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The NO(X) relative density in the afterglow plasma jet ranges from 1.2% to 1.6% depending on power and water percentage, according to the model predictions and the measurements. Other types of species such as NO2 and nitrous acid HNO2 have also been detected by mass and Fourier Transform Infrared spectroscopy. The relative population density of O(3P) ground state atoms increases from 8% to 10% in the discharge zone when the input microwave power increases from 200 to 400\u2009W and the water percentage from 1% to 10%. Furthermore, high densities of O2(a1\u0394g) singlet delta oxygen molecules and OH radicals (1% and 5%, respectively) can be achieved in the discharge zone. In the late afterglow the O2(a1\u0394g) density is about 0.1% of the total density. This plasma source has a flexible operation and potential for channeling the energy in ways that maximize the density of active species of interest.<\/jats:p>","DOI":"10.1063\/1.4762015","type":"journal-article","created":{"date-parts":[[2012,11,2]],"date-time":"2012-11-02T12:41:33Z","timestamp":1351860093000},"update-policy":"https:\/\/doi.org\/10.1063\/aip-crossmark-policy-page","source":"Crossref","is-referenced-by-count":29,"title":["Microwave plasma source operating with atmospheric pressure air-water mixtures"],"prefix":"10.1063","volume":"112","author":[{"given":"E.","family":"Tatarova","sequence":"first","affiliation":[{"name":"Institute of Plasmas and Nuclear Fusion, Instituto Superior T\u00e9cnico, Technical University of Lisbon 1 , 1049-001 Lisbon, Portugal"}]},{"given":"J. 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