{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,3,8]],"date-time":"2026-03-08T20:07:26Z","timestamp":1773000446376,"version":"3.50.1"},"reference-count":7,"publisher":"AIP Publishing","issue":"7","content-domain":{"domain":["pubs.aip.org"],"crossmark-restriction":true},"short-container-title":[],"published-print":{"date-parts":[[2011,4,1]]},"abstract":"<jats:p>Three dimensional (3D) magnetic flux concentrators (FC) based on 7000-\u00c5-thick Co86Zr5Nb9 films were optimized for increased sensitivity in hybrid flux guide-magnetoresistive sensor structures. The vertical profile of the flux guide patterned by lift-off was replaced by a 3D structure where the sensor is recessed from the FC with a controlled edged slope defined by ion milling at controlled angles (20\u00b0, 45\u00b0, 60\u00b0, 75\u00b0, and 85\u00b0). In this work, spin valve linear sensors (3\u2009\u00d7\u200914 \u03bcm2) with initial sensitivity of 0.084%\/Oe were integrated with the flux guides patterned with these 3D tapered profiles. Optimized flux guides with 45\u00b0 slope could increase the sensitivity up to 7.4%\/Oe, corresponding to a concentrator flux gain of \u223c100.<\/jats:p>","DOI":"10.1063\/1.3556946","type":"journal-article","created":{"date-parts":[[2011,4,6]],"date-time":"2011-04-06T19:14:35Z","timestamp":1302117275000},"update-policy":"https:\/\/doi.org\/10.1063\/aip-crossmark-policy-page","source":"Crossref","is-referenced-by-count":40,"title":["Three dimensional magnetic flux concentrators with improved efficiency for magnetoresistive sensors"],"prefix":"10.1063","volume":"109","author":[{"given":"Z.","family":"Marinho","sequence":"first","affiliation":[{"name":"Instituto Nacional de Engenharia de Sistemas e Computadores Microssistemas e Nanotecnologias (INESC-MN) and IN\u2014Institute of Nanoscience and Nanotechnology 1 , 1000-029 Lisbon, Portugal and International Iberian Nanotechnology Laboratory, Braga, Portugal"},{"name":"Instituto Superior T\u00e9cnico (IST), Technical University of Lisbon 2 Physics Department, , 1049-001 Lisbon, Portugal"}]},{"given":"S.","family":"Cardoso","sequence":"additional","affiliation":[{"name":"Instituto Nacional de Engenharia de Sistemas e Computadores Microssistemas e Nanotecnologias (INESC-MN) and IN\u2014Institute of Nanoscience and Nanotechnology 1 , 1000-029 Lisbon, Portugal and International Iberian Nanotechnology Laboratory, Braga, Portugal"},{"name":"Instituto Superior T\u00e9cnico (IST), Technical University of Lisbon 2 Physics Department, , 1049-001 Lisbon, Portugal"}]},{"given":"R.","family":"Chaves","sequence":"additional","affiliation":[{"name":"Instituto Nacional de Engenharia de Sistemas e Computadores Microssistemas e Nanotecnologias (INESC-MN) and IN\u2014Institute of Nanoscience and Nanotechnology 1 , 1000-029 Lisbon, Portugal and International Iberian Nanotechnology Laboratory, Braga, Portugal"},{"name":"Instituto Superior T\u00e9cnico (IST), Technical University of Lisbon 2 Physics Department, , 1049-001 Lisbon, Portugal"}]},{"given":"R.","family":"Ferreira","sequence":"additional","affiliation":[{"name":"Instituto Nacional de Engenharia de Sistemas e Computadores Microssistemas e Nanotecnologias (INESC-MN) and IN\u2014Institute of Nanoscience and Nanotechnology 1 , 1000-029 Lisbon, Portugal and International Iberian Nanotechnology Laboratory, Braga, Portugal"}]},{"given":"L. V.","family":"Melo","sequence":"additional","affiliation":[{"name":"Instituto Superior T\u00e9cnico (IST), Technical University of Lisbon 2 Physics Department, , 1049-001 Lisbon, Portugal"}]},{"given":"P. P.","family":"Freitas","sequence":"additional","affiliation":[{"name":"Instituto Nacional de Engenharia de Sistemas e Computadores Microssistemas e Nanotecnologias (INESC-MN) and IN\u2014Institute of Nanoscience and Nanotechnology 1 , 1000-029 Lisbon, Portugal and International Iberian Nanotechnology Laboratory, Braga, Portugal"},{"name":"Instituto Superior T\u00e9cnico (IST), Technical University of Lisbon 2 Physics Department, , 1049-001 Lisbon, Portugal"}]}],"member":"317","published-online":{"date-parts":[[2011,4,5]]},"reference":[{"key":"2023080809203191000_c1","doi-asserted-by":"publisher","first-page":"6","DOI":"10.1109\/TMAG.2007.893119","volume":"43","year":"2007","journal-title":"IEEE Trans. Magn."},{"key":"2023080809203191000_c2","doi-asserted-by":"publisher","first-page":"11","DOI":"10.1109\/TMAG.2008.2003539","volume":"44","year":"2008","journal-title":"IEEE Trans. Magn."},{"key":"2023080809203191000_c3","doi-asserted-by":"publisher","first-page":"4361","DOI":"10.1109\/20.799086","volume":"35","year":"1999","journal-title":"IEEE Trans. Magn."},{"key":"2023080809203191000_c4","doi-asserted-by":"publisher","first-page":"203","DOI":"10.1016\/j.sna.2005.11.043","volume":"129","year":"2006","journal-title":"Sens. Actuators A"},{"key":"2023080809203191000_c5","doi-asserted-by":"publisher","first-page":"10","DOI":"10.1016\/S0924-4247(01)00866-4","volume":"97\u201398","year":"2002","journal-title":"Sens. Actuators A"},{"key":"2023080809203191000_c6","doi-asserted-by":"publisher","first-page":"291","DOI":"10.1063\/1.119524","volume":"71","year":"1997","journal-title":"Appl. Phys. Lett."},{"key":"2023080809203191000_c7","doi-asserted-by":"publisher","first-page":"07E924","DOI":"10.1063\/1.2837661","volume":"103","year":"2008","journal-title":"J. Appl. Phys."}],"container-title":["Journal of Applied Physics"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/pubs.aip.org\/aip\/jap\/article-pdf\/doi\/10.1063\/1.3556946\/15069486\/07e521_1_online.pdf","content-type":"application\/pdf","content-version":"vor","intended-application":"syndication"},{"URL":"https:\/\/pubs.aip.org\/aip\/jap\/article-pdf\/doi\/10.1063\/1.3556946\/15069486\/07e521_1_online.pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2023,8,8]],"date-time":"2023-08-08T09:21:13Z","timestamp":1691486473000},"score":1,"resource":{"primary":{"URL":"https:\/\/pubs.aip.org\/jap\/article\/109\/7\/07E521\/1066422\/Three-dimensional-magnetic-flux-concentrators-with"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2011,4,1]]},"references-count":7,"journal-issue":{"issue":"7","published-print":{"date-parts":[[2011,4,1]]}},"URL":"https:\/\/doi.org\/10.1063\/1.3556946","relation":{},"ISSN":["0021-8979","1089-7550"],"issn-type":[{"value":"0021-8979","type":"print"},{"value":"1089-7550","type":"electronic"}],"subject":[],"published-other":{"date-parts":[[2011,4,1]]},"published":{"date-parts":[[2011,4,1]]},"article-number":"07E521"}}