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At the same time, the complete picture of the phase evolution originating from point defects in single-layer of semiconducting H-MoTe<jats:sub>2<\/jats:sub> via Mo<jats:sub>6<\/jats:sub>Te<jats:sub>6<\/jats:sub> nanowires to cubic molybdenum has not yet been reported so far, and it is the topic of the present study. The occurring phase transformations in single-layer H-MoTe<jats:sub>2<\/jats:sub> were initiated by 40\u201380 kV electrons in the spherical and chromatic aberration-corrected high-resolution transmission electron microscope and\/or when subjected to high temperatures. We analyse the damage cross-section at voltages between 40 kV and 80 kV and relate the results to previously published values for other TMDs. Then we demonstrate that electron beam irradiation offers a route to locally transform freestanding single-layer H-MoTe<jats:sub>2<\/jats:sub> into one-dimensional (1D) Mo<jats:sub>6<\/jats:sub>Te<jats:sub>6<\/jats:sub> nanowires. Combining the experimental data with the results of first-principles calculations, we explain the transformations in MoTe<jats:sub>2<\/jats:sub> single-layers and Mo<jats:sub>6<\/jats:sub>Te<jats:sub>6<\/jats:sub> nanowires by an interplay of electron-beam-induced energy transfer, atom ejection, and oxygen absorption. Further, the effects emerging from electron irradiation are compared with those produced by <jats:italic>in situ<\/jats:italic> annealing in a vacuum until pure molybdenum crystals are obtained at temperatures of about 1000 \u00b0C. A detailed understanding of high-temperature solid-to-solid phase transformation in the 2D limit can provide insights into the applicability of this material for future device fabrication.<\/jats:p>","DOI":"10.1088\/1361-6528\/ad15bb","type":"journal-article","created":{"date-parts":[[2023,12,14]],"date-time":"2023-12-14T22:28:30Z","timestamp":1702592910000},"page":"145301","update-policy":"https:\/\/doi.org\/10.1088\/crossmark-policy","source":"Crossref","is-referenced-by-count":10,"title":["Phase transformations in single-layer MoTe<sub>2<\/sub> stimulated by electron irradiation and annealing"],"prefix":"10.1088","volume":"35","author":[{"ORCID":"https:\/\/orcid.org\/0000-0001-5123-0170","authenticated-orcid":false,"given":"Janis","family":"K\u00f6ster","sequence":"first","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Silvan","family":"Kretschmer","sequence":"additional","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Alexander","family":"Storm","sequence":"additional","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Fabian","family":"Rasper","sequence":"additional","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Michael K","family":"Kinyanjui","sequence":"additional","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0003-0074-7588","authenticated-orcid":false,"given":"Arkady V","family":"Krasheninnikov","sequence":"additional","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Ute","family":"Kaiser","sequence":"additional","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"266","published-online":{"date-parts":[[2024,1,15]]},"reference":[{"key":"nanoad15bbbib1","doi-asserted-by":"publisher","first-page":"6231","DOI":"10.1021\/nl502557g","article-title":"Optical properties and band gap of single- and few-layer MoTe2 crystals","volume":"14","author":"Ruppert","year":"2014","journal-title":"Nano Lett."},{"key":"nanoad15bbbib2","doi-asserted-by":"publisher","first-page":"2336","DOI":"10.1021\/nl5045007","article-title":"Indirect-to-direct band gap crossover in few-layer MoTe2","volume":"15","author":"Lezama","year":"2015","journal-title":"Nano Lett."},{"key":"nanoad15bbbib3","doi-asserted-by":"publisher","first-page":"11892","DOI":"10.1021\/jacs.5b07452","article-title":"Large-area synthesis of high-quality uniform few-layer MoTe2","volume":"137","author":"Zhou","year":"2015","journal-title":"J. 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