{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,3,30]],"date-time":"2026-03-30T12:17:03Z","timestamp":1774873023963,"version":"3.50.1"},"reference-count":13,"publisher":"IOP Publishing","issue":"12","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["J. Micromech. Microeng."],"published-print":{"date-parts":[[2006,12,1]]},"DOI":"10.1088\/0960-1317\/16\/12\/028","type":"journal-article","created":{"date-parts":[[2006,11,18]],"date-time":"2006-11-18T04:29:56Z","timestamp":1163824196000},"page":"2730-2735","source":"Crossref","is-referenced-by-count":6,"title":["Thin film silicon MEMS microresonators fabricated by hot-wire chemical vapor deposition"],"prefix":"10.1088","volume":"16","author":[{"given":"Samadhan B","family":"Patil","sequence":"first","affiliation":[]},{"given":"T","family":"Adrega","sequence":"additional","affiliation":[]},{"given":"V","family":"Chu","sequence":"additional","affiliation":[]},{"given":"J P","family":"Conde","sequence":"additional","affiliation":[]}],"member":"266","published-online":{"date-parts":[[2006,11,17]]},"reference":[{"key":"1","doi-asserted-by":"crossref","DOI":"10.1007\/978-3-662-04321-9","author":"Elwenspoeck M","year":"2001","journal-title":"Mechanical Microsensors"},{"key":"2","doi-asserted-by":"crossref","DOI":"10.1017\/CBO9780511525247","author":"Street R A","year":"1991","journal-title":"Hydrogenated Amorphous Silicon"},{"key":"3","doi-asserted-by":"publisher","DOI":"10.1063\/1.1306912"},{"key":"4","doi-asserted-by":"publisher","DOI":"10.1063\/1.1644319"},{"key":"5","doi-asserted-by":"publisher","DOI":"10.1109\/JSEN.2001.923586"},{"key":"6","doi-asserted-by":"publisher","DOI":"10.1063\/1.371292"},{"key":"7","author":""},{"key":"8","author":""},{"key":"9","doi-asserted-by":"publisher","DOI":"10.1063\/1.1573344"},{"key":"10","author":"Cleland A N","year":"2002","journal-title":"Foundations of Nanomechanics-From Solid State Theory to Device Applications"},{"key":"11","doi-asserted-by":"crossref","DOI":"10.1063\/1.1877820","volume":"97","author":"Gaspar J","year":"2005","journal-title":"J. Appl. Phys."},{"key":"12","doi-asserted-by":"publisher","DOI":"10.1063\/1.1712028"},{"key":"13","doi-asserted-by":"publisher","DOI":"10.1016\/S0040-6090(01)01222-6"}],"container-title":["Journal of Micromechanics and Microengineering"],"original-title":[],"deposited":{"date-parts":[[2020,4,11]],"date-time":"2020-04-11T02:29:01Z","timestamp":1586572141000},"score":1,"resource":{"primary":{"URL":"https:\/\/iopscience.iop.org\/article\/10.1088\/0960-1317\/16\/12\/028"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2006,11,17]]},"references-count":13,"journal-issue":{"issue":"12","published-print":{"date-parts":[[2006,12,1]]}},"alternative-id":["S0960-1317(06)30268-9"],"URL":"https:\/\/doi.org\/10.1088\/0960-1317\/16\/12\/028","relation":{},"ISSN":["0960-1317","1361-6439"],"issn-type":[{"value":"0960-1317","type":"print"},{"value":"1361-6439","type":"electronic"}],"subject":[],"published":{"date-parts":[[2006,11,17]]}}}