{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,6,15]],"date-time":"2025-06-15T04:04:49Z","timestamp":1749960289032,"version":"3.41.0"},"reference-count":32,"publisher":"IOP Publishing","issue":"17","license":[{"start":{"date-parts":[[2024,2,5]],"date-time":"2024-02-05T00:00:00Z","timestamp":1707091200000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/iopscience.iop.org\/page\/copyright"},{"start":{"date-parts":[[2024,2,5]],"date-time":"2024-02-05T00:00:00Z","timestamp":1707091200000},"content-version":"tdm","delay-in-days":0,"URL":"https:\/\/iopscience.iop.org\/info\/page\/text-and-data-mining"}],"funder":[{"name":"EUR","award":["ANR-17-EURE-0002"],"award-info":[{"award-number":["ANR-17-EURE-0002"]}]},{"name":"RENATECH"},{"name":"ANR","award":["ANR-16-CE24-0022-011"],"award-info":[{"award-number":["ANR-16-CE24-0022-011"]}]}],"content-domain":{"domain":["iopscience.iop.org"],"crossmark-restriction":false},"short-container-title":["Nanotechnology"],"published-print":{"date-parts":[[2024,4,22]]},"abstract":"<jats:title>Abstract<\/jats:title>\n               <jats:p>Development of bulk acoustic wave filters with ultra-wide pass bands and operating at high frequencies for 5<jats:sup>th<\/jats:sup> and 6<jats:sup>th<\/jats:sup> generation telecommunication applications and micro-scale actuators, energy harvesters and sensors requires lead-free piezoelectric thin films with high electromechanical coupling and compatible with Si technology. In this paper, the epitaxial growth of 36\u00b0Y-X and 30\u00b0X-Y LiNbO<jats:sub>3<\/jats:sub> films by direct liquid injection chemical vapour deposition on Si substrates by using epitaxial SrTiO<jats:sub>3<\/jats:sub> layers, grown by molecular beam epitaxy, has been demonstrated. The stability of the interfaces and chemical interactions between SrTiO<jats:sub>3<\/jats:sub>, LiNbO<jats:sub>3<\/jats:sub> and Si were studied experimentally and by thermodynamical calculations. The experimental conditions for pure 36\u00b0Y-X orientation growth have been optimized. The piezoelectricity of epitaxial 36\u00b0Y-X LiNbO<jats:sub>3<\/jats:sub>\/SrTiO<jats:sub>3<\/jats:sub>\/Si films was confirmed by means of piezoelectric force microscopy measurements and the ferroelectric domain inversion was attained at 85 kV.cm<jats:sup>\u22121<\/jats:sup> as expected for the nearly stoichiometric LiNbO<jats:sub>3<\/jats:sub>. According to the theoretical calculations, 36\u00b0Y-X LiNbO<jats:sub>3<\/jats:sub> films on Si could offer an electromechanical coupling of 24.4% for thickness extension excitation of bulk acoustic waves and a comparable figure of merit of actuators and vibrational energy harvesters to that of standard PbZr<jats:sub>1\u2212<jats:italic>x<\/jats:italic>\n                  <\/jats:sub>Ti<jats:sub>\n                     <jats:italic>x<\/jats:italic>\n                  <\/jats:sub>O<jats:sub>3<\/jats:sub> films.<\/jats:p>","DOI":"10.1088\/1361-6528\/ad1b98","type":"journal-article","created":{"date-parts":[[2024,1,5]],"date-time":"2024-01-05T22:34:36Z","timestamp":1704494076000},"page":"175601","update-policy":"https:\/\/doi.org\/10.1088\/crossmark-policy","source":"Crossref","is-referenced-by-count":2,"title":["Integration of epitaxial LiNbO<sub>3<\/sub> thin films with silicon technology"],"prefix":"10.1088","volume":"35","author":[{"ORCID":"https:\/\/orcid.org\/0000-0002-8862-2669","authenticated-orcid":true,"given":"Ausrine","family":"Bartasyte","sequence":"first","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Stefania","family":"Oliveri","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Sondes","family":"Boujnah","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"ORCID":"https:\/\/orcid.org\/0000-0003-2971-1351","authenticated-orcid":false,"given":"Samuel","family":"Margueron","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Romain","family":"Bachelet","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Guillaume","family":"Saint-Girons","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"David","family":"Albertini","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Brice","family":"Gautier","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Pascal","family":"Boulet","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Ioana","family":"Nuta","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Elisabeth","family":"Blanquet","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-6548-178X","authenticated-orcid":true,"given":"Vincent","family":"Asti\u00e9","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-4032-366X","authenticated-orcid":true,"given":"Jean-Manuel","family":"Decams","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"266","published-online":{"date-parts":[[2024,2,5]]},"reference":[{"key":"nanoad1b98bib1","doi-asserted-by":"publisher","first-page":"630","DOI":"10.3390\/mi11070630","volume":"11","author":"Liu","year":"2020","journal-title":"Micromachines"},{"key":"nanoad1b98bib2"},{"key":"nanoad1b98bib3","doi-asserted-by":"publisher","DOI":"10.1109\/ultsym.2005.1602858","volume":"vol 315","author":"Muralt","year":"2005"},{"key":"nanoad1b98bib4","doi-asserted-by":"publisher","first-page":"593","DOI":"10.1002\/adma.200802611","volume":"21","author":"Akiyama","year":"2009","journal-title":"Adv. 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All rights, including for text and data mining, AI training, and similar technologies, are reserved.","name":"copyright_information","label":"Copyright Information"},{"value":"2023-07-29","name":"date_received","label":"Date Received","group":{"name":"publication_dates","label":"Publication dates"}},{"value":"2024-01-05","name":"date_accepted","label":"Date Accepted","group":{"name":"publication_dates","label":"Publication dates"}},{"value":"2024-02-05","name":"date_epub","label":"Online publication date","group":{"name":"publication_dates","label":"Publication dates"}}]}}