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Numerical simulations are compared with experimental measurements of various plasma parameters. A good quantitative agreement is found between simulations and experiment for the coupled electrical power and the plasma potential. The model underestimates the values of the electron density, the self-bias potential, and the H(n=1) atom density with respect to measurements, but agrees with experiment when predicting that all these parameters increase with either Vrf, f, or p. The dissociation degree is about 10\u22123 for the work conditions considered. Simulations adopt a wall recombination probability for H atoms that was experimentally measured, thus accounting for surface modification with discharge operating conditions. Results show the key role played by the atomic wall recombination mechanism in plasma description.<\/jats:p>","DOI":"10.1063\/1.2779268","type":"journal-article","created":{"date-parts":[[2007,9,24]],"date-time":"2007-09-24T22:14:53Z","timestamp":1190672093000},"update-policy":"https:\/\/doi.org\/10.1063\/aip-crossmark-policy-page","source":"Crossref","is-referenced-by-count":64,"title":["Capacitively coupled radio-frequency hydrogen discharges: The role of kinetics"],"prefix":"10.1063","volume":"102","author":[{"given":"L.","family":"Marques","sequence":"first","affiliation":[{"name":"Universidade do Minho Departamento de F\u00edsica, , 4710-057 Braga, Portugal"}]},{"given":"J.","family":"Jolly","sequence":"additional","affiliation":[{"name":"Laboratoire de Physique et Technologie des Plasmas , Ecole Polytechnique, 91128 Palaiseau Cedex, France"}]},{"given":"L. 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