{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,3,25]],"date-time":"2026-03-25T02:45:03Z","timestamp":1774406703565,"version":"3.50.1"},"reference-count":59,"publisher":"AIP Publishing","issue":"4","funder":[{"DOI":"10.13039\/501100004837","name":"Ministerio de Ciencia e Innovaci\u00f3n","doi-asserted-by":"publisher","award":["PID2019-107727RB-I00"],"award-info":[{"award-number":["PID2019-107727RB-I00"]}],"id":[{"id":"10.13039\/501100004837","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100004837","name":"Ministerio de Ciencia e Innovaci\u00f3n","doi-asserted-by":"publisher","award":["TED2021-130453B-C21"],"award-info":[{"award-number":["TED2021-130453B-C21"]}],"id":[{"id":"10.13039\/501100004837","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100000780","name":"European Commission","doi-asserted-by":"publisher","award":["TED2021-130453B-C21"],"award-info":[{"award-number":["TED2021-130453B-C21"]}],"id":[{"id":"10.13039\/501100000780","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100002809","name":"Generalitat de Catalunya","doi-asserted-by":"publisher","award":["2021 SGR 00804"],"award-info":[{"award-number":["2021 SGR 00804"]}],"id":[{"id":"10.13039\/501100002809","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100001871","name":"Funda\u00e7\u00e3o para a Ci\u00eancia e a Tecnologia","doi-asserted-by":"publisher","award":["UIDB\/04650\/2020"],"award-info":[{"award-number":["UIDB\/04650\/2020"]}],"id":[{"id":"10.13039\/501100001871","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100001871","name":"Funda\u00e7\u00e3o para a Ci\u00eancia e a Tecnologia","doi-asserted-by":"publisher","award":["2022.01740.PDTC (DOI:10.54499\/2022.01740.PTDC)"],"award-info":[{"award-number":["2022.01740.PDTC (DOI:10.54499\/2022.01740.PTDC)"]}],"id":[{"id":"10.13039\/501100001871","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100001871","name":"Funda\u00e7\u00e3o para a Ci\u00eancia e a Tecnologia","doi-asserted-by":"publisher","award":["CEECINST\/00018\/2021"],"award-info":[{"award-number":["CEECINST\/00018\/2021"]}],"id":[{"id":"10.13039\/501100001871","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100000780","name":"European Commission","doi-asserted-by":"publisher","award":["M-ERA-NET3\/0003\/2021 - NanOx4EStor (DOI:10.54499\/M-ERA-NET3\/0003\/2021)"],"award-info":[{"award-number":["M-ERA-NET3\/0003\/2021 - NanOx4EStor (DOI:10.54499\/M-ERA-NET3\/0003\/2021)"]}],"id":[{"id":"10.13039\/501100000780","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100001871","name":"Funda\u00e7\u00e3o para a Ci\u00eancia e a Tecnologia","doi-asserted-by":"publisher","award":["UIDB\/50011\/2020"],"award-info":[{"award-number":["UIDB\/50011\/2020"]}],"id":[{"id":"10.13039\/501100001871","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100001871","name":"Funda\u00e7\u00e3o para a Ci\u00eancia e a Tecnologia","doi-asserted-by":"publisher","award":["UIDP\/50011\/2020 & LA\/P\/0006\/2020"],"award-info":[{"award-number":["UIDP\/50011\/2020 & LA\/P\/0006\/2020"]}],"id":[{"id":"10.13039\/501100001871","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100004543","name":"China Scholarship Council","doi-asserted-by":"publisher","award":["201807000104"],"award-info":[{"award-number":["201807000104"]}],"id":[{"id":"10.13039\/501100004543","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100004837","name":"Ministerio de Ciencia e Innovaci\u00f3n","doi-asserted-by":"publisher","award":["Severo Ochoa FUNFUTURE (CEX2019-000917-S)"],"award-info":[{"award-number":["Severo Ochoa FUNFUTURE (CEX2019-000917-S)"]}],"id":[{"id":"10.13039\/501100004837","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100004837","name":"Ministerio de Ciencia e Innovaci\u00f3n","doi-asserted-by":"publisher","award":["PID2020-112548RB-I00"],"award-info":[{"award-number":["PID2020-112548RB-I00"]}],"id":[{"id":"10.13039\/501100004837","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":["pubs.aip.org"],"crossmark-restriction":true},"short-container-title":[],"published-print":{"date-parts":[[2023,12,1]]},"abstract":"<jats:p>Ferroelectric HfO2 films are usually polycrystalline and contain a mixture of polar and nonpolar phases. This challenges the understanding and control of polar phase stabilization and ferroelectric properties. Several factors, such as dopants, oxygen vacancies, or stress, among others, have been investigated and shown to have a crucial role on optimizing the ferroelectric response. Stress generated during deposition or annealing of thin films is a main factor determining the formed crystal phases and influences the lattice strain of the polar orthorhombic phase. It is difficult to discriminate between stress and strain effects on polycrystalline ferroelectric HfO2 films, and the direct impact of orthorhombic lattice strain on ferroelectric polarization has yet to be determined experimentally. Here, we analyze the crystalline phases and lattice strain of several series of doped HfO2 epitaxial films. We conclude that stress has a critical influence on metastable orthorhombic phase stabilization and ferroelectric polarization. On the contrary, the lattice deformation effects are much smaller than those caused by variations in the orthorhombic phase content. The experimental results are confirmed by density functional theory calculations on HfO2 and Hf0.5Zr0.5O2 ferroelectric phases.<\/jats:p>","DOI":"10.1063\/5.0172259","type":"journal-article","created":{"date-parts":[[2023,12,13]],"date-time":"2023-12-13T13:57:22Z","timestamp":1702475842000},"update-policy":"https:\/\/doi.org\/10.1063\/aip-crossmark-policy-page","source":"Crossref","is-referenced-by-count":25,"title":["Disentangling stress and strain effects in ferroelectric HfO2"],"prefix":"10.1063","volume":"10","author":[{"ORCID":"https:\/\/orcid.org\/0000-0002-5715-767X","authenticated-orcid":false,"given":"Tingfeng","family":"Song","sequence":"first","affiliation":[{"name":"Institut de Ci\u00e8ncia de Materials de Barcelona (ICMAB-CSIC) 1 , Campus UAB, Bellaterra, 08193 Barcelona, Spain"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-3633-1966","authenticated-orcid":false,"given":"Veniero","family":"Lenzi","sequence":"additional","affiliation":[{"name":"CICECO\u2014Aveiro Institute of Materials, Department of Chemistry, University of Aveiro 2 , 3810-193 Aveiro, Portugal"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-3485-7032","authenticated-orcid":false,"given":"Jos\u00e9 P. B.","family":"Silva","sequence":"additional","affiliation":[{"name":"Physics Center of Minho and Porto Universities (CF-UM-UP), University of Minho 3 , Campus de Gualtar, 4710-057 Braga, Portugal"},{"name":"Laboratory of Physics for Materials and Emergent Technologies, LapMET, University of Minho 4 , 4710-057 Braga, Portugal"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-7477-6934","authenticated-orcid":false,"given":"Lu\u00eds","family":"Marques","sequence":"additional","affiliation":[{"name":"Physics Center of Minho and Porto Universities (CF-UM-UP), University of Minho 3 , Campus de Gualtar, 4710-057 Braga, Portugal"},{"name":"Laboratory of Physics for Materials and Emergent Technologies, LapMET, University of Minho 4 , 4710-057 Braga, Portugal"}]},{"ORCID":"https:\/\/orcid.org\/0000-0003-4182-6194","authenticated-orcid":false,"given":"Ignasi","family":"Fina","sequence":"additional","affiliation":[{"name":"Institut de Ci\u00e8ncia de Materials de Barcelona (ICMAB-CSIC) 1 , Campus UAB, Bellaterra, 08193 Barcelona, Spain"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-5314-453X","authenticated-orcid":false,"given":"Florencio","family":"S\u00e1nchez","sequence":"additional","affiliation":[{"name":"Institut de Ci\u00e8ncia de Materials de Barcelona (ICMAB-CSIC) 1 , Campus UAB, Bellaterra, 08193 Barcelona, Spain"}]}],"member":"317","published-online":{"date-parts":[[2023,12,13]]},"reference":[{"key":"2023121313571617400_c1","doi-asserted-by":"publisher","first-page":"102903","DOI":"10.1063\/1.3634052","volume":"99","year":"2011","journal-title":"Appl. Phys. Lett."},{"key":"2023121313571617400_c2","doi-asserted-by":"publisher","first-page":"1811","DOI":"10.1002\/adma.201404531","volume":"27","year":"2015","journal-title":"Adv. Mater."},{"key":"2023121313571617400_c3","doi-asserted-by":"publisher","first-page":"1800522","DOI":"10.1002\/aelm.201800522","volume":"5","year":"2019","journal-title":"Adv. Electron. Mater."},{"key":"2023121313571617400_c4","doi-asserted-by":"publisher","first-page":"0123456789","DOI":"10.1038\/s41578-022-00431-2","volume":"2022","journal-title":"Nat. Rev. Mater."},{"key":"2023121313571617400_c5","doi-asserted-by":"publisher","first-page":"10526","DOI":"10.1039\/D0TC01695K","volume":"8","year":"2020","journal-title":"J. Mater. Chem. C"},{"key":"2023121313571617400_c6","doi-asserted-by":"publisher","first-page":"240502","DOI":"10.1063\/5.0129546","volume":"121","year":"2022","journal-title":"Appl. Phys. Lett."},{"key":"2023121313571617400_c7","doi-asserted-by":"publisher","first-page":"9102","DOI":"10.1021\/acs.chemmater.7b02835","volume":"29","year":"2017","journal-title":"Chem. Mater."},{"key":"2023121313571617400_c8","doi-asserted-by":"publisher","first-page":"e12500","DOI":"10.1002\/eem2.12500","volume":"2022","journal-title":"Energy Environ. Mater."},{"key":"2023121313571617400_c9","doi-asserted-by":"publisher","first-page":"072902","DOI":"10.1063\/1.4893376","volume":"105","year":"2014","journal-title":"Appl. Phys. Lett."},{"key":"2023121313571617400_c10","doi-asserted-by":"publisher","first-page":"15","DOI":"10.1016\/j.mee.2015.04.024","volume":"147","year":"2015","journal-title":"Microelectron. Eng."},{"key":"2023121313571617400_c11","doi-asserted-by":"publisher","first-page":"04FB01","DOI":"10.7567\/JJAP.57.04FB01","volume":"57","year":"2018","journal-title":"Jpn. J. Appl. Phys., Part 1"},{"key":"2023121313571617400_c12","doi-asserted-by":"publisher","first-page":"12224","DOI":"10.1039\/D1TC02512K","volume":"9","year":"2021","journal-title":"J. Mater. Chem. C"},{"key":"2023121313571617400_c13","doi-asserted-by":"publisher","first-page":"262904","DOI":"10.1063\/1.4954942","volume":"108","year":"2016","journal-title":"Appl. Phys. Lett."},{"key":"2023121313571617400_c14","doi-asserted-by":"publisher","first-page":"2200601","DOI":"10.1002\/aelm.202200601","volume":"8","year":"2022","journal-title":"Adv. Electron. Mater."},{"key":"2023121313571617400_c15","doi-asserted-by":"publisher","first-page":"226104","DOI":"10.1103\/PhysRevLett.96.226104","volume":"96","year":"2006","journal-title":"Phys. Rev. Lett."},{"key":"2023121313571617400_c16","doi-asserted-by":"publisher","first-page":"1449","DOI":"10.1021\/acsaelm.9b00256","volume":"1","year":"2019","journal-title":"ACS Appl. Electron. Mater."},{"key":"2023121313571617400_c17","doi-asserted-by":"publisher","first-page":"101621","DOI":"10.1016\/j.apmt.2022.101621","volume":"29","year":"2022","journal-title":"Appl. Mater. Today"},{"key":"2023121313571617400_c18","doi-asserted-by":"publisher","first-page":"220","DOI":"10.1021\/acsaelm.8b00065","volume":"1","year":"2019","journal-title":"ACS Appl. Electron. Mater."},{"key":"2023121313571617400_c19","doi-asserted-by":"publisher","first-page":"1084","DOI":"10.1039\/D1TC05387F","volume":"10","year":"2022","journal-title":"J. Mater. Chem. C"},{"key":"2023121313571617400_c20","doi-asserted-by":"publisher","first-page":"283","DOI":"10.1016\/j.jpowsour.2013.07.080","volume":"246","year":"2014","journal-title":"J. Power Sources"},{"key":"2023121313571617400_c21","doi-asserted-by":"publisher","first-page":"062907","DOI":"10.1063\/1.3204464","volume":"95","year":"2009","journal-title":"Appl. Phys. Lett."},{"key":"2023121313571617400_c22","doi-asserted-by":"publisher","first-page":"2109889","DOI":"10.1002\/adma.202109889","volume":"34","year":"2022","journal-title":"Adv. Mater."},{"key":"2023121313571617400_c23","doi-asserted-by":"publisher","first-page":"589","DOI":"10.1146\/annurev.matsci.37.061206.113016","volume":"37","year":"2007","journal-title":"Annu. Rev. Mater. Res."},{"key":"2023121313571617400_c24","doi-asserted-by":"publisher","first-page":"118","DOI":"10.1557\/mrs.2014.1","volume":"39","year":"2014","journal-title":"MRS Bull."},{"key":"2023121313571617400_c25","doi-asserted-by":"publisher","first-page":"1005","DOI":"10.1126\/science.1103218","volume":"306","year":"2004","journal-title":"Science"},{"key":"2023121313571617400_c26","doi-asserted-by":"publisher","first-page":"495","DOI":"10.1038\/s41598-017-18842-5","volume":"8","year":"2018","journal-title":"Sci. Rep."},{"key":"2023121313571617400_c27","doi-asserted-by":"publisher","first-page":"252904","DOI":"10.1063\/1.3669527","volume":"99","year":"2011","journal-title":"Appl. Phys. Lett."},{"key":"2023121313571617400_c28","doi-asserted-by":"publisher","first-page":"134109","DOI":"10.1063\/1.4916707","volume":"117","year":"2015","journal-title":"J. Appl. Phys."},{"key":"2023121313571617400_c29","doi-asserted-by":"publisher","first-page":"072006","DOI":"10.1063\/1.4927805","volume":"118","year":"2015","journal-title":"J. Appl. Phys."},{"key":"2023121313571617400_c30","doi-asserted-by":"publisher","first-page":"4139","DOI":"10.1021\/acs.jpcc.6b11972","volume":"121","year":"2017","journal-title":"J. Phys. Chem. C"},{"key":"2023121313571617400_c31","doi-asserted-by":"publisher","first-page":"115438","DOI":"10.1103\/PhysRevB.106.115438","volume":"106","year":"2022","journal-title":"Phys. Rev. B"},{"key":"2023121313571617400_c32","doi-asserted-by":"publisher","first-page":"94","DOI":"10.1021\/acs.chemmater.2c02660","volume":"35","year":"2023","journal-title":"Chem. Mater."},{"key":"2023121313571617400_c33","doi-asserted-by":"publisher","first-page":"014068","DOI":"10.1103\/PhysRevApplied.14.014068","volume":"14","year":"2020","journal-title":"Phys. Rev. Appl."},{"key":"2023121313571617400_c34","doi-asserted-by":"publisher","first-page":"054404","DOI":"10.1103\/PhysRevMaterials.3.054404","volume":"3","year":"2019","journal-title":"Phys. Rev. Mater."},{"key":"2023121313571617400_c35","doi-asserted-by":"publisher","first-page":"L060102","DOI":"10.1103\/PhysRevB.108.L060102","volume":"108","year":"2023","journal-title":"Phys. Rev. B"},{"key":"2023121313571617400_c36","doi-asserted-by":"publisher","first-page":"23LT01","DOI":"10.1088\/1361-6463\/ab7fd4","volume":"53","year":"2020","journal-title":"J. Phys. D: Appl. Phys."},{"key":"2023121313571617400_c37","doi-asserted-by":"publisher","first-page":"154101","DOI":"10.1063\/5.0084660","volume":"131","year":"2022","journal-title":"J. Appl. Phys."},{"key":"2023121313571617400_c38","doi-asserted-by":"publisher","first-page":"3618","DOI":"10.1021\/acsaelm.0c00680","volume":"2","year":"2020","journal-title":"ACS Appl. Electron. Mater."},{"key":"2023121313571617400_c39","doi-asserted-by":"publisher","first-page":"101661","DOI":"10.1016\/j.apmt.2022.101661","volume":"29","year":"2022","journal-title":"Appl. Mater Today"},{"key":"2023121313571617400_c40","doi-asserted-by":"publisher","first-page":"3801","DOI":"10.1021\/acs.cgd.0c00095","volume":"20","year":"2020","journal-title":"Cryst. Growth Des."},{"key":"2023121313571617400_c41","doi-asserted-by":"publisher","first-page":"4026","DOI":"10.1021\/cm021111v","volume":"14","year":"2002","journal-title":"Chem. Mater."},{"key":"2023121313571617400_c42","doi-asserted-by":"publisher","first-page":"254","DOI":"10.1021\/acsanm.7b00124","volume":"1","year":"2018","journal-title":"ACS Appl. Nano Mater."},{"key":"2023121313571617400_c43","doi-asserted-by":"publisher","first-page":"164101","DOI":"10.1063\/1.5021746","volume":"123","year":"2018","journal-title":"J. Appl. Phys."},{"key":"2023121313571617400_c44","doi-asserted-by":"publisher","first-page":"4677","DOI":"10.1039\/C7TC01200D","volume":"5","year":"2017","journal-title":"J. Mater. Chem. C"},{"key":"2023121313571617400_c45","doi-asserted-by":"publisher","first-page":"SL0801","DOI":"10.7567\/1347-4065\/ab45e3","volume":"58","year":"2019","journal-title":"Jpn. J. Appl. Phys., Part 1"},{"key":"2023121313571617400_c46","doi-asserted-by":"publisher","first-page":"5293","DOI":"10.1039\/D2NR05935E","volume":"15","year":"2023","journal-title":"Nanoscale"},{"key":"2023121313571617400_c47","doi-asserted-by":"publisher","first-page":"4809","DOI":"10.1021\/acsaelm.1c00672","volume":"3","year":"2021","journal-title":"ACS Appl. Electron. Mater."},{"key":"2023121313571617400_c48","doi-asserted-by":"publisher","first-page":"6224","DOI":"10.1021\/acsami.8b18762","volume":"11","year":"2019","journal-title":"ACS Appl. Mater. Interfaces"},{"key":"2023121313571617400_c49","doi-asserted-by":"publisher","first-page":"082901","DOI":"10.1063\/5.0165072","volume":"123","year":"2023","journal-title":"Appl. Phys. Lett."},{"key":"2023121313571617400_c50","doi-asserted-by":"publisher","first-page":"212901","DOI":"10.1063\/1.5055258","volume":"113","year":"2018","journal-title":"Appl. Phys. Lett."},{"key":"2023121313571617400_c51","doi-asserted-by":"publisher","first-page":"222901","DOI":"10.1063\/1.5096002","volume":"114","year":"2019","journal-title":"Appl. Phys. Lett."},{"key":"2023121313571617400_c52","doi-asserted-by":"publisher","first-page":"3221","DOI":"10.1021\/acsaelm.0c00560","volume":"2","year":"2020","journal-title":"ACS Appl. Electron. Mater."},{"key":"2023121313571617400_c53","doi-asserted-by":"publisher","first-page":"1530","DOI":"10.1021\/acsaelm.1c00110","volume":"3","year":"2021","journal-title":"ACS Appl. Electron. Mater."},{"key":"2023121313571617400_c54","doi-asserted-by":"publisher","first-page":"558","DOI":"10.1103\/PhysRevB.47.558","volume":"47","year":"1993","journal-title":"Phys. Rev. B"},{"key":"2023121313571617400_c55","doi-asserted-by":"publisher","first-page":"15","DOI":"10.1016\/0927-0256(96)00008-0","volume":"6","year":"1996","journal-title":"Comput. Mater. Sci."},{"key":"2023121313571617400_c56","doi-asserted-by":"publisher","first-page":"11169","DOI":"10.1103\/PhysRevB.54.11169","volume":"54","year":"1996","journal-title":"Phys. Rev. B"},{"key":"2023121313571617400_c57","doi-asserted-by":"publisher","first-page":"136406","DOI":"10.1103\/PhysRevLett.100.136406","volume":"100","year":"2008","journal-title":"Phys. Rev. Lett."},{"key":"2023121313571617400_c58","doi-asserted-by":"publisher","first-page":"13","DOI":"10.1016\/j.calphad.2013.06.006","volume":"42","year":"2013","journal-title":"Calphad"},{"key":"2023121313571617400_c59","first-page":"31","volume-title":"Physics of Ferroelectrics: A Modern Perspective","year":"2007"}],"container-title":["Applied Physics Reviews"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/pubs.aip.org\/aip\/apr\/article-pdf\/doi\/10.1063\/5.0172259\/18258999\/041415_1_5.0172259.pdf","content-type":"application\/pdf","content-version":"vor","intended-application":"syndication"},{"URL":"https:\/\/pubs.aip.org\/aip\/apr\/article-pdf\/doi\/10.1063\/5.0172259\/18258999\/041415_1_5.0172259.pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2023,12,13]],"date-time":"2023-12-13T13:57:29Z","timestamp":1702475849000},"score":1,"resource":{"primary":{"URL":"https:\/\/pubs.aip.org\/apr\/article\/10\/4\/041415\/2929518\/Disentangling-stress-and-strain-effects-in"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2023,12,1]]},"references-count":59,"journal-issue":{"issue":"4","published-print":{"date-parts":[[2023,12,1]]}},"URL":"https:\/\/doi.org\/10.1063\/5.0172259","relation":{},"ISSN":["1931-9401"],"issn-type":[{"value":"1931-9401","type":"electronic"}],"subject":[],"published-other":{"date-parts":[[2023,12]]},"published":{"date-parts":[[2023,12,1]]},"article-number":"041415"}}