volume":"66","year":"2002","journal-title":"Phys. Rev. B"},{"key":"2023080110135675800_c46","doi-asserted-by":"crossref","first-page":"615","DOI":"10.1115\/1.3254692","volume":"105","year":"1983","journal-title":"J. Lubr. Technol."},{"key":"2023080110135675800_c47","doi-asserted-by":"publisher","first-page":"556","DOI":"10.1088\/0960-1317\/12\/5\/307","volume":"12","year":"2002","journal-title":"J. Micromech. Microeng."},{"key":"2023080110135675800_c48","doi-asserted-by":"crossref","first-page":"1320","DOI":"10.1126\/science.161.3848.1320","volume":"161","year":"1968","journal-title":"Science"},{"key":"2023080110135675800_c49","doi-asserted-by":"publisher","first-page":"175","DOI":"10.1016\/0042-207X(66)91162-6","volume":"16","year":"1966","journal-title":"Vacuum"},{"key":"2023080110135675800_c50","doi-asserted-by":"crossref","first-page":"451","DOI":"10.1115\/1.3645878","volume":"88","year":"1966","journal-title":"J. Basic Eng."},{"volume-title":"Properties of Amorphous Silicon","edition":"2nd ed.","key":"2023080110135675800_c51"},{"key":"2023080110135675800_c52","doi-asserted-by":"publisher","first-page":"7154","DOI":"10.1063\/1.355031","volume":"74","year":"1993","journal-title":"J. Appl. Phys."},{"key":"2023080110135675800_c53","first-page":"1241","volume":"ED-25","year":"1978","journal-title":"IEEE Trans. Electron Devices"},{"key":"2023080110135675800_c54","doi-asserted-by":"publisher","first-page":"759","DOI":"10.1088\/0960-1317\/12\/6\/306","volume":"12","year":"2002","journal-title":"J. Micromech. Microeng."},{"first-page":"1826","article-title":"Techical Digest of the IEEE 10th International Conference Solid-State Sensors Actuators","year":"1999","key":"2023080110135675800_c55"},{"key":"2023080110135675800_c56","first-page":"363","volume":"56","year":"1927","journal-title":"Trans. Am. Inst. Electr. Eng."},{"key":"2023080110135675800_c57","first-page":"183","volume":"ED-30","year":"1983","journal-title":"IEEE Trans. Electron Devices"},{"key":"2023080110135675800_c58","doi-asserted-by":"publisher","first-page":"601","DOI":"10.1109\/84.967384","volume":"10","year":"2001","journal-title":"J. Microelectromech. Syst."},{"volume-title":"Non-Linear Oscillations","year":"1998","key":"2023080110135675800_c59"},{"key":"2023080110135675800_c60","doi-asserted-by":"publisher","first-page":"79","DOI":"10.1016\/0924-4247(91)80034-M","volume":"29","year":"1991","journal-title":"Sens. Actuators, A"},{"key":"2023080110135675800_c61"},{"key":"2023080110135675800_c62","doi-asserted-by":"publisher","first-page":"3187","DOI":"10.1063\/1.1712028","volume":"84","year":"2004","journal-title":"Appl. Phys. Lett."},{"volume-title":"Introduction to Microelectromechanical (MEM) Microwave Systems","year":"1999","key":"2023080110135675800_c63"},{"key":"2023080110135675800_c64","doi-asserted-by":"publisher","first-page":"1680","DOI":"10.1063\/1.1427403","volume":"91","year":"2002","journal-title":"J. Appl. Phys."},{"key":"2023080110135675800_c65","doi-asserted-by":"publisher","first-page":"260","DOI":"10.1016\/0040-6090(95)06990-9","volume":"270","year":"1995","journal-title":"Thin Solid Films"},{"volume-title":"Buckling of Bars, Plates, and Shells","year":"1975","key":"2023080110135675800_c66"},{"edition":"5th ed","volume-title":"Vibration Problems in Engineering","year":"1990","key":"2023080110135675800_c67"},{"key":"2023080110135675800_c68","doi-asserted-by":"publisher","first-page":"107","DOI":"10.1109\/84.585788","volume":"6","year":"1997","journal-title":"J. Microelectromech. Syst."},{"key":"2023080110135675800_c69","doi-asserted-by":"publisher","first-page":"2789","DOI":"10.1063\/1.1496123","volume":"92","year":"2002","journal-title":"J. Appl. Phys."},{"key":"2023080110135675800_c70","doi-asserted-by":"publisher","first-page":"361","DOI":"10.1109\/84.870062","volume":"9","year":"2000","journal-title":"J. Microelectromech. Syst."}],"container-title":["Journal of Applied Physics"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/pubs.aip.org\/aip\/jap\/article-pdf\/doi\/10.1063\/1.1877820\/13115058\/094501_1_online.pdf","content-type":"application\/pdf","content-version":"vor","intended-application":"syndication"},{"URL":"https:\/\/pubs.aip.org\/aip\/jap\/article-pdf\/doi\/10.1063\/1.1877820\/13115058\/094501_1_online.pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2023,8,1]],"date-time":"2023-08-01T10:14:27Z","timestamp":1690884867000},"score":1,"resource":{"primary":{"URL":"https:\/\/pubs.aip.org\/jap\/article\/97\/9\/094501\/913678\/Electrostatically-actuated-thin-film-amorphous"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2005,4,18]]},"references-count":70,"journal-issue":{"issue":"9","published-print":{"date-parts":[[2005,5,1]]}},"URL":"https:\/\/doi.org\/10.1063\/1.1877820","relation":{},"ISSN":["0021-8979","1089-7550"],"issn-type":[{"type":"print","value":"0021-8979"},{"type":"electronic","value":"1089-7550"}],"subject":[],"published-other":{"date-parts":[[2005,5,1]]},"published":{"date-parts":[[2005,4,18]]},"article-number":"094501"}}