{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,3,25]],"date-time":"2026-03-25T19:16:36Z","timestamp":1774466196928,"version":"3.50.1"},"reference-count":43,"publisher":"AIP Publishing","issue":"2","content-domain":{"domain":["pubs.aip.org"],"crossmark-restriction":true},"short-container-title":[],"published-print":{"date-parts":[[2005,7,15]]},"abstract":"<jats:p>The main objective of this work is the preparation of decorative zirconium oxynitride, ZrOxNy, thin films by dc reactive magnetron sputtering. Film properties were analyzed as a function of the reactive gas flow and were correlated with the observed structural changes. Measurements showed a systematic decrease in the deposition rate with the increase of the reactive gas flow and revealed three distinct modes: (i) a metallic mode, (ii) a transition mode (subdivided into three zones), and (iii) an oxide mode. The measurements of target potential were also consistent with these changes, revealing a systematic increase from 314to337V. Structural characterization uncovered different behaviors within each of the different zones, with a strong dependence of film texture on the oxygen content. These structural changes were also confirmed by resistivity measurements, whose values ranged from 250to400\u03bc\u03a9cm for low gas flows and up to 106\u03bc\u03a9cm for the highest flow rates. Color measurements in the films revealed a change from bright yellow at low reactive gas flows to red brownish at intermediate flows and dark blue for the films prepared at the highest flows. Hardness measurements gave higher values for the region where larger grain sizes were found, showing that the grain growth hardening effect is one of the main parameters that can help explain the observed behavior. Also the peak intensity ratio and the residual stress states were found to be important factors for explaining this behavior.<\/jats:p>","DOI":"10.1063\/1.1990261","type":"journal-article","created":{"date-parts":[[2005,7,26]],"date-time":"2005-07-26T22:01:33Z","timestamp":1122415293000},"update-policy":"https:\/\/doi.org\/10.1063\/aip-crossmark-policy-page","source":"Crossref","is-referenced-by-count":93,"title":["Structural, electrical, optical, and mechanical characterizations of decorative ZrOxNy thin films"],"prefix":"10.1063","volume":"98","author":[{"given":"P.","family":"Carvalho","sequence":"first","affiliation":[{"name":"Universidade do Minho Departamento de F\u00edsica, , 4800-058 Guimar\u00e3es, Portugal"}]},{"given":"F.","family":"Vaz","sequence":"additional","affiliation":[{"name":"Universidade do Minho Departamento de F\u00edsica, , 4800-058 Guimar\u00e3es, Portugal"}]},{"given":"L.","family":"Rebouta","sequence":"additional","affiliation":[{"name":"Universidade do Minho Departamento de F\u00edsica, , 4800-058 Guimar\u00e3es, Portugal"}]},{"given":"L.","family":"Cunha","sequence":"additional","affiliation":[{"name":"Universidade do Minho Departamento de F\u00edsica, , 4800-058 Guimar\u00e3es, Portugal"}]},{"given":"C. J.","family":"Tavares","sequence":"additional","affiliation":[{"name":"Universidade do Minho Departamento de F\u00edsica, , 4800-058 Guimar\u00e3es, Portugal"}]},{"given":"C.","family":"Moura","sequence":"additional","affiliation":[{"name":"Universidade do Minho Departamento de F\u00edsica, , 4800-058 Guimar\u00e3es, Portugal"}]},{"given":"E.","family":"Alves","sequence":"additional","affiliation":[{"name":"Instituto Tecnol\u00f3gico Nuclear Departamento de F\u00edsica, , Estrada Nacional 10, 2686-953 Sacav\u00e9m, Portugal"}]},{"given":"A.","family":"Cavaleiro","sequence":"additional","affiliation":[{"name":"ICMES\u2014Fac. Ci\u00eancias Tecnologia Universidade de Coimbra , 3030-039 Coimbra, Portugal"}]},{"given":"Ph.","family":"Goudeau","sequence":"additional","affiliation":[{"name":"Universit\u00e9 de Poitiers Laboratoire de M\u00e9tallurgie Physique, , 86960 Futuroscope, France"}]},{"given":"E.","family":"Le Bourhis","sequence":"additional","affiliation":[{"name":"Universit\u00e9 de Poitiers Laboratoire de M\u00e9tallurgie Physique, , 86960 Futuroscope, France"}]},{"given":"J. P.","family":"Rivi\u00e8re","sequence":"additional","affiliation":[{"name":"Universit\u00e9 de Poitiers Laboratoire de M\u00e9tallurgie Physique, , 86960 Futuroscope, France"}]},{"given":"J. F.","family":"Pierson","sequence":"additional","affiliation":[{"name":"Universit\u00e9 de Franche-Comt\u00e9 Dpt CREST, Institut FEMTO-ST [UMR Centre National de la Recherche Scientifique (CNRS) 6174], , 25211 Montb\u00e9liard Cedex, France"}]},{"given":"O.","family":"Banakh","sequence":"additional","affiliation":[{"name":"University of Applied Sciences , Haute \u00c9cole ARC, 7, Avenue de l\"Hotel-de-Ville, 2400 Le Locle, Switzerland"}]}],"member":"317","published-online":{"date-parts":[[2005,7,28]]},"reference":[{"key":"2023070319085505200_c1","doi-asserted-by":"publisher","first-page":"195","DOI":"10.1016\/S0167-5729(99)00013-8","volume":"38","year":"2000","journal-title":"Surf. Sci. Rep."},{"key":"2023070319085505200_c2","volume-title":"The Materials Science of Thin Films","year":"1992"},{"key":"2023070319085505200_c3","first-page":"274","volume":"469\u2013470","year":"2004","journal-title":"Thin Solid Films"},{"key":"2023070319085505200_c4","first-page":"11","volume":"469\u2013470","year":"2004","journal-title":"Thin Solid Films"},{"key":"2023070319085505200_c5","first-page":"449","volume":"447\u2013448","year":"2004","journal-title":"Thin Solid Films"},{"key":"2023070319085505200_c6","first-page":"372","volume":"180\u2013181","year":"2004","journal-title":"Surf. Coat. Technol."},{"key":"2023070319085505200_c7","first-page":"197","volume":"174\u2013175","year":"2003","journal-title":"Surf. Coat. Technol."},{"key":"2023070319085505200_c8","first-page":"515","volume":"151\u2013152","year":"2002","journal-title":"Surf. Coat. Technol."},{"key":"2023070319085505200_c9","doi-asserted-by":"publisher","first-page":"196","DOI":"10.1116\/1.573470","volume":"4","year":"1986","journal-title":"J. Vac. Sci. Technol. A"},{"key":"2023070319085505200_c10","volume-title":"Colorimetry","year":"1971"},{"key":"2023070319085505200_c11","volume-title":"Recommendations on Uniform Color Spaces, Difference-Difference Equations, Psychometric Color Terms","year":"1978"},{"key":"2023070319085505200_c12","doi-asserted-by":"crossref","first-page":"172","DOI":"10.1098\/rspa.1909.0021","volume":"82","year":"1909","journal-title":"Proc. R. Soc. London, Ser. A"},{"key":"2023070319085505200_c13","volume-title":"Thin Film Process Technology","year":"1995"},{"key":"2023070319085505200_c14","doi-asserted-by":"crossref","first-page":"593","DOI":"10.1007\/s003390050522","volume":"64","year":"1997","journal-title":"Appl. Phys. A: Mater. Sci. Process."},{"key":"2023070319085505200_c15","doi-asserted-by":"publisher","first-page":"73","DOI":"10.1016\/S0167-577X(99)00233-5","volume":"43","year":"2000","journal-title":"Mater. Lett."},{"key":"2023070319085505200_c16","doi-asserted-by":"publisher","first-page":"9086","DOI":"10.1063\/1.1567797","volume":"93","year":"2003","journal-title":"J. Appl. Phys."},{"key":"2023070319085505200_c17","doi-asserted-by":"publisher","first-page":"5084","DOI":"10.1063\/1.1510558","volume":"92","year":"2002","journal-title":"J. Appl. Phys."},{"key":"2023070319085505200_c18","first-page":"316","volume":"447\u2013448","year":"2004","journal-title":"Thin Solid Films"},{"key":"2023070319085505200_c19","doi-asserted-by":"crossref","first-page":"50","DOI":"10.1016\/j.tsf.2004.08.006","volume":"474","year":"2005","journal-title":"Thin Solid Films"},{"key":"2023070319085505200_c20","doi-asserted-by":"publisher","first-page":"329","DOI":"10.1016\/j.surfcoat.2003.12.026","volume":"185","year":"2004","journal-title":"Surf. Coat. Technol."},{"key":"2023070319085505200_c21","doi-asserted-by":"crossref","first-page":"17","DOI":"10.1016\/j.surfcoat.2004.07.066","volume":"191","year":"2005","journal-title":"Surf. Coat. Technol."},{"key":"2023070319085505200_c22","doi-asserted-by":"publisher","first-page":"117","DOI":"10.1016\/0040-6090(91)90225-M","volume":"197","year":"1991","journal-title":"Thin Solid Films"},{"key":"2023070319085505200_c23","doi-asserted-by":"publisher","first-page":"1692","DOI":"10.1063\/1.355297","volume":"74","year":"1993","journal-title":"J. Appl. Phys."},{"key":"2023070319085505200_c24","doi-asserted-by":"crossref","first-page":"122","DOI":"10.1016\/j.surfcoat.2004.01.008","volume":"187","year":"2004","journal-title":"Surf. Coat. Technol."},{"key":"2023070319085505200_c25","doi-asserted-by":"publisher","first-page":"239","DOI":"10.1146\/annurev.ms.07.080177.001323","volume":"7","year":"1977","journal-title":"Annu. Rev. Mater. Sci."},{"key":"2023070319085505200_c26","doi-asserted-by":"publisher","first-page":"044108","DOI":"10.1063\/1.1851000","volume":"97","year":"2005","journal-title":"J. Appl. Phys."},{"key":"2023070319085505200_c27","doi-asserted-by":"publisher","first-page":"115","DOI":"10.1016\/S0169-4332(99)00233-0","volume":"150","year":"1999","journal-title":"Appl. Surf. Sci."},{"key":"2023070319085505200_c28","doi-asserted-by":"publisher","first-page":"378","DOI":"10.1016\/S0168-583X(98)00567-9","volume":"147","year":"1999","journal-title":"Nucl. Instrum. Methods Phys. Res. B"},{"key":"2023070319085505200_c29","doi-asserted-by":"publisher","first-page":"231","DOI":"10.1016\/S0169-4332(02)00925-X","volume":"200","year":"2002","journal-title":"Appl. Surf. Sci."},{"key":"2023070319085505200_c30","doi-asserted-by":"publisher","first-page":"146","DOI":"10.1016\/S0169-4332(03)00246-0","volume":"211","year":"2003","journal-title":"Appl. Surf. Sci."},{"key":"2023070319085505200_c31","doi-asserted-by":"publisher","first-page":"927","DOI":"10.1016\/0042-207X(95)00074-7","volume":"46","year":"1995","journal-title":"Vacuum"},{"key":"2023070319085505200_c32","doi-asserted-by":"crossref","first-page":"L113","DOI":"10.1143\/JJAP.32.L113","volume":"32","year":"1993","journal-title":"Jpn. J. Appl. Phys., Part 2"},{"key":"2023070319085505200_c33","doi-asserted-by":"crossref","first-page":"442","DOI":"10.1557\/JMR.1986.0442","volume":"1","year":"1986","journal-title":"J. Mater. Res."},{"key":"2023070319085505200_c34","doi-asserted-by":"publisher","first-page":"34","DOI":"10.1016\/S0040-6090(01)00834-3","volume":"389","year":"2001","journal-title":"Thin Solid Films"},{"key":"2023070319085505200_c35","doi-asserted-by":"publisher","first-page":"3599","DOI":"10.1063\/1.1503858","volume":"92","year":"2002","journal-title":"J. Appl. Phys."},{"key":"2023070319085505200_c36","first-page":"303","volume":"120\u2013121","year":"1999","journal-title":"Surf. Coat. Technol."},{"key":"2023070319085505200_c37","first-page":"863","volume":"14","year":"2003","journal-title":"J. Mater. Sci.: Mater. Med."},{"key":"2023070319085505200_c38","first-page":"338","volume":"174\u2013175","year":"2003","journal-title":"Surf. Coat. Technol."},{"key":"2023070319085505200_c39","first-page":"37","volume-title":"Refractory Hard Metals","year":"1953"},{"key":"2023070319085505200_c40","volume-title":"Nanostructured Coatings\u2014The Influence of the Addition of a Third Element on the Structure and Mechanical Properties of Transition Metal-Based Nanostructured Hard Films; Part I\u2014Nitrides","author":"De Hosson"},{"key":"2023070319085505200_c41","volume-title":"Handbook of Ceramic Hard Materials","year":"2000"},{"key":"2023070319085505200_c42","doi-asserted-by":"crossref","first-page":"167","DOI":"10.1016\/S0040-6090(00)00996-2","volume":"371","year":"2000","journal-title":"Thin Solid Films"},{"key":"2023070319085505200_c43","doi-asserted-by":"crossref","first-page":"785","DOI":"10.1016\/S0257-8972(97)00322-8","volume":"97","year":"1997","journal-title":"Surf. Coat. Technol."}],"container-title":["Journal of Applied Physics"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/pubs.aip.org\/aip\/jap\/article-pdf\/doi\/10.1063\/1.1990261\/14954044\/023715_1_online.pdf","content-type":"application\/pdf","content-version":"vor","intended-application":"syndication"},{"URL":"https:\/\/pubs.aip.org\/aip\/jap\/article-pdf\/doi\/10.1063\/1.1990261\/14954044\/023715_1_online.pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2023,7,3]],"date-time":"2023-07-03T22:55:09Z","timestamp":1688424909000},"score":1,"resource":{"primary":{"URL":"https:\/\/pubs.aip.org\/jap\/article\/98\/2\/023715\/350438\/Structural-electrical-optical-and-mechanical"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2005,7,15]]},"references-count":43,"journal-issue":{"issue":"2","published-print":{"date-parts":[[2005,7,15]]}},"URL":"https:\/\/doi.org\/10.1063\/1.1990261","relation":{},"ISSN":["0021-8979","1089-7550"],"issn-type":[{"value":"0021-8979","type":"print"},{"value":"1089-7550","type":"electronic"}],"subject":[],"published-other":{"date-parts":[[2005,7,15]]},"published":{"date-parts":[[2005,7,15]]},"article-number":"023715"}}