{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,4,1]],"date-time":"2026-04-01T13:35:26Z","timestamp":1775050526785,"version":"3.50.1"},"reference-count":75,"publisher":"AIP Publishing","issue":"10","content-domain":{"domain":["pubs.aip.org"],"crossmark-restriction":true},"short-container-title":[],"published-print":{"date-parts":[[2008,5,15]]},"abstract":"<jats:p>The spatial structure of a large-scale, slot-antenna excited (2.45GHz) surface wave plasma source operating in N2\u2013Ar mixtures is investigated. A self-consistent theoretical model is developed in the local approximation to investigate the entire spatial structure of the system, including the discharge zone sustained by the field of the TM140 surface mode and the remote plasma zone. Maxwell\u2019s equations and the rate balance equations for the most important excited species\u2014vibrationally and electronically excited states, ions, and N(S4) atoms\u2014and the electron Boltzmann are consistently solved. The pumping of the higher \u03bdth levels of N2(X\u03a3g+1,\u03bd) molecules is shown to be very effective and to strongly influence the remote plasma kinetics. Collisions of N2(X\u03a3g+1,\u03bd) molecules with N(S4) atoms are responsible for the increase in the number densities of electrons and electronically excited states N2(A\u03a3u+3,B\u03a0g3,C\u03a0u3,a\u2032\u03a3u\u22121) in the \u201cfar\u201d remote plasma zone.<\/jats:p>","DOI":"10.1063\/1.2926551","type":"journal-article","created":{"date-parts":[[2008,5,23]],"date-time":"2008-05-23T22:37:20Z","timestamp":1211582240000},"update-policy":"https:\/\/doi.org\/10.1063\/aip-crossmark-policy-page","source":"Crossref","is-referenced-by-count":31,"title":["Spatial structure of a slot-antenna excited microwave N2\u2013Ar plasma source"],"prefix":"10.1063","volume":"103","author":[{"given":"J.","family":"Henriques","sequence":"first","affiliation":[{"name":"Instituto de Plasmas e Fus\u00e3o Nuclear Instituto Superior T\u00e9cnico, , 1049-001 Lisboa Codex, Portugal"}]},{"given":"E.","family":"Tatarova","sequence":"additional","affiliation":[{"name":"Instituto de Plasmas e Fus\u00e3o Nuclear Instituto Superior T\u00e9cnico, , 1049-001 Lisboa Codex, Portugal"}]},{"given":"F. M.","family":"Dias","sequence":"additional","affiliation":[{"name":"Instituto de Plasmas e Fus\u00e3o Nuclear Instituto Superior T\u00e9cnico, , 1049-001 Lisboa Codex, Portugal"}]},{"given":"C. M.","family":"Ferreira","sequence":"additional","affiliation":[{"name":"Instituto de Plasmas e Fus\u00e3o Nuclear Instituto Superior T\u00e9cnico, , 1049-001 Lisboa Codex, Portugal"}]}],"member":"317","published-online":{"date-parts":[[2008,5,23]]},"reference":[{"key":"2023070502501448000_c1","doi-asserted-by":"publisher","first-page":"192","DOI":"10.1088\/0963-0252\/7\/2\/014","volume":"7","year":"1998","journal-title":"Plasma Sources Sci. Technol."},{"key":"2023070502501448000_c2","doi-asserted-by":"publisher","first-page":"866","DOI":"10.1109\/TPS.2005.845090","volume":"33","year":"2005","journal-title":"IEEE Trans. Plasma Sci."},{"key":"2023070502501448000_c3","doi-asserted-by":"publisher","first-page":"940","DOI":"10.1109\/27.61507","volume":"18","year":"1990","journal-title":"IEEE Trans. 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