{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,3,2]],"date-time":"2026-03-02T23:53:16Z","timestamp":1772495596284,"version":"3.50.1"},"reference-count":54,"publisher":"AIP Publishing","issue":"13","content-domain":{"domain":["pubs.aip.org"],"crossmark-restriction":true},"short-container-title":[],"published-print":{"date-parts":[[2013,4,7]]},"abstract":"<jats:p>Microelectromechanical systems with all-polymer structural layers are expected to allow novel MEMS applications due to their mechanical, optical, electronic, and chemical properties, which are tunable and distinct from the standard inorganic layers currently used. The mechanical properties of micro-electromechanical bridge resonators (pMEMS) based on a polymer\/carbon-nanotubes (CNT) composite structural material are presented. The structural material of the electrostatically actuated pMEMS microresonators are multilayers of a conductive polymer based on poly(3,4-ethylenedioxythiophene):poly(styrenesulfonate) (PEDOT:PSS) to which carboxylated multi-wall CNTs monolayers are electrostatically attached after surface functionalization. The effects of measurement pressure, temperature, and applied load on the resonance frequency and on the quality factor, Q, of the pMEMS are studied. The long term reliability of the pMEMS resonators is also investigated, and the resonators were subjected to above 1011 actuation cycles without significant performance deterioration. The mechanical properties of the pMEMS are systematically compared to those of a doped hydrogenated amorphous silicon (n+-a-Si:H) MEMS. While the CNT multilayers increase the rigidity (and hence the resonance frequency) as well as the electrical conductivity of the structural layer, they decrease the energy dissipation (and hence increase Q). Changes in CNT-polymer matrix adhesion result in reversible changes of the resonator properties during operation, requiring monitoring and control.<\/jats:p>","DOI":"10.1063\/1.4798577","type":"journal-article","created":{"date-parts":[[2013,4,5]],"date-time":"2013-04-05T23:08:02Z","timestamp":1365203282000},"update-policy":"https:\/\/doi.org\/10.1063\/aip-crossmark-policy-page","source":"Crossref","is-referenced-by-count":3,"title":["Mechanical properties of polymer\/carbon nanotube composite micro-electromechanical systems bridges"],"prefix":"10.1063","volume":"113","author":[{"given":"P. M.","family":"Sousa","sequence":"first","affiliation":[{"name":"INESC Microsistemas e Nanotecnologias (INESC MN) and IN-Institute of Nanoscience and Nanotechnology 1 , Rua Alves Redol, 9, 1000-029 Lisboa, Portugal"}]},{"given":"V.","family":"Chu","sequence":"additional","affiliation":[{"name":"INESC Microsistemas e Nanotecnologias (INESC MN) and IN-Institute of Nanoscience and Nanotechnology 1 , Rua Alves Redol, 9, 1000-029 Lisboa, Portugal"}]},{"given":"J. P.","family":"Conde","sequence":"additional","affiliation":[{"name":"INESC Microsistemas e Nanotecnologias (INESC MN) and IN-Institute of Nanoscience and Nanotechnology 1 , Rua Alves Redol, 9, 1000-029 Lisboa, Portugal"},{"name":"Department of Bioengineering, Instituto Superior T\u00e9cnico 2 , 1000-049 Lisbon, Portugal"}]}],"member":"317","published-online":{"date-parts":[[2013,4,4]]},"reference":[{"key":"2023070422515542200_c1","doi-asserted-by":"publisher","first-page":"622","DOI":"10.1063\/1.1644319","volume":"84","year":"2004","journal-title":"Appl. Phys. Lett."},{"issue":"1","key":"2023070422515542200_c2","doi-asserted-by":"publisher","first-page":"201","DOI":"10.1016\/j.sna.2007.12.022","volume":"144","year":"2008","journal-title":"Sens. Actuators A: Phys."},{"key":"2023070422515542200_c3","doi-asserted-by":"publisher","first-page":"3783","DOI":"10.1002\/adma.200701709","volume":"19","year":"2007","journal-title":"Adv. Mater."},{"key":"2023070422515542200_c4","doi-asserted-by":"publisher","first-page":"363","DOI":"10.1007\/s10910-008-9467-3","volume":"46","year":"2009","journal-title":"J. Math. Chem."},{"key":"2023070422515542200_c5","doi-asserted-by":"publisher","first-page":"729","DOI":"10.1109\/JMEMS.2006.879373","volume":"15","year":"2006","journal-title":"J. Microelectromech. Syst."},{"key":"2023070422515542200_c6","doi-asserted-by":"crossref","DOI":"10.1007\/978-3-540-88546-7","volume-title":"Technology Guide: Principles, Applications, Trends","author":"Bullinger","year":"2009"},{"key":"2023070422515542200_c7","doi-asserted-by":"publisher","first-page":"106","DOI":"10.1038\/nmat1061","volume":"3","year":"2004","journal-title":"Nature Mater."},{"key":"2023070422515542200_c8","doi-asserted-by":"publisher","first-page":"233506","DOI":"10.1063\/1.2209887","volume":"88","year":"2006","journal-title":"Appl. Phys. Lett."},{"key":"2023070422515542200_c9","doi-asserted-by":"publisher","first-page":"17","DOI":"10.1109\/MSPEC.2004.1353796","volume":"41","year":"2004","journal-title":"IEEE Spectrum"},{"key":"2023070422515542200_c10","doi-asserted-by":"publisher","first-page":"1754","DOI":"10.1126\/science.1132394","volume":"314","year":"2006","journal-title":"Science"},{"key":"2023070422515542200_c11","doi-asserted-by":"publisher","first-page":"1881","DOI":"10.1126\/science.1081279","volume":"299","year":"2003","journal-title":"Science"},{"key":"2023070422515542200_c12","first-page":"332","volume-title":"2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, Cancun, M\u00e9xico, 23-27 January 2011"},{"key":"2023070422515542200_c13","doi-asserted-by":"publisher","first-page":"79","DOI":"10.1109\/LPT.2008.2008659","volume":"21","year":"2009","journal-title":"IEEE Photon. Technol. Lett."},{"key":"2023070422515542200_c14","doi-asserted-by":"publisher","first-page":"054030","DOI":"10.1088\/0960-1317\/21\/5\/054030","volume":"21","year":"2011","journal-title":"J. Micromech. Microeng."},{"key":"2023070422515542200_c15","doi-asserted-by":"publisher","first-page":"111","DOI":"10.1109\/JMEMS.2006.885845","volume":"16","year":"2007","journal-title":"J. Microelectromech. Syst."},{"key":"2023070422515542200_c16","doi-asserted-by":"publisher","first-page":"053302","DOI":"10.1063\/1.2840378","volume":"92","year":"2008","journal-title":"Appl. Phys. Lett."},{"key":"2023070422515542200_c17","doi-asserted-by":"publisher","first-page":"815","DOI":"10.1007\/s10544-007-9094-y","volume":"9","year":"2007","journal-title":"Biomed. Microdevices"},{"key":"2023070422515542200_c18","doi-asserted-by":"publisher","first-page":"065032","DOI":"10.1088\/0960-1317\/21\/6\/065032","volume":"21","year":"2011","journal-title":"J. Micromech. Microeng."},{"key":"2023070422515542200_c19","doi-asserted-by":"publisher","first-page":"2259","DOI":"10.1016\/j.synthmet.2011.08.031","volume":"161","year":"2011","journal-title":"Synth. Met."},{"key":"2023070422515542200_c20","doi-asserted-by":"publisher","first-page":"104104","DOI":"10.1063\/1.2040009","volume":"87","year":"2005","journal-title":"Appl. Phys. Lett."},{"key":"2023070422515542200_c21","doi-asserted-by":"publisher","first-page":"064507","DOI":"10.1063\/1.2710436","volume":"101","year":"2007","journal-title":"J. Appl. Phys."},{"key":"2023070422515542200_c22","doi-asserted-by":"publisher","first-page":"797","DOI":"10.1088\/0960-1317\/17\/4\/017","volume":"17","year":"2007","journal-title":"J. Micromech. Microeng."},{"key":"2023070422515542200_c23","doi-asserted-by":"publisher","first-page":"044104","DOI":"10.1063\/1.3621861","volume":"99","year":"2011","journal-title":"Appl. Phys. Lett."},{"key":"2023070422515542200_c24","doi-asserted-by":"publisher","first-page":"637","DOI":"10.1126\/science.287.5453.637","volume":"287","year":"2000","journal-title":"Science"},{"key":"2023070422515542200_c25","doi-asserted-by":"publisher","first-page":"2833","DOI":"10.1063\/1.1511532","volume":"81","year":"2002","journal-title":"Appl. Phys. Lett."},{"key":"2023070422515542200_c26","first-page":"175","volume":"2","year":"2006","journal-title":"Electron. Mater. Lett."},{"key":"2023070422515542200_c27","doi-asserted-by":"publisher","first-page":"3812","DOI":"10.1063\/1.371292","volume":"86","year":"1999","journal-title":"J. Appl. Phys."},{"key":"2023070422515542200_c28","doi-asserted-by":"publisher","first-page":"094501","DOI":"10.1063\/1.1877820","volume":"97","year":"2005","journal-title":"J. Appl. Phys."},{"key":"2023070422515542200_c29"},{"key":"2023070422515542200_c30","doi-asserted-by":"publisher","first-page":"973","DOI":"10.3938\/jkps.46.973","volume":"46","year":"2005","journal-title":"J. Korean Phys. Soc."},{"key":"2023070422515542200_c31","doi-asserted-by":"crossref","first-page":"268","DOI":"10.1002\/3527604111","volume-title":"The Nano-Micro Interface","author":"Fecht","year":"2004"},{"key":"2023070422515542200_c32","doi-asserted-by":"publisher","first-page":"10018","DOI":"10.1063\/1.1573344","volume":"93","year":"2003","journal-title":"J. Appl. Phys."},{"key":"2023070422515542200_c33","doi-asserted-by":"publisher","first-page":"023502","DOI":"10.1063\/1.3174912","volume":"95","year":"2009","journal-title":"Appl. Phys. Lett."},{"key":"2023070422515542200_c34","doi-asserted-by":"publisher","first-page":"025018","DOI":"10.1088\/0960-1317\/19\/2\/025018","volume":"19","year":"2009","journal-title":"J. Micromech. Microeng."},{"key":"2023070422515542200_c35","first-page":"Y29","volume-title":"APS March Meeting, New Orleans, USA, 10\u201314 March, 2008","year":"2008"},{"key":"2023070422515542200_c36","doi-asserted-by":"publisher","first-page":"11378","DOI":"10.1021\/jp902845x","volume":"113","year":"2009","journal-title":"J. Phys. Chem. B"},{"key":"2023070422515542200_c37","first-page":"v","volume-title":"Polymer Handbook, Fourth Edition","year":"1999"},{"key":"2023070422515542200_c38","doi-asserted-by":"publisher","first-page":"7757","DOI":"10.1016\/j.polymer.2003.10.011","volume":"44","year":"2003","journal-title":"Polymer"},{"key":"2023070422515542200_c39","first-page":"1110","volume-title":"Technical Digest of IEEE 11th International Conference Solid-State Sensors Actuators (Transducers'01), Munich"},{"key":"2023070422515542200_c40","doi-asserted-by":"publisher","first-page":"3137","DOI":"10.1007\/BF01139031","volume":"24","year":"1989","journal-title":"J. Mater. Sci."},{"key":"2023070422515542200_c41","doi-asserted-by":"publisher","first-page":"473","DOI":"10.1016\/j.synthmet.2008.11.005","volume":"159","year":"2009","journal-title":"Synth. Met."},{"key":"2023070422515542200_c42","first-page":"p","volume-title":"Materials Selection in Mechanical Design","year":"2005","edition":"3rd ed."},{"key":"2023070422515542200_c43","doi-asserted-by":"publisher","first-page":"447","DOI":"10.1021\/am201518v","volume":"4","year":"2012","journal-title":"ACS Appl. Mater. Interfaces"},{"key":"2023070422515542200_c44","volume-title":"Polymer Viscoelasticity: Stress and Strain in Practice","year":"2000"},{"key":"2023070422515542200_c45","doi-asserted-by":"publisher","first-page":"51","DOI":"10.1016\/0924-4247(92)87007-4","volume":"35","year":"1992","journal-title":"Sens. Actuators A: Phys."},{"key":"2023070422515542200_c46","doi-asserted-by":"publisher","first-page":"229","DOI":"10.1109\/JMEMS.2009.2039697","volume":"19","year":"2010","journal-title":"J. Micromech. Syst."},{"key":"2023070422515542200_c47","doi-asserted-by":"publisher","first-page":"314","DOI":"10.1016\/S0022-3093(02)00930-4","volume":"299\u2013302","year":"2002","journal-title":"J. Non-Crystall. Solids"},{"key":"2023070422515542200_c48","doi-asserted-by":"publisher","first-page":"1847","DOI":"10.1002\/polb.1995.090331214","volume":"33","year":"1995","journal-title":"J. Polym. Sci. B: Polym. Phys."},{"key":"2023070422515542200_c49","doi-asserted-by":"publisher","first-page":"175","DOI":"10.1016\/0042-207X(66)91162-6","volume":"16","year":"1966","journal-title":"Vacuum"},{"key":"2023070422515542200_c50","doi-asserted-by":"publisher","first-page":"715","DOI":"10.1007\/s10404-007-0175-2","volume":"3","year":"2007","journal-title":"Microfluid. Nanofluid."},{"key":"2023070422515542200_c51","doi-asserted-by":"publisher","first-page":"341","DOI":"10.1088\/0960-1317\/12\/3\/322","volume":"12","year":"2002","journal-title":"J. Micromech. Microeng."},{"key":"2023070422515542200_c52","volume-title":"Analysis and Design Principles of MEMS Devices","year":"2005"},{"key":"2023070422515542200_c53","doi-asserted-by":"publisher","first-page":"095002","DOI":"10.1088\/0960-1317\/21\/9\/095002","volume":"21","year":"2011","journal-title":"J. Micromech. Microeng."},{"key":"2023070422515542200_c54","doi-asserted-by":"publisher","first-page":"065030","DOI":"10.1088\/0960-1317\/22\/6\/065030","volume":"22","year":"2012","journal-title":"J. Micromech. Microeng."}],"container-title":["Journal of Applied Physics"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/pubs.aip.org\/aip\/jap\/article-pdf\/doi\/10.1063\/1.4798577\/15592265\/134508_1_online.pdf","content-type":"application\/pdf","content-version":"vor","intended-application":"syndication"},{"URL":"https:\/\/pubs.aip.org\/aip\/jap\/article-pdf\/doi\/10.1063\/1.4798577\/15592265\/134508_1_online.pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2023,7,5]],"date-time":"2023-07-05T09:55:46Z","timestamp":1688550946000},"score":1,"resource":{"primary":{"URL":"https:\/\/pubs.aip.org\/jap\/article\/113\/13\/134508\/379505\/Mechanical-properties-of-polymer-carbon-nanotube"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2013,4,4]]},"references-count":54,"journal-issue":{"issue":"13","published-print":{"date-parts":[[2013,4,7]]}},"URL":"https:\/\/doi.org\/10.1063\/1.4798577","relation":{},"ISSN":["0021-8979","1089-7550"],"issn-type":[{"value":"0021-8979","type":"print"},{"value":"1089-7550","type":"electronic"}],"subject":[],"published-other":{"date-parts":[[2013,4,7]]},"published":{"date-parts":[[2013,4,4]]},"article-number":"134508"}}