{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,9,22]],"date-time":"2026-09-22T02:14:36Z","timestamp":1790043276537,"version":"4.0.1"},"reference-count":54,"publisher":"National Academy of Sciences","issue":"16","license":[{"start":{"date-parts":[[2025,4,18]],"date-time":"2025-04-18T00:00:00Z","timestamp":1744934400000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by-nc-nd\/4.0\/"}],"funder":[{"DOI":"10.13039\/501100001809","name":"MOST | National Natural Science Foundation of China","doi-asserted-by":"publisher","award":["U22A20118"],"award-info":[{"award-number":["U22A20118"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100003392","name":"\u798f\u5efa\u7701\u79d1\u6280\u5385 | Natural Science Foundation of Fujian Province","doi-asserted-by":"publisher","award":["2023J01400"],"award-info":[{"award-number":["2023J01400"]}],"id":[{"id":"10.13039\/501100003392","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/100020754","name":"Fujian Science and Technology Innovation Laboratory for Optoelectronic Information of China","doi-asserted-by":"publisher","award":["2021ZZ122"],"award-info":[{"award-number":["2021ZZ122"]}],"id":[{"id":"10.13039\/100020754","id-type":"DOI","asserted-by":"publisher"}]},{"name":"Award Program for Fujian Minjiang Scholar Professorship","award":["None"],"award-info":[{"award-number":["None"]}]}],"content-domain":{"domain":["www.pnas.org"],"crossmark-restriction":true},"short-container-title":["Proc. Natl. Acad. Sci. U.S.A."],"published-print":{"date-parts":[[2025,4,22]]},"abstract":"<jats:p>\n                    Large-scale integration of microbattery systems on chips has long been hindered by the technical barrier between electrochemistry and microelectronics, particularly in terms of the compatibility of microbattery cells and their collective manufacturability. In this work, a silicon-based all-solid-state thin-film microbattery cell is developed at low temperatures for on-chip integration applications. Stress management at the interfaces covering both the resistance to interfacial fracture and the stress dissipation through strain regulation enables microbattery cells to deliver a high-rate performance (34.4 mA cm\n                    <jats:sup>\u22122<\/jats:sup>\n                    ), fast charge\u2013discharge properties (1,000,000 cycles at 20 mA cm\n                    <jats:sup>\u22122<\/jats:sup>\n                    ), and high-temperature tolerance (150 \u00b0C) under zero stack pressure. An intrinsic relationship among lithium utilization ratio, strain, stress, and interface manifestation is uncovered. A collective microfabrication protocol for on-chip microbattery packs is proposed, resulting in a prototype of series-connected microbattery packs. This work focuses on practically addressing the technologies and challenges in engineering on-chip microbattery systems for large-scale integration.\n                  <\/jats:p>","DOI":"10.1073\/pnas.2415693122","type":"journal-article","created":{"date-parts":[[2025,4,18]],"date-time":"2025-04-18T13:45:16Z","timestamp":1744983916000},"update-policy":"https:\/\/doi.org\/10.1073\/pnas.cm10313","source":"Crossref","is-referenced-by-count":31,"title":["Integratable all-solid-state thin-film microbatteries"],"prefix":"10.1073","volume":"122","author":[{"ORCID":"https:\/\/orcid.org\/0009-0004-5593-2152","authenticated-orcid":false,"given":"Bingyuan","family":"Ke","sequence":"first","affiliation":[{"name":"College of Physics and Information Engineering, Institute of Micro\u2013Nano Devices and Solar Cells, Fuzhou University","place":["Fuzhou, China"]},{"name":"Fujian Science & Technology Innovation Laboratory for Optoelectronic Information of China","place":["Fuzhou, China"]},{"name":"Jiangsu Collaborative Innovation Center of Photovoltaic Science and Engineering","place":["Changzhou, China"]}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-5384-0666","authenticated-orcid":false,"given":"Xinghui","family":"Wang","sequence":"additional","affiliation":[{"name":"College of Physics and Information Engineering, Institute of Micro\u2013Nano Devices and Solar Cells, Fuzhou University","place":["Fuzhou, China"]},{"name":"Fujian Science & Technology Innovation Laboratory for Optoelectronic Information of China","place":["Fuzhou, China"]},{"name":"Jiangsu Collaborative Innovation Center of Photovoltaic Science and Engineering","place":["Changzhou, China"]}],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"341","published-online":{"date-parts":[[2025,4,18]]},"reference":[{"key":"e_1_3_4_1_2","doi-asserted-by":"publisher","DOI":"10.1038\/s41578-020-00261-0"},{"key":"e_1_3_4_2_2","doi-asserted-by":"publisher","DOI":"10.1038\/s41928-019-0333-z"},{"key":"e_1_3_4_3_2","doi-asserted-by":"publisher","DOI":"10.1007\/s40820-023-01064-y"},{"key":"e_1_3_4_4_2","doi-asserted-by":"publisher","DOI":"10.1016\/0167-2738(92)90442-R"},{"key":"e_1_3_4_5_2","doi-asserted-by":"publisher","DOI":"10.1002\/aenm.202303757"},{"key":"e_1_3_4_6_2","doi-asserted-by":"publisher","DOI":"10.1038\/s41586-023-06860-5"},{"key":"e_1_3_4_7_2","first-page":"621","article-title":"Tape-casting electrode architecture permits low-temperature manufacturing of all-solid-state thin-film microbatteries","volume":"3","author":"Ke B.","year":"2024","unstructured":"B. Ke , Tape-casting electrode architecture permits low-temperature manufacturing of all-solid-state thin-film microbatteries. Interdiscip. Mater. 3, 621\u2013631 (2024).","journal-title":"Interdiscip. Mater."},{"key":"e_1_3_4_8_2","doi-asserted-by":"publisher","DOI":"10.1038\/d41586-021-00021-2"},{"key":"e_1_3_4_9_2","doi-asserted-by":"publisher","DOI":"10.1126\/science.abg5998"},{"key":"e_1_3_4_10_2","doi-asserted-by":"publisher","DOI":"10.1038\/s41560-020-0575-z"},{"key":"e_1_3_4_11_2","doi-asserted-by":"publisher","DOI":"10.1016\/j.joule.2021.04.001"},{"key":"e_1_3_4_12_2","doi-asserted-by":"publisher","DOI":"10.1038\/s41565-023-01478-0"},{"key":"e_1_3_4_13_2","doi-asserted-by":"publisher","DOI":"10.1021\/acs.chemrev.0c00431"},{"key":"e_1_3_4_14_2","doi-asserted-by":"publisher","DOI":"10.1038\/s41560-023-01208-9"},{"key":"e_1_3_4_15_2","doi-asserted-by":"publisher","DOI":"10.1038\/s41563-023-01792-x"},{"key":"e_1_3_4_16_2","doi-asserted-by":"publisher","DOI":"10.1002\/aenm.201401408"},{"key":"e_1_3_4_17_2","doi-asserted-by":"publisher","DOI":"10.1016\/j.joule.2023.10.003"},{"key":"e_1_3_4_18_2","doi-asserted-by":"publisher","DOI":"10.1007\/s40843-022-2152-3"},{"key":"e_1_3_4_19_2","doi-asserted-by":"publisher","DOI":"10.1002\/adfm.202310876"},{"key":"e_1_3_4_20_2","doi-asserted-by":"publisher","DOI":"10.1038\/s41563-020-00893-1"},{"key":"e_1_3_4_21_2","doi-asserted-by":"publisher","DOI":"10.1038\/s41563-023-01722-x"},{"key":"e_1_3_4_22_2","doi-asserted-by":"publisher","DOI":"10.1016\/j.joule.2022.05.016"},{"key":"e_1_3_4_23_2","doi-asserted-by":"publisher","DOI":"10.1016\/j.joule.2021.07.002"},{"key":"e_1_3_4_24_2","doi-asserted-by":"publisher","DOI":"10.1021\/acs.chemrev.2c00002"},{"key":"e_1_3_4_25_2","doi-asserted-by":"publisher","DOI":"10.1021\/acs.chemrev.0c00101"},{"key":"e_1_3_4_26_2","doi-asserted-by":"publisher","DOI":"10.1016\/j.jpowsour.2020.228595"},{"key":"e_1_3_4_27_2","doi-asserted-by":"publisher","DOI":"10.1016\/j.nanoen.2017.06.021"},{"key":"e_1_3_4_28_2","doi-asserted-by":"publisher","DOI":"10.1149\/2.0371704jes"},{"key":"e_1_3_4_29_2","doi-asserted-by":"publisher","DOI":"10.1016\/j.jpowsour.2010.02.013"},{"key":"e_1_3_4_30_2","doi-asserted-by":"publisher","DOI":"10.1039\/C8EE00907D"},{"key":"e_1_3_4_31_2","volume-title":"Adhesion Technology Recap-Current and Emerging Areas","author":"Da Silva L. F.","year":"2011","unstructured":"L. F. Da Silva, A. \u00d6chsner, R. D. Adams, \u201cHandbook of adhesion technology\u201d in Adhesion Technology Recap-Current and Emerging Areas, L. F. M. da Silva, A. \u00d6chsner, R. D. Adams, Eds. (Springer Science & Business Media, 2011)."},{"key":"e_1_3_4_32_2","doi-asserted-by":"publisher","DOI":"10.1038\/s41467-020-19528-9"},{"key":"e_1_3_4_33_2","doi-asserted-by":"publisher","DOI":"10.1016\/j.jpowsour.2012.01.097"},{"key":"e_1_3_4_34_2","doi-asserted-by":"publisher","DOI":"10.1021\/acsenergylett.8b02542"},{"key":"e_1_3_4_35_2","doi-asserted-by":"publisher","DOI":"10.1021\/acsenergylett.4c00674"},{"key":"e_1_3_4_36_2","doi-asserted-by":"publisher","DOI":"10.1021\/acsenergylett.2c01069"},{"key":"e_1_3_4_37_2","doi-asserted-by":"publisher","DOI":"10.1039\/D1EE00638J"},{"key":"e_1_3_4_38_2","doi-asserted-by":"publisher","DOI":"10.1016\/S0065-2156(08)70164-9"},{"key":"e_1_3_4_39_2","doi-asserted-by":"publisher","DOI":"10.1021\/nl403197m"},{"key":"e_1_3_4_40_2","doi-asserted-by":"publisher","DOI":"10.1149\/2.009209jes"},{"key":"e_1_3_4_41_2","doi-asserted-by":"publisher","DOI":"10.1016\/j.elecom.2010.09.008"},{"key":"e_1_3_4_42_2","doi-asserted-by":"publisher","DOI":"10.1103\/PhysRevLett.107.045503"},{"key":"e_1_3_4_43_2","doi-asserted-by":"publisher","DOI":"10.1149\/1.3489378"},{"key":"e_1_3_4_44_2","doi-asserted-by":"publisher","DOI":"10.1149\/2.048201jes"},{"key":"e_1_3_4_45_2","doi-asserted-by":"publisher","DOI":"10.1016\/j.jpowsour.2013.06.089"},{"key":"e_1_3_4_46_2","doi-asserted-by":"publisher","DOI":"10.1016\/j.jpowsour.2012.12.034"},{"key":"e_1_3_4_47_2","doi-asserted-by":"publisher","DOI":"10.1002\/ange.202106018"},{"key":"e_1_3_4_48_2","doi-asserted-by":"publisher","DOI":"10.1021\/acsenergylett.3c01839"},{"key":"e_1_3_4_49_2","doi-asserted-by":"publisher","DOI":"10.1002\/adma.202200538"},{"key":"e_1_3_4_50_2","doi-asserted-by":"publisher","DOI":"10.1002\/aenm.202103641"},{"key":"e_1_3_4_51_2","doi-asserted-by":"publisher","DOI":"10.1002\/anie.202104167"},{"key":"e_1_3_4_52_2","doi-asserted-by":"publisher","DOI":"10.1038\/s41578-019-0142-z"},{"key":"e_1_3_4_53_2","doi-asserted-by":"publisher","DOI":"10.1039\/D2EE04057C"},{"key":"e_1_3_4_54_2","doi-asserted-by":"publisher","DOI":"10.1149\/1.2133112"}],"container-title":["Proceedings of the National Academy of Sciences"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/pnas.org\/doi\/pdf\/10.1073\/pnas.2415693122","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,4,18]],"date-time":"2025-04-18T13:45:31Z","timestamp":1744983931000},"score":1,"resource":{"primary":{"URL":"https:\/\/pnas.org\/doi\/10.1073\/pnas.2415693122"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2025,4,18]]},"references-count":54,"journal-issue":{"issue":"16","published-print":{"date-parts":[[2025,4,22]]}},"alternative-id":["10.1073\/pnas.2415693122"],"URL":"https:\/\/doi.org\/10.1073\/pnas.2415693122","relation":{},"ISSN":["0027-8424","1091-6490"],"issn-type":[{"value":"0027-8424","type":"print"},{"value":"1091-6490","type":"electronic"}],"subject":[],"published":{"date-parts":[[2025,4,18]]},"assertion":[{"value":"2024-08-04","order":0,"name":"received","label":"Received","group":{"name":"publication_history","label":"Publication History"}},{"value":"2025-03-18","order":2,"name":"accepted","label":"Accepted","group":{"name":"publication_history","label":"Publication History"}},{"value":"2025-04-18","order":3,"name":"published","label":"Published","group":{"name":"publication_history","label":"Publication History"}}],"article-number":"e2415693122"}}