{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,7,30]],"date-time":"2025-07-30T10:45:21Z","timestamp":1753872321445,"version":"3.41.2"},"reference-count":20,"publisher":"AIP Publishing","issue":"9","content-domain":{"domain":["pubs.aip.org"],"crossmark-restriction":true},"short-container-title":[],"published-print":{"date-parts":[[2005,11,1]]},"abstract":"<jats:p>Brillouin spectroscopy has been used to study the effect of the deposition temperature on the surface acoustic wave (SAW) propagation velocity of aluminum nitride (AlN) films. The results show a dependence of the SAW propagation velocity on the growth temperature of AlN films. The highest value of acoustic velocity was obtained for the film elaborated without heating. Structural characterization of the AlN films synthesized at various deposition temperatures was carried out by x-ray diffraction. These analyses pointed out that the deposition temperature influences the standard deviation of (002) AlN film preferred orientation. The growth temperature clearly influences the acoustical and crystalline properties of AlN thin films.<\/jats:p>","DOI":"10.1063\/1.2121927","type":"journal-article","created":{"date-parts":[[2005,11,1]],"date-time":"2005-11-01T23:01:01Z","timestamp":1130886061000},"update-policy":"https:\/\/doi.org\/10.1063\/aip-crossmark-policy-page","source":"Crossref","is-referenced-by-count":1,"title":["Effect of deposition temperature on surface acoustic wave velocity of aluminum nitride films determined by Brillouin spectroscopy"],"prefix":"10.1063","volume":"98","author":[{"given":"M. B.","family":"Assouar","sequence":"first","affiliation":[{"name":"Universit\u00e9 Henri-Poincar\u00e9 Nancy 1 Laboratoire de Physique des Milieux Ionis\u00e9s et Applications, UMR 7040 CNRS, , Bld. Des Aiguilletes-BP 239, F-54506 Vandoeuvre-l\u00e8s-Nancy C\u00e9dex, France"}]},{"given":"R. J. Jim\u00e9nez","family":"Riob\u00f3o","sequence":"additional","affiliation":[{"name":"Instituto de Ciencia de Materiales de Madrid (CSIC) , Cantoblanco, E-28049 Madrid, Spain"}]},{"given":"M.","family":"Vila","sequence":"additional","affiliation":[{"name":"Instituto de Ciencia de Materiales de Madrid (CSIC) , Cantoblanco, E-28049 Madrid, Spain"}]},{"given":"P.","family":"Alnot","sequence":"additional","affiliation":[{"name":"Universit\u00e9 Henri-Poincar\u00e9 Nancy 1 Laboratoire de Physique des Milieux Ionis\u00e9s et Applications, UMR 7040 CNRS, , Bld. Des Aiguilletes-BP 239, F-54506 Vandoeuvre-l\u00e8s-Nancy C\u00e9dex, France"}]}],"member":"317","published-online":{"date-parts":[[2005,11,3]]},"reference":[{"key":"2023080105590582400_c1","doi-asserted-by":"publisher","first-page":"404","DOI":"10.1109\/58.384450","volume":"42","year":"1995","journal-title":"IEEE Trans. Ultrason. Ferroelectr. Freq. Control"},{"key":"2023080105590582400_c2","doi-asserted-by":"publisher","first-page":"1132","DOI":"10.1111\/j.1151-2916.1993.tb03730.x","volume":"76","year":"1993","journal-title":"J. Am. Ceram. Soc."},{"key":"2023080105590582400_c3","doi-asserted-by":"publisher","first-page":"3343","DOI":"10.1063\/1.361236","volume":"79","year":"1996","journal-title":"J. Appl. Phys."},{"key":"2023080105590582400_c4","doi-asserted-by":"publisher","first-page":"547","DOI":"10.1016\/0921-4526(95)00807-1","volume":"219","year":"1996","journal-title":"Physica B"},{"key":"2023080105590582400_c5","doi-asserted-by":"publisher","first-page":"8502","DOI":"10.1063\/1.370635","volume":"85","year":"1999","journal-title":"J. Appl. Phys."},{"key":"2023080105590582400_c6","doi-asserted-by":"publisher","first-page":"241","DOI":"10.1088\/0953-8984\/9\/1\/025","volume":"9","year":"1997","journal-title":"J. Phys.: Condens. Matter"},{"key":"2023080105590582400_c7","doi-asserted-by":"publisher","first-page":"205302","DOI":"10.1103\/PhysRevB.63.205302","volume":"63","year":"2001","journal-title":"Phys. Rev. B"},{"key":"2023080105590582400_c8","doi-asserted-by":"publisher","first-page":"6868","DOI":"10.1063\/1.1517728","volume":"92","year":"2002","journal-title":"J. Appl. Phys."},{"key":"2023080105590582400_c9","doi-asserted-by":"publisher","first-page":"7739","DOI":"10.1063\/1.365383","volume":"81","year":"1997","journal-title":"J. Appl. Phys."},{"key":"2023080105590582400_c10","first-page":"173","volume-title":"Light Scattering in Solids III","author":"Cardona","year":"1982"},{"key":"2023080105590582400_c11","doi-asserted-by":"crossref","first-page":"249","DOI":"10.1007\/978-1-4615-1873-0","volume-title":"Advances in Acoustic Microscopy","author":"Briggs","year":"1995"},{"key":"2023080105590582400_c12","doi-asserted-by":"publisher","first-page":"123","DOI":"10.1016\/0038-1098(80)90666-3","volume":"36","year":"1980","journal-title":"Solid State Commun."},{"key":"2023080105590582400_c13","doi-asserted-by":"publisher","first-page":"395","DOI":"10.1088\/0022-3727\/34\/3\/324","volume":"34","year":"2001","journal-title":"J. Phys. D"},{"key":"2023080105590582400_c14","doi-asserted-by":"publisher","first-page":"073509","DOI":"10.1063\/1.1831550","volume":"97","year":"2005","journal-title":"J. Appl. Phys."},{"key":"2023080105590582400_c15a"},{"key":"2023080105590582400_c15b","doi-asserted-by":"publisher","first-page":"13677","DOI":"10.1103\/PhysRevB.58.13677","volume":"58","year":"1998","journal-title":"Phys. Rev. B"},{"key":"2023080105590582400_c16","doi-asserted-by":"publisher","first-page":"154","DOI":"10.1016\/0040-6090(94)06450-4","volume":"259","year":"1995","journal-title":"Thin Solid Films"},{"key":"2023080105590582400_c17","doi-asserted-by":"publisher","first-page":"413","DOI":"10.1016\/S0925-9635(01)00708-7","volume":"11","year":"2002","journal-title":"Diamond Relat. Mater."},{"key":"2023080105590582400_c18","doi-asserted-by":"publisher","first-page":"408","DOI":"10.1016\/S0925-9635(01)00657-4","volume":"11","year":"2002","journal-title":"Diamond Relat. Mater."},{"key":"2023080105590582400_c19","doi-asserted-by":"publisher","first-page":"1720","DOI":"10.1063\/1.1503875","volume":"81","year":"2002","journal-title":"Appl. Phys. Lett."}],"container-title":["Journal of Applied Physics"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/pubs.aip.org\/aip\/jap\/article-pdf\/doi\/10.1063\/1.2121927\/13884391\/096102_1_online.pdf","content-type":"application\/pdf","content-version":"vor","intended-application":"syndication"},{"URL":"https:\/\/pubs.aip.org\/aip\/jap\/article-pdf\/doi\/10.1063\/1.2121927\/13884391\/096102_1_online.pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2023,8,1]],"date-time":"2023-08-01T05:59:13Z","timestamp":1690869553000},"score":1,"resource":{"primary":{"URL":"https:\/\/pubs.aip.org\/jap\/article\/98\/9\/096102\/924427\/Effect-of-deposition-temperature-on-surface"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2005,11,1]]},"references-count":20,"journal-issue":{"issue":"9","published-print":{"date-parts":[[2005,11,1]]}},"URL":"https:\/\/doi.org\/10.1063\/1.2121927","relation":{},"ISSN":["0021-8979","1089-7550"],"issn-type":[{"type":"print","value":"0021-8979"},{"type":"electronic","value":"1089-7550"}],"subject":[],"published-other":{"date-parts":[[2005,11,1]]},"published":{"date-parts":[[2005,11,1]]},"article-number":"096102"}}