{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,10,11]],"date-time":"2025-10-11T17:39:59Z","timestamp":1760204399054,"version":"3.41.2"},"reference-count":33,"publisher":"AIP Publishing","issue":"11","content-domain":{"domain":["pubs.aip.org"],"crossmark-restriction":true},"short-container-title":[],"published-print":{"date-parts":[[2009,6,1]]},"abstract":"<jats:p>The local bonding structure of titanium aluminum nitride (Ti1\u2212xAlxN) films grown by dc magnetron cosputtering with different AlN molar fractions (x) has been studied by x-ray absorption near-edge structure (XANES) recorded in total electron yield mode. Grazing incidence x-ray diffraction (GIXRD) shows the formation of a ternary solid solution with cubic structure (c-Ti1\u2212xAlxN) that shrinks with the incorporation of Al and that, above a solubility limit of x\u223c0.7, segregation of w-AlN and c-Ti1\u2212xAlxN phases occurs. The Al incorporation in the cubic structure and lattice shrinkage can also be observed using XANES spectral features. However, contrary to GIXRD, direct evidence of w-AlN formation is not observed, suggesting a dominance and surface enrichment of cubic environments. For x&amp;gt;0.7, XANES shows the formation of Ti\u2013Al bonds, which could be related to the segregation of w-AlN. This study shows the relevance of local-order information to assess the atomic structure of Ti1\u2212xAlxN solutions.<\/jats:p>","DOI":"10.1063\/1.3139296","type":"journal-article","created":{"date-parts":[[2009,6,10]],"date-time":"2009-06-10T16:30:44Z","timestamp":1244651444000},"update-policy":"https:\/\/doi.org\/10.1063\/aip-crossmark-policy-page","source":"Crossref","is-referenced-by-count":23,"title":["Aluminum incorporation in Ti1\u2212xAlxN films studied by x-ray absorption near-edge structure"],"prefix":"10.1063","volume":"105","author":[{"given":"R.","family":"Gago","sequence":"first","affiliation":[{"name":"Consejo Superior de Investigaciones Cient\u00edficas 1 Instituto de Ciencia de Materiales de Madrid, , E-28049 Madrid, Spain"},{"name":"Universidad Aut\u00f3noma de Madrid 2 Centro de Micro-An\u00e1lisis de Materiales, , E-28049 Madrid, Spain"}]},{"given":"A.","family":"Redondo-Cubero","sequence":"additional","affiliation":[{"name":"Universidad Aut\u00f3noma de Madrid 2 Centro de Micro-An\u00e1lisis de Materiales, , E-28049 Madrid, Spain"}]},{"given":"J. L.","family":"Endrino","sequence":"additional","affiliation":[{"name":"Consejo Superior de Investigaciones Cient\u00edficas 1 Instituto de Ciencia de Materiales de Madrid, , E-28049 Madrid, Spain"}]},{"given":"I.","family":"Jim\u00e9nez","sequence":"additional","affiliation":[{"name":"Consejo Superior de Investigaciones Cient\u00edficas 1 Instituto de Ciencia de Materiales de Madrid, , E-28049 Madrid, Spain"}]},{"given":"N.","family":"Shevchenko","sequence":"additional","affiliation":[{"name":"Forschungszentrum Dresden-Rossendorf 3 Institute of Ion Beam Physics and Materials Research, , PF-510119, D-01314 Dresden, Germany"}]}],"member":"317","published-online":{"date-parts":[[2009,6,9]]},"reference":[{"key":"2023062400133429700_c1","doi-asserted-by":"publisher","first-page":"1","DOI":"10.1016\/S0042-207X(00)00143-3","volume":"57","year":"2000","journal-title":"Vacuum"},{"key":"2023062400133429700_c2","first-page":"2749","volume":"4","year":"1986","journal-title":"J. Vac. Sci. Technol. 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