{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,7,5]],"date-time":"2026-07-05T00:42:49Z","timestamp":1783212169481,"version":"3.54.6"},"reference-count":34,"publisher":"IOP Publishing","issue":"12","license":[{"start":{"date-parts":[[2017,2,23]],"date-time":"2017-02-23T00:00:00Z","timestamp":1487808000000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/publishingsupport.iopscience.iop.org\/iop-standard\/v1"},{"start":{"date-parts":[[2017,2,23]],"date-time":"2017-02-23T00:00:00Z","timestamp":1487808000000},"content-version":"tdm","delay-in-days":0,"URL":"https:\/\/iopscience.iop.org\/info\/page\/text-and-data-mining"}],"funder":[{"DOI":"10.13039\/501100001691","name":"Japan Society for the Promotion of Science","doi-asserted-by":"crossref","award":["15F15359"],"award-info":[{"award-number":["15F15359"]}],"id":[{"id":"10.13039\/501100001691","id-type":"DOI","asserted-by":"crossref"}]}],"content-domain":{"domain":["iopscience.iop.org"],"crossmark-restriction":false},"short-container-title":["Nanotechnology"],"published-print":{"date-parts":[[2017,3,24]]},"abstract":"<jats:title>Abstract<\/jats:title>\n                  <jats:p>The significant enhancement seen in surface-enhanced Raman scattering (SERS) heavily relies on the ability of plasmonic structures to strongly confine light. Current techniques used to fabricate plasmonic nanostructures have been limited in their reproducibility for bottom-up techniques or their feature size for top-down techniques. Here, we propose a tooth multilayer structure that can be fabricated by using physical vapor deposition and selective wet etching, achieving extremely small feature sizes and high reproducibility. A multilayer structure composed of two alternating materials whose thicknesses can be controlled accurately in the nanometer range is deposited on a flat substrate using ion-beam sputtering. Subsequent selective wet etching is used to form nanogaps in one of the materials constituting the multilayer, with the depth of the nanogaps being controlled by the wet etching time. Combining both techniques can allow the nanogap dimensions to be controlled at sub 10 nm length scale, thus achieving a tooth multilayer structure with high enhancement and tunability of the resonance mode over a broad range, ideal for SERS applications.<\/jats:p>","DOI":"10.1088\/1361-6528\/aa5ebf","type":"journal-article","created":{"date-parts":[[2017,2,7]],"date-time":"2017-02-07T12:32:23Z","timestamp":1486470743000},"page":"125206","update-policy":"https:\/\/doi.org\/10.1088\/crossmark-policy","source":"Crossref","is-referenced-by-count":4,"title":["Plasmonic tooth-multilayer structure with high enhancement field for surface enhanced Raman spectroscopy"],"prefix":"10.1088","volume":"28","author":[{"given":"Li-Chung","family":"Huang","sequence":"first","affiliation":[{"name":"The University of Tokyo"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Zhiyu","family":"Wang","sequence":"additional","affiliation":[{"name":"The University of Tokyo"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"J Kenji","family":"Clark","sequence":"additional","affiliation":[{"name":"The University of Tokyo"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Ya-Lun","family":"Ho","sequence":"additional","affiliation":[{"name":"The University of Tokyo"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Jean-Jacques","family":"Delaunay","sequence":"additional","affiliation":[{"name":"The University of Tokyo"}],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"266","published-online":{"date-parts":[[2017,2,23]]},"reference":[{"key":"nanoaa5ebfbib1","doi-asserted-by":"publisher","first-page":"5215","DOI":"10.1021\/ja00457a071","type":"journal-article","article-title":"Anomalously intense Raman spectra of pyridine at a silver electrode","volume":"99","author":"Albrecht","year":"1977","journal-title":"J. Am. Chem. Soc."},{"key":"nanoaa5ebfbib2","doi-asserted-by":"publisher","first-page":"4357","DOI":"10.1103\/PhysRevLett.83.4357","type":"journal-article","article-title":"Spectroscopy of single hemoglobin molecules by surface enhanced Raman scattering","volume":"83","author":"Xu","year":"1999","journal-title":"Phys. Rev. Lett."},{"key":"nanoaa5ebfbib3","doi-asserted-by":"publisher","first-page":"5","DOI":"10.1021\/nl048965u","type":"journal-article","article-title":"High-density silver nanoparticle film with temperature-controllable interparticle spacing for a tunable surface enhanced Raman scattering substrate","volume":"5","author":"Lu","year":"2005","journal-title":"Nano Lett."},{"key":"nanoaa5ebfbib4","doi-asserted-by":"publisher","first-page":"912","DOI":"10.1039\/b708839f","type":"journal-article","article-title":"Single-molecule and single-nanoparticle SERS: from fundamental mechanisms to biomedical applications","volume":"37","author":"Qian","year":"2008","journal-title":"Chem. Soc. Rev."},{"key":"nanoaa5ebfbib5","doi-asserted-by":"publisher","first-page":"699","DOI":"10.1016\/j.matchemphys.2012.10.022","type":"journal-article","article-title":"Silver nanoclusters films for single molecule detection using surface enhanced Raman scattering (SERS)","volume":"137","author":"Botta","year":"2013","journal-title":"Mater. Chem. Phys."},{"key":"nanoaa5ebfbib6","doi-asserted-by":"publisher","first-page":"109","DOI":"10.1021\/jp0361327","type":"journal-article","article-title":"A nanoscale optical biosensor: the long range distance dependence of the localized surface plasmon resonance of noble metal nanoparticles","volume":"108","author":"Haes","year":"2009","journal-title":"J. Phys. Chem. B"},{"key":"nanoaa5ebfbib7","doi-asserted-by":"publisher","first-page":"1578","DOI":"10.1021\/ar7002804","type":"journal-article","article-title":"Noble metals on the nanoscale: optical and photothermal properties and some applications in imaging, sensing, biology, and medicine","volume":"41","author":"Jain","year":"2008","journal-title":"Acc. Chem. Res."},{"key":"nanoaa5ebfbib8","doi-asserted-by":"publisher","first-page":"1087","DOI":"10.1021\/nl034197f","type":"journal-article","article-title":"Interparticle coupling effects on plasmon resonances of nanogold particles","volume":"3","author":"Su","year":"2003","journal-title":"Nano Lett."},{"key":"nanoaa5ebfbib9","doi-asserted-by":"publisher","first-page":"485","DOI":"10.1021\/nl803621x","type":"journal-article","article-title":"Dimers of silver nanospheres: facile synthesis and their use as hot spots for surface-enhanced Raman scattering","volume":"9","author":"Li","year":"2009","journal-title":"Nano Lett."},{"key":"nanoaa5ebfbib10","doi-asserted-by":"publisher","first-page":"10903","DOI":"10.1021\/ja104174m","type":"journal-article","article-title":"Structure-activity relationships in gold nanoparticle dimers and trimers for surface-enhanced Raman spectroscopy","volume":"132","author":"Wustholz","year":"2010","journal-title":"J. Am. Chem. Soc."},{"key":"nanoaa5ebfbib11","doi-asserted-by":"publisher","first-page":"21","DOI":"10.1039\/C2CP42598J","type":"journal-article","article-title":"Creating, characterizing, and controlling chemistry with SERS hot spots","volume":"15","author":"Kleinman","year":"2013","journal-title":"Phys. Chem. Chem. Phys."},{"key":"nanoaa5ebfbib12","doi-asserted-by":"publisher","first-page":"8809","DOI":"10.1364\/AO.52.008809","type":"journal-article","article-title":"Plasmon focusing in short gold sphere nanochains for surface-enhanced Raman scattering","volume":"52","author":"Delange","year":"2013","journal-title":"Appl. Opt."},{"key":"nanoaa5ebfbib13","doi-asserted-by":"publisher","first-page":"1627","DOI":"10.1021\/jp207661y","type":"journal-article","article-title":"Modeling the effect of small gaps in surface-enhanced raman spectroscopy","volume":"116","author":"McMahon","year":"2012","journal-title":"J. Phys. Chem. C"},{"key":"nanoaa5ebfbib14","doi-asserted-by":"publisher","first-page":"357","DOI":"10.1088\/0957-4484\/15\/3\/022","type":"journal-article","article-title":"Raman scattering enhancement contributed from individual gold nanoparticles and interparticle coupling","volume":"15","author":"Zhu","year":"2004","journal-title":"Nanotechnology"},{"key":"nanoaa5ebfbib15","doi-asserted-by":"publisher","first-page":"268","DOI":"10.1021\/ja906954f","type":"journal-article","article-title":"Anisotropic etching of silver nanoparticles for plasmonic structures capable of single-particle SERS","volume":"132","author":"Mulvihill","year":"2010","journal-title":"J. Am. Chem. Soc."},{"key":"nanoaa5ebfbib16","doi-asserted-by":"publisher","first-page":"7098","DOI":"10.1021\/ja401428e","type":"journal-article","article-title":"CuTe Nanocrystals: shape and size control, plasmonic properties, and use as SERS probes and photothermal agents","volume":"135","author":"Li","year":"2013","journal-title":"J. Am. Chem. Soc."},{"key":"nanoaa5ebfbib17","doi-asserted-by":"publisher","first-page":"12995","DOI":"10.1039\/c3ra44867c","type":"journal-article","article-title":"Design and fabrication of random silver films as substrate for SERS based nano-stress sensing of proteins","volume":"4","author":"Perumal","year":"2014","journal-title":"RSC Adv."},{"key":"nanoaa5ebfbib18","doi-asserted-by":"publisher","first-page":"3445","DOI":"10.1002\/smll.201102009","type":"journal-article","article-title":"3D self-assembled plasmonic superstructures of gold nanospheres: synthesis and characterization at the single-particle level","volume":"7","author":"Gellner","year":"2011","journal-title":"Small"},{"key":"nanoaa5ebfbib19","doi-asserted-by":"publisher","first-page":"696","DOI":"10.1021\/jz900286a","type":"journal-article","article-title":"Understanding the SERS effects of single silver nanoparticles and their dimers, one at a time","volume":"1","author":"Rycenga","year":"2010","journal-title":"J. Phys. Chem. Lett."},{"key":"nanoaa5ebfbib20","doi-asserted-by":"publisher","first-page":"301","DOI":"10.1021\/ja309300d","type":"journal-article","article-title":"Structure enhancement factor relationships in single gold nanoantennas by surface-enhanced Raman excitation spectroscopy","volume":"135","author":"Kleinman","year":"2013","journal-title":"J. Am. Chem. Soc."},{"key":"nanoaa5ebfbib21","doi-asserted-by":"publisher","first-page":"1660","DOI":"10.1021\/nl3000453","type":"journal-article","article-title":"Plasmonic nanoclusters: near field properties of the fano resonance interrogated with SERS","volume":"12","author":"Ye","year":"2012","journal-title":"Nano Lett."},{"key":"nanoaa5ebfbib22","doi-asserted-by":"publisher","DOI":"10.1063\/1.4896688","type":"journal-article","article-title":"Effective light concentration in gold short nanosphere chain on platinum mirror for surface-enhanced Raman scattering","volume":"105","author":"Lee","year":"2014","journal-title":"Appl. Phys. Lett."},{"key":"nanoaa5ebfbib23","doi-asserted-by":"publisher","first-page":"1918","DOI":"10.1002\/cphc.200901009","type":"journal-article","article-title":"Investigation on the second part of the electromagnetic SERS enhancement and resulting fabrication strategies of anisotropic plasmonic arrays","volume":"11","author":"Cialla","year":"2010","journal-title":"ChemPhysChem."},{"key":"nanoaa5ebfbib24","doi-asserted-by":"publisher","first-page":"208","DOI":"10.1002\/adma.201201151","type":"journal-article","article-title":"Distributing the optical near-field for efficient field-enhancements in nanostructures","volume":"24","author":"Valev","year":"2012","journal-title":"Adv. Mater."},{"key":"nanoaa5ebfbib25","doi-asserted-by":"publisher","first-page":"3983","DOI":"10.1021\/nl802509r","type":"journal-article","article-title":"Symmetry breaking in plasmonic nanocavities: subradiant LSPR sensing and a tunable fano resonance","volume":"8","author":"Hao","year":"2008","journal-title":"Nano Lett."},{"key":"nanoaa5ebfbib26","doi-asserted-by":"publisher","DOI":"10.1088\/0957-4484\/21\/39\/395701","type":"journal-article","article-title":"Rigorous surface enhanced Raman spectral characterization of large-area high-uniformity silver-coated tapered silica nanopillar arrays","volume":"21","author":"Gartia","year":"2010","journal-title":"Nanotechnology"},{"key":"nanoaa5ebfbib27","doi-asserted-by":"publisher","first-page":"2231","DOI":"10.1021\/nl1012085","type":"journal-article","article-title":"Vertically oriented sub-10 nm plasmonic nanogap arrays","volume":"10","author":"Im","year":"2010","journal-title":"Nano Lett."},{"key":"nanoaa5ebfbib28","doi-asserted-by":"publisher","first-page":"2347","DOI":"10.1021\/jp067677e","type":"journal-article","article-title":"Apex-enhanced Raman spectroscopy using double-hole arrays in a gold film","volume":"111","author":"Lesuffleur","year":"2007","journal-title":"J. Phys. Chem. C"},{"key":"nanoaa5ebfbib29","doi-asserted-by":"publisher","first-page":"5457","DOI":"10.1002\/adma.201201820","type":"journal-article","article-title":"Ordered arrays of Raman nanosensors for ultrasensitive and location predictable biochemical detection","volume":"24","author":"Xu","year":"2012","journal-title":"Adv. Mater."},{"key":"nanoaa5ebfbib30","doi-asserted-by":"publisher","first-page":"57","DOI":"10.1002\/jrs.1250180111","type":"journal-article","article-title":"Surface-enhanced Raman scattering of benzenethiol in silver sol","volume":"18","author":"Joo","year":"1987","journal-title":"J. Raman Spectrosc."},{"key":"nanoaa5ebfbib31","doi-asserted-by":"publisher","first-page":"1331","DOI":"10.1002\/jrs.2396","type":"journal-article","article-title":"Measurement of the absolute Raman scattering cross section of the 1584 cm\u22121 band of benzenethiol and the surface-enhanced Raman scattering cross section enhancement factor for femtosecond laser-nanostructured substrates","volume":"40","author":"Aggarwal","year":"2009","journal-title":"J. Raman Spectrosc."},{"key":"nanoaa5ebfbib32","doi-asserted-by":"publisher","first-page":"9979","DOI":"10.1021\/j100177a068","type":"journal-article","article-title":"Axial and azimuthal angle determination with surface-enhanced Raman spectroscopy: thiophenol on copper, silver, and gold metal surfaces","volume":"95","author":"Camon","year":"1991","journal-title":"J. Phys. Chem."},{"key":"nanoaa5ebfbib33","doi-asserted-by":"publisher","first-page":"1212","DOI":"10.1366\/0003702991945687","type":"journal-article","article-title":"Surface enhancement factors for Ag and Au surfaces relative to Pt surfaces for monolayers of thiophenol","volume":"53","author":"Taylor","year":"1999","journal-title":"Appl. Spectrosc."},{"key":"nanoaa5ebfbib34","doi-asserted-by":"publisher","first-page":"442","DOI":"10.1038\/nmat2162","type":"journal-article","article-title":"Biosensing with plasmonic nanosensors","volume":"7","author":"Anker","year":"2008","journal-title":"Nat. Mater."}],"container-title":["Nanotechnology"],"original-title":[],"link":[{"URL":"http:\/\/iopscience.iop.org\/article\/10.1088\/1361-6528\/aa5ebf","content-type":"text\/html","content-version":"am","intended-application":"text-mining"},{"URL":"http:\/\/stacks.iop.org\/0957-4484\/28\/i=12\/a=125206\/pdf","content-type":"application\/pdf","content-version":"vor","intended-application":"text-mining"},{"URL":"http:\/\/stacks.iop.org\/0957-4484\/28\/i=12\/a=125206?key=crossref.cf211f9929a09189fe30fa619deea88f","content-type":"text\/html","content-version":"vor","intended-application":"text-mining"},{"URL":"http:\/\/iopscience.iop.org\/article\/10.1088\/1361-6528\/aa5ebf\/pdf","content-type":"application\/pdf","content-version":"am","intended-application":"text-mining"},{"URL":"https:\/\/iopscience.iop.org\/article\/10.1088\/1361-6528\/aa5ebf","content-type":"text\/html","content-version":"vor","intended-application":"text-mining"},{"URL":"https:\/\/iopscience.iop.org\/article\/10.1088\/1361-6528\/aa5ebf\/pdf","content-type":"application\/pdf","content-version":"vor","intended-application":"text-mining"},{"URL":"http:\/\/iopscience.iop.org\/article\/10.1088\/1361-6528\/aa5ebf\/pdf","content-type":"application\/pdf","content-version":"am","intended-application":"syndication"},{"URL":"https:\/\/iopscience.iop.org\/article\/10.1088\/1361-6528\/aa5ebf\/pdf","content-type":"application\/pdf","content-version":"vor","intended-application":"syndication"},{"URL":"http:\/\/stacks.iop.org\/0957-4484\/28\/i=12\/a=125206?key=crossref.cf211f9929a09189fe30fa619deea88f","content-type":"text\/html","content-version":"vor","intended-application":"similarity-checking"},{"URL":"http:\/\/stacks.iop.org\/0957-4484\/28\/i=12\/a=125206\/pdf","content-type":"application\/pdf","content-version":"vor","intended-application":"similarity-checking"},{"URL":"http:\/\/iopscience.iop.org\/article\/10.1088\/1361-6528\/aa5ebf\/pdf","content-type":"application\/pdf","content-version":"am","intended-application":"similarity-checking"},{"URL":"https:\/\/iopscience.iop.org\/article\/10.1088\/1361-6528\/aa5ebf\/pdf","content-type":"application\/pdf","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2026,7,4]],"date-time":"2026-07-04T13:46:16Z","timestamp":1783172776000},"score":1,"resource":{"primary":{"URL":"https:\/\/iopscience.iop.org\/article\/10.1088\/1361-6528\/aa5ebf"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2017,2,23]]},"references-count":34,"journal-issue":{"issue":"12","published-online":{"date-parts":[[2017,2,23]]},"published-print":{"date-parts":[[2017,3,24]]}},"URL":"https:\/\/doi.org\/10.1088\/1361-6528\/aa5ebf","relation":{},"ISSN":["0957-4484","1361-6528"],"issn-type":[{"value":"0957-4484","type":"print"},{"value":"1361-6528","type":"electronic"}],"subject":[],"published":{"date-parts":[[2017,2,23]]},"assertion":[{"value":"Plasmonic tooth-multilayer structure with high enhancement field for surface enhanced Raman spectroscopy","name":"article_title","label":"Article Title"},{"value":"Nanotechnology","name":"journal_title","label":"Journal Title"},{"value":"paper","name":"article_type","label":"Article Type"},{"value":"\u00a9 2017 IOP Publishing Ltd. All rights, including for text and data mining, AI training, and similar technologies, are reserved.","name":"copyright_information","label":"Copyright Information"},{"value":"2016-11-07","name":"date_received","label":"Date Received","group":{"name":"publication_dates","label":"Publication dates"}},{"value":"2017-02-07","name":"date_accepted","label":"Date Accepted","group":{"name":"publication_dates","label":"Publication dates"}},{"value":"2017-02-23","name":"date_epub","label":"Online publication date","group":{"name":"publication_dates","label":"Publication dates"}}]}}