{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,12,4]],"date-time":"2025-12-04T14:34:35Z","timestamp":1764858875123,"version":"3.41.2"},"reference-count":40,"publisher":"AIP Publishing","issue":"15","funder":[{"name":"Institute of Nanoscience and Nanotechnology","award":["EXCL\/CTM-NAN\/0441\/2012."],"award-info":[{"award-number":["EXCL\/CTM-NAN\/0441\/2012."]}]}],"content-domain":{"domain":["pubs.aip.org"],"crossmark-restriction":true},"short-container-title":[],"published-print":{"date-parts":[[2016,4,21]]},"abstract":"<jats:p>Hydrogenated amorphous silicon thin-film flexural resonators with sub-micron actuation gaps are fabricated by surface micromachining on glass substrates. Experimentally, the resonators are electrostatically actuated and their motion is optically detected. Three different configurations for the electrostatic excitation force are used to study the dynamics of the resonators. In the first case, a dc voltage (Vdc) is added to an ac voltage with variable excitation frequency (Vac(\u03c9)) and harmonic, superharmonic, and subharmonic resonances of different orders are observed. The second case consists on mixing the dc voltage (Vdc) with an ac voltage applied at a fixed frequency of twice the natural frequency of the resonator (V(2\u03c90)). High-amplitude parametric resonance is excited at the natural frequency of the system, \u03c90. This configuration allows a separation between the frequencies of the excitation and the mechanical motion. Finally, in the third case, the dc voltage (Vdc) is combined with both ac voltages, Vac(\u03c9) and V(2\u03c90), and parametric resonance is excited and emerges from the fundamental harmonic resonance peak. The single-degree-of-freedom equation of motion is modeled and discussed for each case. The nonlinearity inherent to the electrostatic force is responsible for modulating the spring constant of the system at different frequencies, giving rise to parametric resonance. These equations of motion are simulated in the time and frequency domains, providing a consistent explanation of the experimentally observed phenomena. A wide variety of possible resonance modes with different characteristics can be used advantageously in MEMS device design.<\/jats:p>","DOI":"10.1063\/1.4946040","type":"journal-article","created":{"date-parts":[[2016,4,18]],"date-time":"2016-04-18T15:11:12Z","timestamp":1460992272000},"update-policy":"https:\/\/doi.org\/10.1063\/aip-crossmark-policy-page","source":"Crossref","is-referenced-by-count":8,"title":["Dynamics of hydrogenated amorphous silicon flexural resonators for enhanced performance"],"prefix":"10.1063","volume":"119","author":[{"given":"J.","family":"Mouro","sequence":"first","affiliation":[{"name":"Instituto de Engenharia de Sistemas E Computadores-Microsistemas e Nanotecnologias (INESC MN) and IN-Institute of Nanoscience and Nanotechnology 1 , Rua Alves Redol, 9, 1000-029 Lisbon, Portugal"}]},{"given":"V.","family":"Chu","sequence":"additional","affiliation":[{"name":"Instituto de Engenharia de Sistemas E Computadores-Microsistemas e Nanotecnologias (INESC MN) and IN-Institute of Nanoscience and Nanotechnology 1 , Rua Alves Redol, 9, 1000-029 Lisbon, Portugal"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-5306-4409","authenticated-orcid":false,"given":"J. P.","family":"Conde","sequence":"additional","affiliation":[{"name":"Instituto de Engenharia de Sistemas E Computadores-Microsistemas e Nanotecnologias (INESC MN) and IN-Institute of Nanoscience and Nanotechnology 1 , Rua Alves Redol, 9, 1000-029 Lisbon, Portugal"},{"name":"University of Lisbon 2 Department of Bioengineering, Instituto Superior T\u00e9cnico, , Lisbon 1049-001, Portugal"}]}],"member":"317","published-online":{"date-parts":[[2016,4,15]]},"reference":[{"volume-title":"Hydrogenated Amorphous Silicon","year":"1991","key":"2023062402392312900_c1"},{"issue":"7","key":"2023062402392312900_c2","doi-asserted-by":"publisher","first-page":"38","DOI":"10.1002\/ecjb.4420770705","volume":"77","year":"1994","journal-title":"Electron. Commun. Jpn."},{"key":"2023062402392312900_c3","doi-asserted-by":"publisher","first-page":"275","DOI":"10.1557\/PROC-33-275","volume":"33","year":"1984","journal-title":"MRS Online Proc. 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