{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,4,30]],"date-time":"2026-04-30T07:58:21Z","timestamp":1777535901462,"version":"3.51.4"},"reference-count":46,"publisher":"AIP Publishing","issue":"23","content-domain":{"domain":["pubs.aip.org"],"crossmark-restriction":true},"short-container-title":[],"published-print":{"date-parts":[[2013,6,21]]},"abstract":"<jats:p>Micro electrical discharge machining (\u03bcEDM) is an atmospheric-pressure plasma-assisted technology that uses point-to-plane discharges in liquid dielectrics to remove microscopic quantities of electrically conductive materials. In this work, an innovative \u03bcEDM prototype machine was specifically designed and fabricated to produce and control single spark discharges, thus, resolving the typical limitations of (multi-discharge) commercial machines. The work analyses the type of discharge and the micro-plasma electron-density values obtained for 0.5\u201338\u2009\u03bcm gap sizes, 3\u201310\u2009000\u2009\u03bcs pulse durations, 75\u2013250\u2009V low breakdown voltages, and 1\u201320\u2009A discharge currents, using different combinations of metallic electrodes in oil and in water. Results allow fitting, for micro-scale and low voltages, an empirical law between the maximum gap-size for breakdown, the breakdown voltage, and the effective stress-time. The electron density ne is obtained by optical emission spectroscopy diagnostics of the H\u03b1-line Stark broadening (yielding ne\u223c1016\u22121017\u2009cm\u22123, i.e., ionization degrees of \u223c2\u00d710\u22125\u221210\u22124) and by a semi-empirical resistive plasma model. The model uses the experimental values of several electrical and geometrical quantities, and of the gas pressure estimated as \u223c60\u2009bar\u22122\u2009kbar from measurements of the plasma mechanical action, obtained using a force sensor. The quantitative information of this phenomenological study can assist the optimization of this micro-fabrication technique.<\/jats:p>","DOI":"10.1063\/1.4811296","type":"journal-article","created":{"date-parts":[[2013,6,17]],"date-time":"2013-06-17T22:11:27Z","timestamp":1371507087000},"update-policy":"https:\/\/doi.org\/10.1063\/aip-crossmark-policy-page","source":"Crossref","is-referenced-by-count":11,"title":["Experimental study of micro electrical discharge machining discharges"],"prefix":"10.1063","volume":"113","author":[{"given":"I. M. F.","family":"Bragan\u00e7a","sequence":"first","affiliation":[{"name":"IDMEC, Instituto Superior T\u00e9cnico, Universidade T\u00e9cnica de Lisboa 1 , Av. Rovisco Pais, 1049-001 Lisboa, Portugal"}]},{"given":"P. A. R.","family":"Rosa","sequence":"additional","affiliation":[{"name":"IDMEC, Instituto Superior T\u00e9cnico, Universidade T\u00e9cnica de Lisboa 1 , Av. Rovisco Pais, 1049-001 Lisboa, Portugal"}]},{"given":"F. M.","family":"Dias","sequence":"additional","affiliation":[{"name":"Instituto de Plasmas e Fus\u00e3o Nuclear, Instituto Superior T\u00e9cnico, Universidade T\u00e9cnica de Lisboa 2 , Av. Rovisco Pais, 1049-001 Lisboa, Portugal"}]},{"given":"P. A. F.","family":"Martins","sequence":"additional","affiliation":[{"name":"IDMEC, Instituto Superior T\u00e9cnico, Universidade T\u00e9cnica de Lisboa 1 , Av. Rovisco Pais, 1049-001 Lisboa, Portugal"}]},{"given":"L. L.","family":"Alves","sequence":"additional","affiliation":[{"name":"Instituto de Plasmas e Fus\u00e3o Nuclear, Instituto Superior T\u00e9cnico, Universidade T\u00e9cnica de Lisboa 2 , Av. 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