{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,5,15]],"date-time":"2026-05-15T17:14:08Z","timestamp":1778865248588,"version":"3.51.4"},"reference-count":51,"publisher":"IOP Publishing","issue":"1","license":[{"start":{"date-parts":[[2019,12,13]],"date-time":"2019-12-13T00:00:00Z","timestamp":1576195200000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/publishingsupport.iopscience.iop.org\/iop-standard\/v1"},{"start":{"date-parts":[[2019,12,13]],"date-time":"2019-12-13T00:00:00Z","timestamp":1576195200000},"content-version":"tdm","delay-in-days":0,"URL":"https:\/\/iopscience.iop.org\/info\/page\/text-and-data-mining"}],"content-domain":{"domain":["iopscience.iop.org"],"crossmark-restriction":false},"short-container-title":["J. Neural Eng."],"published-print":{"date-parts":[[2020,2,1]]},"abstract":"<jats:title>Abstract<\/jats:title>\n                  <jats:p>\n                    <jats:italic>Objective<\/jats:italic>\n                    . As electrodes are required to interact with sub-millimeter neural structures, innovative microfabrication processes are required to enable fabrication of microdevices involved in such stimulation and\/or recording. This requires the development of highly integrated and miniaturized systems, comprising die-integration-compatible technology and flexible microelectrodes. To elicit selective stimulation and recordings of sub-neural structures, such microfabrication process flow can beneficiate from the integration of titanium nitride (TiN) microelectrodes onto a polyimide substrate. Finally, assembling onto cuffs is required, as well as electrode characterization.\n                    <jats:italic>Approach<\/jats:italic>\n                    . Flexible TiN microelectrode array integration and miniaturization was achieved through microfabrication technology based on microelectromechanical systems (MEMS) and complementary metal-oxide semiconductor processing techniques and materials. They are highly reproducible processes, granting extreme control over the feature size and shape, as well as enabling the integration of on-chip electronics. This design is intended to enhance the integration of future electronic modules, with high gains on device miniaturization.\n                    <jats:italic>Main results<\/jats:italic>\n                    . (a) Fabrication of two electrode designs, (1) 2\u2009mm long array with 14 TiN square-shaped microelectrodes (80\u2009\u2009\u00d7\u2009\u200980\n                    <jats:italic>\u00b5<\/jats:italic>\n                    m\n                    <jats:sup>2<\/jats:sup>\n                    ), and (2) an electrode array with 2\u2009mm\u2009\u2009\u00d7\u2009\u200980\n                    <jats:italic>\u00b5<\/jats:italic>\n                    m contacts. The average impedances at 1\u2009kHz were 59 and 5.5 k\u03a9, respectively, for the smaller and larger contacts. Both designs were patterned on a flexible substrate and directly interconnected with a silicon chip. (b) Integration of flexible microelectrode array onto a cuff electrode designed for acute stimulation of the sub-millimeter nerves. (c) The TiN electrodes exhibited capacitive charge transfer, a water window of\u2009\u2009\u22120.6 V to 0.8 V, and a maximum charge injection capacity of 154\u2009\u2009\u00b1\u2009\u200916\n                    <jats:italic>\u00b5<\/jats:italic>\n                    C cm\n                    <jats:sup>\u22122<\/jats:sup>\n                    .\n                    <jats:italic>Significance<\/jats:italic>\n                    . We present the concept, fabrication and characterization of composite and flexible cuff electrodes, compatible with post-processing and MEMS packaging technologies, which allow for compact integration with control, readout and RF electronics. The fabricated TiN microelectrodes were electrochemically characterized and exhibited a comparable performance to other state-of-the-art electrodes for neural stimulation and recording. Therefore, the presented TiN-on-polyimide microelectrodes, released from silicon wafers, are a promising solution for neural interfaces targeted at sub-millimeter nerves, which may benefit from future upgrades with die-electronic modules.\n                  <\/jats:p>","DOI":"10.1088\/1741-2552\/ab4dbb","type":"journal-article","created":{"date-parts":[[2019,10,15]],"date-time":"2019-10-15T18:15:58Z","timestamp":1571163358000},"page":"016010","update-policy":"https:\/\/doi.org\/10.1088\/crossmark-policy","source":"Crossref","is-referenced-by-count":19,"title":["Fabrication and characterization of polyimide-based \u2018smooth\u2019 titanium nitride microelectrode arrays for neural stimulation and recording"],"prefix":"10.1088","volume":"17","author":[{"ORCID":"https:\/\/orcid.org\/0000-0002-7040-9843","authenticated-orcid":false,"given":"F","family":"Rodrigues","sequence":"first","affiliation":[]},{"given":"J F","family":"Ribeiro","sequence":"additional","affiliation":[]},{"given":"P A","family":"Anacleto","sequence":"additional","affiliation":[]},{"given":"A","family":"Fouchard","sequence":"additional","affiliation":[]},{"given":"O","family":"David","sequence":"additional","affiliation":[]},{"given":"P M","family":"Sarro","sequence":"additional","affiliation":[]},{"ORCID":"https:\/\/orcid.org\/0000-0003-2177-7321","authenticated-orcid":false,"given":"P M","family":"Mendes","sequence":"additional","affiliation":[]}],"member":"266","published-online":{"date-parts":[[2019,12,13]]},"reference":[{"key":"jneab4dbbbib001","doi-asserted-by":"publisher","first-page":"1379","DOI":"10.1007\/978-981-10-2798-7_41-1","type":"book","article-title":"Microelectrode array","author":"Wang","year":"2018"},{"key":"jneab4dbbbib002","doi-asserted-by":"publisher","first-page":"129","DOI":"10.1016\/0006-8993(96)00321-6","type":"journal-article","article-title":"Single unit recording capabilities of a 100 microelectrode array","volume":"726","author":"Nordhausen","year":"1996","journal-title":"Brain Res."},{"key":"jneab4dbbbib003","doi-asserted-by":"publisher","first-page":"293","DOI":"10.1016\/S0361-9230(99)00231-2","type":"journal-article","article-title":"A multielectrode array for intrafascicular recording and stimulation in sciatic nerve of cats","volume":"51","author":"Branner","year":"2000","journal-title":"Brain Res. 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