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The hydrophobic properties of perfluorodecene-modified surfaces were studied as a function of surface coverage. Annealing experiments in ultrahigh vacuum show the covalent binding and the thermal stability of these immobilized layers up to 370\u2009\u00b0C; this temperature corresponds to the Si\u2013C bond cleavage temperature. In contrast with hydrogenated crystalline Si(111):H, no heavy wet chemistry surface preparation is required for thermal grafting of alkene molecules on a-Si:H films. A threshold grafting temperature is observed, with a strong dependence on the doping level which produces a large contrast in the molecular coverage for grafting performed at 230\u2009\u00b0C.<\/jats:p>","DOI":"10.1063\/1.3095474","type":"journal-article","created":{"date-parts":[[2009,3,23]],"date-time":"2009-03-23T22:35:01Z","timestamp":1237847701000},"update-policy":"https:\/\/doi.org\/10.1063\/aip-crossmark-policy-page","source":"Crossref","is-referenced-by-count":3,"title":["Thermal grafting of fluorinated molecular monolayers on doped amorphous silicon surfaces"],"prefix":"10.1063","volume":"105","author":[{"given":"H.","family":"Sabbah","sequence":"first","affiliation":[{"name":"Universit\u00e9 Rennes 1 1 Institut de Physique de Rennes (CNRS UMR 6251), , 35042 Rennes, France"}]},{"given":"J. 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