{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,11,3]],"date-time":"2026-11-03T16:54:19Z","timestamp":1793724859776,"version":"4.6.1"},"reference-count":161,"publisher":"Oxford University Press (OUP)","issue":"17","license":[{"start":{"date-parts":[[2026,5,22]],"date-time":"2026-05-22T00:00:00Z","timestamp":1779408000000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"DOI":"10.13039\/501100001809","name":"Natural Science Foundation of China","doi-asserted-by":"publisher","award":["12588201"],"award-info":[{"award-number":["12588201"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100001809","name":"Natural Science Foundation of China","doi-asserted-by":"publisher","award":["12388101"],"award-info":[{"award-number":["12388101"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100001809","name":"Natural Science Foundation of China","doi-asserted-by":"publisher","award":["52450304"],"award-info":[{"award-number":["52450304"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100001809","name":"Natural Science Foundation of China","doi-asserted-by":"publisher","award":["12432011"],"award-info":[{"award-number":["12432011"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100001809","name":"Natural Science Foundation of China","doi-asserted-by":"publisher","award":["12422208"],"award-info":[{"award-number":["12422208"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100001809","name":"Natural Science Foundation of China","doi-asserted-by":"publisher","award":["12421002"],"award-info":[{"award-number":["12421002"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100001809","name":"Natural Science Foundation of China","doi-asserted-by":"publisher","award":["12402321"],"award-info":[{"award-number":["12402321"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100002367","name":"Chinese Academy of Sciences","doi-asserted-by":"publisher","award":["XDA0380601"],"award-info":[{"award-number":["XDA0380601"]}],"id":[{"id":"10.13039\/501100002367","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2026,9,7]]},"abstract":"<jats:title>ABSTRACT<\/jats:title>\n                  <jats:p>The development of high-power extreme ultraviolet (EUV) light sources based on the laser-produced plasma (LPP) principle is crucial for advanced lithography, enabling the continued scaling of semiconductor devices. However, the underlying processes\u2014involving laser-droplet interaction, plasma evolution, and debris transport\u2014are governed by complex, multiscale, and multiphysics phenomena that pose significant challenges for both simulations and experiments. This review comprehensively surveys recent advances in the flow physics and modeling of LPP-EUV sources, focusing on three key areas: (i) numerical modeling and simulation of laser-tin droplet interaction, including laser absorption, radiation transport, equation\u00a0of states, etc.; (ii) progress in understanding droplet dynamics under femtosecond to nanosecond laser pulses; and (iii) the flow physics of debris transport and mitigation strategies such as buffer gas jets and magnetic fields. By integrating insights from simulations, experiments, and theoretical analyses, this review aims to bridge the gap between fundamental flow physics and applied EUV source engineering, providing a valuable reference for researchers working toward more efficient and debris-resistant EUV light sources.<\/jats:p>","DOI":"10.1093\/nsr\/nwag298","type":"journal-article","created":{"date-parts":[[2026,5,20]],"date-time":"2026-05-20T11:45:00Z","timestamp":1779277500000},"source":"Crossref","is-referenced-by-count":3,"title":["Flow physics and modeling in extreme ultraviolet sources"],"prefix":"10.1093","volume":"13","author":[{"given":"Kai Leong","family":"Chong","sequence":"first","affiliation":[{"name":"Shanghai Key Laboratory of Mechanics in Energy Engineering, Shanghai Institute of Applied Mathematics and Mechanics, School of Mechanics and Engineering Science, Shanghai University , Shanghai 200072 ,","place":["China"]}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Bo-Fu","family":"Wang","sequence":"additional","affiliation":[{"name":"Shanghai Key Laboratory of Mechanics in Energy Engineering, Shanghai Institute of Applied Mathematics and Mechanics, School of Mechanics and Engineering Science, Shanghai University , Shanghai 200072 ,","place":["China"]}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Feng","family":"Wang","sequence":"additional","affiliation":[{"name":"Tsinghua University New Cornerstone Science Laboratory, Center for Combustion Energy, Key Laboratory for Thermal Science and Power Engineering of Ministry of Education, Department of Energy and Power Engineering, , Beijing 100084 ,","place":["China"]}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Rui","family":"Yan","sequence":"additional","affiliation":[{"name":"University of Science and Technology of China Department of Modern Mechanics, , Hefei 230027 ,","place":["China"]}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Hang","family":"Ding","sequence":"additional","affiliation":[{"name":"University of Science and Technology of China Department of Modern Mechanics, , Hefei 230027 ,","place":["China"]}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Chao","family":"Sun","sequence":"additional","affiliation":[{"name":"Tsinghua University New Cornerstone Science Laboratory, Center for Combustion Energy, Key Laboratory for Thermal Science and Power Engineering of Ministry of Education, Department of Energy and Power Engineering, , Beijing 100084 ,","place":["China"]}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Quan","family":"Zhou","sequence":"additional","affiliation":[{"name":"Shanghai Key Laboratory of Mechanics in Energy Engineering, Shanghai Institute of Applied Mathematics and Mechanics, School of Mechanics and Engineering Science, Shanghai University , Shanghai 200072 ,","place":["China"]}],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"286","published-online":{"date-parts":[[2026,5,22]]},"reference":[{"key":"2026091709120752100_bib1","doi-asserted-by":"publisher","DOI":"10.1117\/3.2305675","volume-title":"EUV lithography","author":"Bakshi","year":"2018"},{"key":"2026091709120752100_bib2","doi-asserted-by":"publisher","first-page":"1","DOI":"10.33079\/jomm.19020202","article-title":"EUV lithography: state-of-the-art review","volume":"2","author":"Fu","year":"2019","journal-title":"J Microelectron Manuf"},{"key":"2026091709120752100_bib3","doi-asserted-by":"publisher","first-page":"023322","DOI":"10.1063\/5.0190136","article-title":"Simulation of flow and debris migration in extreme ultraviolet source vessel","volume":"36","author":"Meng","year":"2024","journal-title":"Phys Fluids"},{"key":"2026091709120752100_bib4","doi-asserted-by":"publisher","first-page":"294701","DOI":"10.1007\/s11433-025-2667-3","article-title":"Flow physics and dynamics in advanced lithography","volume":"68","author":"Zhou","year":"2025","journal-title":"Sci China Phys Mech"},{"key":"2026091709120752100_bib5","doi-asserted-by":"publisher","first-page":"294702","DOI":"10.1007\/s11433-024-2538-9","article-title":"Characterization and removal of contaminants in lithography","volume":"68","author":"Gao","year":"2025","journal-title":"Sci China Phys Mech"},{"key":"2026091709120752100_bib6","doi-asserted-by":"publisher","first-page":"855","DOI":"10.1080\/09500340.2012.678399","article-title":"Recent progress in source development for extreme UV lithography","volume":"59","author":"O\u2019Sullivan","year":"2012","journal-title":"J Mod Opt"},{"key":"2026091709120752100_bib7","article-title":"EUV lithography: Historical perspective and road ahead","volume-title":"Inaugural lecture","author":"Banine","year":"2014"},{"key":"2026091709120752100_bib8","doi-asserted-by":"publisher","first-page":"083001","DOI":"10.1088\/1361-6595\/ab3302","article-title":"Physics of laser-driven tin plasma sources of EUV radiation for nanolithography","volume":"28","author":"Versolato","year":"2019","journal-title":"Plasma Sources Sci Technol"},{"key":"2026091709120752100_bib9","doi-asserted-by":"publisher","first-page":"053111","DOI":"10.1063\/1.4921334","article-title":"On the structure of quasi-stationary laser ablation fronts in strongly radiating plasmas","volume":"22","author":"Basko","year":"2015","journal-title":"Phys Plasmas"},{"key":"2026091709120752100_bib10","doi-asserted-by":"publisher","first-page":"676","DOI":"10.1017\/jfm.2016.182","article-title":"Drop deformation by laser-pulse impact","volume":"794","author":"Gelderblom","year":"2016","journal-title":"J Fluid Mech"},{"key":"2026091709120752100_bib11","doi-asserted-by":"publisher","first-page":"173","DOI":"10.1515\/aot-2017-0029","article-title":"Light sources for high-volume manufacturing EUV lithography: technology, performance, and power scaling","volume":"6","author":"Fomenkov","year":"2017","journal-title":"Adv Opt Technol"},{"key":"2026091709120752100_bib12","doi-asserted-by":"publisher","first-page":"044018","DOI":"10.1103\/PhysRevApplied.3.044018","article-title":"Drop shaping by laser-pulse impact","volume":"3","author":"Klein","year":"2015","journal-title":"Phys Rev Appl"},{"key":"2026091709120752100_bib13","doi-asserted-by":"publisher","first-page":"014018","DOI":"10.1103\/PhysRevApplied.6.014018","article-title":"Plasma propulsion of a metallic microdroplet and its deformation upon laser impact","volume":"6","author":"Kurilovich","year":"2016","journal-title":"Phys Rev Appl"},{"key":"2026091709120752100_bib14","doi-asserted-by":"crossref","DOI":"10.6028\/NIST.SP.1500-208","article-title":"Report from the extreme ultraviolet (EUV) lithography working group meeting: current state, needs, and path forward","author":"Rasmussen","year":"2023"},{"key":"2026091709120752100_bib15","doi-asserted-by":"publisher","first-page":"053302","DOI":"10.1063\/5.0036352","article-title":"Laser-induced vaporization of a stretching sheet of liquid tin","volume":"129","author":"Liu","year":"2021","journal-title":"J Appl Phys"},{"key":"2026091709120752100_bib16","doi-asserted-by":"publisher","first-page":"542","DOI":"10.1038\/s41586-021-04281-w","article-title":"Burning plasma achieved in inertial fusion","volume":"601","author":"Zylstra","year":"2022","journal-title":"Nature"},{"key":"2026091709120752100_bib17","doi-asserted-by":"publisher","first-page":"265","DOI":"10.1016\/j.jqsrt.2005.04.007","article-title":"The new Los Alamos opacity code ATOMIC","volume":"99","author":"Hakel","year":"2006","journal-title":"J Quant Spectrosc Radiat Transf"},{"key":"2026091709120752100_bib18","doi-asserted-by":"publisher","first-page":"689","DOI":"10.1016\/S0022-4073(01)00109-1","article-title":"Cretin\u2013a radiative transfer capability for laboratory plasmas","volume":"71","author":"Scott","year":"2001","journal-title":"J Quant Spectrosc Radiat Transf"},{"key":"2026091709120752100_bib19","doi-asserted-by":"publisher","first-page":"R70","DOI":"10.1103\/PhysRevE.56.R70","article-title":"Collisional radiative model for heavy atoms in hot non-local-thermodynamical-equilibrium plasmas","volume":"56","author":"Bar-Shalom","year":"1997","journal-title":"Phys Rev E"},{"key":"2026091709120752100_bib20","doi-asserted-by":"publisher","first-page":"2401021","DOI":"10.1585\/pfr.8.2401021","article-title":"Validation of collisional radiative model of high-Z multiple charged ions at nlte code comparison workshops","volume":"8","author":"Sasaki","year":"2013","journal-title":"Plasma Fusion Res"},{"key":"2026091709120752100_bib21","doi-asserted-by":"publisher","first-page":"674","DOI":"10.1016\/S0168-9002(98)00446-X","article-title":"An equation of state code for hot dense matter, based on the QEOS description","volume":"415","author":"Kemp","year":"1998","journal-title":"Nucl Instrum Methods Phys Res A"},{"key":"2026091709120752100_bib22","doi-asserted-by":"publisher","first-page":"27","DOI":"10.1016\/j.hedp.2014.06.002","article-title":"SEMILLAC II: A new model for spectral behavior of hot plasmas","volume":"12","author":"Frank","year":"2014","journal-title":"High Energ Dens Phys"},{"key":"2026091709120752100_bib23","first-page":"457","article-title":"Simulation of the ionization dynamics of aluminum irradiated by intense short-pulse lasers","volume-title":"Inertial Fusion Sciences and Applications","author":"MacFarlane","year":"2003"},{"key":"2026091709120752100_bib24","doi-asserted-by":"publisher","first-page":"100713","DOI":"10.1016\/j.hedp.2019.100713","article-title":"On certain aspects of the thermos toolkit for modeling experiments","volume":"33","author":"Vichev","year":"2019","journal-title":"High Energ Dens Phys"},{"key":"2026091709120752100_bib25","doi-asserted-by":"publisher","DOI":"10.2172\/932939","article-title":"Heights integrated model as instrument for simulation of hydrodynamic, radiation transport, and heat conduction phenomena of laser-produced plasma in EUV applications","author":"Sizyuk","year":"2007"},{"key":"2026091709120752100_bib26","first-page":"021112","article-title":"RZLINE code modeling of distributed tin targets for laser-produced plasma sources of extreme ultraviolet radiation","volume":"11","author":"Koshelev","year":"2012","journal-title":"J Micro\/Nanolithogr MEMS MOEMS"},{"key":"2026091709120752100_bib27","doi-asserted-by":"publisher","first-page":"055003","DOI":"10.1088\/0741-3335\/54\/5\/055003","article-title":"One-dimensional study of the radiation-dominated implosion of a cylindrical tungsten plasma column","volume":"54","author":"Basko","year":"2012","journal-title":"Plasma Phys Control Fusion"},{"key":"2026091709120752100_bib28","doi-asserted-by":"publisher","first-page":"056708","DOI":"10.1063\/1.2907154","article-title":"Plasma physics and radiation hydrodynamics in developing an extreme ultraviolet light source for lithography","volume":"15","author":"Nishihara","year":"2008","journal-title":"Phys Plasmas"},{"key":"2026091709120752100_bib29","doi-asserted-by":"publisher","first-page":"273","DOI":"10.1086\/317361","article-title":"FLASH: An adaptive mesh hydrodynamics code for modeling astrophysical thermonuclear flashes","volume":"131","author":"Fryxell","year":"2000","journal-title":"AstroPhys J Suppl Ser"},{"key":"2026091709120752100_bib30","doi-asserted-by":"publisher","first-page":"109242","DOI":"10.1016\/j.cpc.2024.109242","article-title":"RHDLPP: A multigroup radiation hydrodynamics code for laser-produced plasmas","volume":"302","author":"Min","year":"2024","journal-title":"Comput Phys Commun"},{"key":"2026091709120752100_bib31","doi-asserted-by":"publisher","first-page":"620","DOI":"10.1063\/1.168744","article-title":"A tensorial approach to computational continuum mechanics using object-oriented techniques","volume":"12","author":"Weller","year":"1998","journal-title":"Comput Phys"},{"key":"2026091709120752100_bib32","doi-asserted-by":"publisher","first-page":"5838","DOI":"10.1016\/j.jcp.2009.04.042","article-title":"An accurate adaptive solver for surface-tension-driven interfacial flows","volume-title":"J Comput Phys","author":"Popinet","year":"2009"},{"key":"2026091709120752100_bib33","doi-asserted-by":"publisher","first-page":"012709","DOI":"10.1063\/1.5010899","article-title":"Power-law scaling of plasma pressure on laser-ablated tin microdroplets","volume":"25","author":"Kurilovich","year":"2018","journal-title":"Phys Plasmas"},{"key":"2026091709120752100_bib34","doi-asserted-by":"publisher","first-page":"86792K","DOI":"10.1117\/12.2011512","article-title":"Important processes in modeling and optimization of EUV lithography sources","volume":"8679","author":"Sizyuk","year":"2013","journal-title":"Proc SPIE"},{"key":"2026091709120752100_bib35","doi-asserted-by":"publisher","first-page":"130","DOI":"10.3390\/atoms11100130","article-title":"Review of the 1st EUV light sources code comparison workshop","volume":"11","author":"Sheil","year":"2023","journal-title":"Atoms"},{"key":"2026091709120752100_bib36","doi-asserted-by":"publisher","first-page":"38","DOI":"10.1016\/j.hedp.2017.02.009","article-title":"Review of the 9th NLTE code comparison workshop","volume":"23","author":"Piron","year":"2017","journal-title":"High Energ Dens Phys"},{"key":"2026091709120752100_bib37","doi-asserted-by":"publisher","first-page":"11E608","DOI":"10.1063\/1.4887155","article-title":"Hohlraum glint and laser pre-pulse detector for nif experiments using velocity interferometer system for any reflectora","volume":"85","author":"Moody","year":"2014","journal-title":"Rev Sci Instrum"},{"key":"2026091709120752100_bib38","doi-asserted-by":"publisher","first-page":"103507","DOI":"10.1063\/5.0018576","article-title":"Tuning laser wavelength and pulse duration to improve the conversion efficiency and performance of EUV sources for nanolithography","volume":"27","author":"Sizyuk","year":"2020","journal-title":"Phys Plasmas"},{"key":"2026091709120752100_bib39","doi-asserted-by":"publisher","first-page":"033301","DOI":"10.1063\/5.0125936","article-title":"Simulations of plasmas driven by laser wavelengths in the 1.064-10.6 $\\mu$m range for their characterization as future extreme ultraviolet light sources","volume":"30","author":"Hemminga","year":"2023","journal-title":"Phys Plasmas"},{"key":"2026091709120752100_bib40","doi-asserted-by":"publisher","first-page":"86790B","DOI":"10.1117\/12.2011503","article-title":"Advances in computer simulations of LPP sources for EUV lithography","volume":"8679","author":"Hassanein","year":"2013","journal-title":"Proc SPIE"},{"key":"2026091709120752100_bib41","doi-asserted-by":"publisher","first-page":"4248","DOI":"10.1103\/PhysRevB.25.4248","article-title":"Dielectric function of liquid tin between 250 and 1100\u00b0C","volume":"25","author":"Cisneros","year":"1982","journal-title":"Phys Rev B"},{"key":"2026091709120752100_bib42","doi-asserted-by":"publisher","first-page":"570","DOI":"10.1007\/s00339-022-05685-9","article-title":"Nanosecond laser ablation threshold of liquid tin microdroplets","volume":"128","author":"Meijer","year":"2022","journal-title":"Appl Phys A"},{"key":"2026091709120752100_bib43","doi-asserted-by":"publisher","first-page":"053302","DOI":"10.1063\/5.0036352","article-title":"Laser-induced vaporization of a stretching sheet of liquid tin","volume":"129","author":"Liu","year":"2021","journal-title":"J Appl Phys"},{"key":"2026091709120752100_bib44","volume-title":"The Physics of Laser Plasma Interactions","author":"Kruer","year":"2003"},{"key":"2026091709120752100_bib45","article-title":"Single-fluid radiation-hydrodynamic modeling of laser-driven EUV-emitting plasmas","volume-title":"Ph.D. thesis","author":"Hemminga","year":"2023"},{"key":"2026091709120752100_bib46","volume-title":"Photon sources for lithography and metrology","author":"Scott","year":"2022"},{"key":"2026091709120752100_bib47","doi-asserted-by":"publisher","first-page":"575","DOI":"10.1103\/PhysRevLett.44.575","article-title":"Nonlinear inverse bremsstrahlung and heated-electron distributions","volume":"44","author":"Langdon","year":"1980","journal-title":"Phys Rev Lett"},{"key":"2026091709120752100_bib48","doi-asserted-by":"publisher","first-page":"L023201","DOI":"10.1103\/PhysRevE.111.L023201","article-title":"Langdon effect in the realm of extreme ultraviolet source plasmas","volume":"111","author":"Gonzalez","year":"2025","journal-title":"Phys Rev E"},{"key":"2026091709120752100_bib49","doi-asserted-by":"publisher","first-page":"050701","DOI":"10.1063\/5.0200206","article-title":"On the role of target mass in extreme ultraviolet light generation from CO$_2$-driven tin plasmas for nanolithography","volume":"31","author":"Gonzalez","year":"2024","journal-title":"Phys Plasmas"},{"key":"2026091709120752100_bib50","doi-asserted-by":"publisher","first-page":"59","DOI":"10.1016\/j.cpc.2017.01.010","article-title":"A hybrid model of laser energy deposition for multi-dimensional simulations of plasmas and metals","volume":"214","author":"Basko","year":"2017","journal-title":"Comput Phys Commun"},{"key":"2026091709120752100_bib51","doi-asserted-by":"publisher","first-page":"105003","DOI":"10.1088\/1361-6595\/ad7c7c","article-title":"Modeling the hundreds-of-nanoseconds-long irradiation of tin droplets with a 2 \u00b5m-wavelength laser for future EUV lithography","volume":"33","author":"de Lange","year":"2024","journal-title":"Plasma Sources Sci Technol"},{"key":"2026091709120752100_bib52","doi-asserted-by":"publisher","first-page":"895","DOI":"10.1103\/PhysRevE.61.895","article-title":"Laser ray tracing and power deposition on an unstructured three-dimensional grid","volume":"61","author":"Kaiser","year":"2000","journal-title":"Phys Rev E"},{"key":"2026091709120752100_bib53","doi-asserted-by":"publisher","first-page":"e37","DOI":"10.1017\/hpl.2025.22","article-title":"A rasterization-based ray-tracing method for laser\u2013plasma interactions","volume":"13","author":"Tao","year":"2025","journal-title":"High Power Laser Sci Eng"},{"key":"2026091709120752100_bib54","doi-asserted-by":"publisher","first-page":"795","DOI":"10.1103\/PhysRevLett.28.795","article-title":"Resonant absorption of laser light by plasma targets","volume":"28","author":"Freidberg","year":"1972","journal-title":"Phys Rev Lett"},{"key":"2026091709120752100_bib55","doi-asserted-by":"publisher","first-page":"977","DOI":"10.1103\/PhysRev.89.977","article-title":"Transport phenomena in a completely ionized gas","volume":"89","author":"Spitzer","year":"1953","journal-title":"Phys Rev"},{"key":"2026091709120752100_bib56","doi-asserted-by":"publisher","first-page":"110501","DOI":"10.1063\/1.4934714","article-title":"Direct-drive inertial confinement fusion: A review","volume":"22","author":"Craxton","year":"2015","journal-title":"Phys Plasmas"},{"key":"2026091709120752100_bib57","doi-asserted-by":"publisher","first-page":"721","DOI":"10.1103\/PhysRevLett.34.721","article-title":"Indications of strongly flux-limited electron thermal conduction in laser-target experiments","volume":"34","author":"Malone","year":"1975","journal-title":"Phys Rev Lett"},{"key":"2026091709120752100_bib58","doi-asserted-by":"publisher","first-page":"4238","DOI":"10.1063\/1.1289512","article-title":"A nonlocal electron conduction model for multidimensional radiation hydrodynamics codes","volume":"7","author":"Schurtz","year":"2000","journal-title":"Phys Plasmas"},{"key":"2026091709120752100_bib59","doi-asserted-by":"publisher","DOI":"10.1007\/978-3-319-18147-9","volume-title":"Atomic Properties in Hot Plasmas","author":"Bauche","year":"2015"},{"key":"2026091709120752100_bib60","doi-asserted-by":"publisher","first-page":"025001","DOI":"10.1088\/1361-6587\/ac3c3a","article-title":"Enhancing the conversion efficiency of extreme ultraviolet light sources using a 2 $\\mu$m wavelength laser","volume":"64","author":"Yuan","year":"2022","journal-title":"Plasma Phys Control Fusion"},{"key":"2026091709120752100_bib61","doi-asserted-by":"publisher","first-page":"3","DOI":"10.1016\/j.hedp.2005.07.001","article-title":"FLYCHK: Generalized population kinetics and spectral model for rapid spectroscopic analysis for all elements","volume":"1","author":"Chung","year":"2005","journal-title":"High Energ Dens Phys"},{"key":"2026091709120752100_bib62","doi-asserted-by":"publisher","DOI":"10.1017\/CBO9780511536182","volume-title":"Radiation Hydrodynamics","author":"Castor","year":"2004"},{"key":"2026091709120752100_bib63","doi-asserted-by":"publisher","first-page":"182","DOI":"10.1006\/jcph.1998.5940","article-title":"Numerical Simulations for Radiation Hydrodynamics","volume":"142","author":"Dai","year":"1998","journal-title":"I Diffusion Limit J Comput Phys"},{"key":"2026091709120752100_bib64","doi-asserted-by":"publisher","first-page":"7","DOI":"10.1088\/0067-0049\/204\/1\/7","article-title":"Castro: A new compressible astrophysical solver. III. Multigroup radiation hydrodynamics","volume":"204","author":"Zhang","year":"2013","journal-title":"AstroPhys J Suppl Ser"},{"key":"2026091709120752100_bib65","doi-asserted-by":"publisher","first-page":"1","DOI":"10.1088\/0067-0049\/181\/1\/1","article-title":"A numerical algorithm for modeling multigroup neutrino-radiation hydrodynamics in two spatial dimensions","volume":"181","author":"Swesty","year":"2009","journal-title":"AstroPhys J Suppl Ser"},{"key":"2026091709120752100_bib66","doi-asserted-by":"publisher","first-page":"1","DOI":"10.1051\/0004-6361\/201321499","article-title":"Radiation hydrodynamics integrated in the PLUTO code","volume":"559","author":"Kolb","year":"2013","journal-title":"Astron Astrophys"},{"key":"2026091709120752100_bib67","doi-asserted-by":"publisher","first-page":"14","DOI":"10.1088\/0067-0049\/199\/1\/14","article-title":"A Godunov method for multidimensional radiation magnetohydrodynamics based on a variable eddington tensor","volume":"199","author":"Jiang","year":"2012","journal-title":"AstroPhys J Suppl Ser"},{"key":"2026091709120752100_bib68","doi-asserted-by":"publisher","first-page":"49","DOI":"10.3847\/1538-4365\/abe303","article-title":"An implicit finite volume scheme to solve the time-dependent radiation transport equation based on discrete ordinates","volume":"253","author":"Jiang","year":"2021","journal-title":"AstroPhys J Suppl Ser"},{"key":"2026091709120752100_bib69","doi-asserted-by":"publisher","first-page":"1","DOI":"10.1080\/23324309.2016.1138132","article-title":"Four Decades of Implicit Monte Carlo","volume":"45","author":"Wollaber","year":"2016","journal-title":"J Comput Theor Transp"},{"key":"2026091709120752100_bib70","doi-asserted-by":"publisher","first-page":"112552","DOI":"10.1016\/j.jcp.2023.112552","article-title":"A maximum principle preserving implicit Monte Carlo method for frequency-dependent radiative transfer equations","volume":"495","author":"Shi","year":"2023","journal-title":"J Comput Phys"},{"key":"2026091709120752100_bib71","doi-asserted-by":"publisher","first-page":"110252","DOI":"10.1016\/j.anucene.2023.110252","article-title":"A predictor-corrector Monte Carlo method for thermal radiative transfer equations","volume":"197","author":"Shi","year":"2024","journal-title":"Ann Nucl Energy"},{"key":"2026091709120752100_bib72","doi-asserted-by":"publisher","DOI":"10.1117\/3.613774","volume-title":"EUV Sources for Lithography","author":"Bakshi","year":"2006"},{"key":"2026091709120752100_bib73","doi-asserted-by":"publisher","first-page":"117","DOI":"10.1016\/j.cpc.2018.01.008","article-title":"The equation of state package FEOS for high energy density matter","volume":"227","author":"Faik","year":"2018","journal-title":"Comput Phys Commun"},{"key":"2026091709120752100_bib74","doi-asserted-by":"publisher","first-page":"3059","DOI":"10.1063\/1.866963","article-title":"A new quotidian equation of state (QEOS) for hot dense matter","volume":"31","author":"More","year":"1988","journal-title":"Phys Fluids"},{"key":"2026091709120752100_bib75","doi-asserted-by":"publisher","first-page":"036001","DOI":"10.1088\/1612-202X\/aa539b","article-title":"Fragmentation dynamics of liquid-metal droplets under ultra-short laser pulses","volume":"14","author":"Basko","year":"2017","journal-title":"Laser Phys Lett"},{"key":"2026091709120752100_bib76","doi-asserted-by":"publisher","first-page":"223","DOI":"10.1017\/S0263034600007709","article-title":"Radiation transport and atomic physics modeling in high-energy-density laser-produced plasmas","volume":"12","author":"Eidmann","year":"1994","journal-title":"Laser Part Beams"},{"key":"2026091709120752100_bib77","doi-asserted-by":"publisher","first-page":"054014","DOI":"10.1088\/2040-8986\/ac5a7e","article-title":"Microdroplet-tin plasma sources of EUV radiation driven by solid-state-lasers","volume":"24","author":"Versolato","year":"2022","journal-title":"J Opt"},{"key":"2026091709120752100_bib78","doi-asserted-by":"publisher","first-page":"014048","DOI":"10.1103\/PhysRevApplied.20.014048","article-title":"Mass partitioning in fragmenting tin sheets","volume":"20","author":"Liu","year":"2023","journal-title":"Phys Rev Appl"},{"key":"2026091709120752100_bib79","article-title":"Laser-induced Dynamics of Liquid Tin Microdroplets","volume-title":"Ph.D. thesis.","author":"Kurilovich","year":"2019"},{"key":"2026091709120752100_bib80","article-title":"Tailored laser-droplet interaction: for target formation in extreme ultraviolet sources","volume-title":"Ph.D. thesis","author":"Meijer","year":"2021"},{"key":"2026091709120752100_bib81","doi-asserted-by":"publisher","first-page":"031101","DOI":"10.1103\/PhysRevE.95.031101","article-title":"Cavitation and spallation in liquid metal droplets produced by subpicosecond pulsed laser radiation","volume":"95","author":"Krivokorytov","year":"2017","journal-title":"Phys Rev E"},{"key":"2026091709120752100_bib82","doi-asserted-by":"publisher","first-page":"054005","DOI":"10.1103\/PhysRevApplied.10.054005","article-title":"Expansion dynamics after laser-induced cavitation in liquid tin microdroplets","volume":"10","author":"Kurilovich","year":"2018","journal-title":"Phys Rev Appl"},{"key":"2026091709120752100_bib83","doi-asserted-by":"crossref","first-page":"129","DOI":"10.1117\/12.879517","article-title":"Combined effects of pre-pulsing and target geometry on efficient EUV production from laser produced plasma experiments and modeling","volume-title":"Extreme Ultraviolet (EUV) Lithography II","author":"Hassanein","year":"2011"},{"key":"2026091709120752100_bib84","doi-asserted-by":"publisher","first-page":"083303","DOI":"10.1063\/1.3647779","article-title":"Enhancements of extreme ultraviolet emission using prepulsed Sn laser-produced plasmas for advanced lithography applications","volume":"110","author":"Freeman","year":"2011","journal-title":"J Appl Phys"},{"key":"2026091709120752100_bib85","doi-asserted-by":"publisher","first-page":"853","DOI":"10.1007\/s00339-012-7164-3","article-title":"Effect of prepulse laser wavelength on EUV emission from CO$_2$ reheated laser-produced Sn plasma","volume":"110","author":"Freeman","year":"2013","journal-title":"Appl Phys A"},{"key":"2026091709120752100_bib86","doi-asserted-by":"publisher","first-page":"043107","DOI":"10.1063\/5.0136768","article-title":"Enhanced extreme ultraviolet conversion efficiency of a 2 $\\mu$m laser-driven preformed tin-droplet target using short picosecond pre-pulses","volume":"30","author":"Shi","year":"2023","journal-title":"Phys Plasmas"},{"key":"2026091709120752100_bib87","doi-asserted-by":"publisher","first-page":"093101","DOI":"10.1063\/5.0189195","article-title":"Temporal pre-pulse shaping in dual pulse laser produced plasma for the optimization of the EUV source in tin microdroplet system","volume":"135","author":"Sizyuk","year":"2024","journal-title":"J Appl Phys"},{"key":"2026091709120752100_bib88","article-title":"Laser impact on flying drops","author":"Klein","year":"2017","journal-title":"Ph.D. thesis"},{"key":"2026091709120752100_bib89","doi-asserted-by":"publisher","first-page":"122102","DOI":"10.1063\/5.0072348","article-title":"Experimental study of a millimeter-sized Ga-In drop ablated by a nanosecond laser pulse","volume":"33","author":"Liu","year":"2021","journal-title":"Phys Fluids"},{"key":"2026091709120752100_bib90","doi-asserted-by":"publisher","first-page":"012127","DOI":"10.1063\/5.0180144","article-title":"An experimental investigation of the dynamic response of a liquid metal jet subjected to nanosecond laser ablation","volume":"36","author":"Zhai","year":"2024","journal-title":"Phys Fluids"},{"key":"2026091709120752100_bib91","doi-asserted-by":"publisher","first-page":"024026","DOI":"10.1103\/PhysRevApplied.16.024026","article-title":"Spall-velocity reduction in double-pulse impact on tin microdroplets","volume":"16","author":"Meijer","year":"2021","journal-title":"Phys Rev Appl"},{"key":"2026091709120752100_bib92","doi-asserted-by":"publisher","first-page":"294705","DOI":"10.1007\/s11433-024-2579-6","article-title":"Response of a millimeter-sized opaque drop to tightly focused nanosecond laser pulse","volume":"68","author":"Xu","year":"2025","journal-title":"Sci China Phys Mech"},{"key":"2026091709120752100_bib93","doi-asserted-by":"publisher","first-page":"23","DOI":"10.1070\/QE2016v046n01ABEH015867","article-title":"Formation of a fine-dispersed liquid-metal target under the action of femto-and picosecond laser pulses for a laser-plasma radiation source in the extreme ultraviolet range","volume":"46","author":"Vinokhodov","year":"2016","journal-title":"Quantum Electron"},{"key":"2026091709120752100_bib94","doi-asserted-by":"publisher","first-page":"374","DOI":"10.1017\/jfm.2017.518","article-title":"Droplet deformation by short laser-induced pressure pulses","volume":"828","author":"Reijers","year":"2017","journal-title":"J Fluid Mech"},{"key":"2026091709120752100_bib95","doi-asserted-by":"publisher","first-page":"246","DOI":"10.1017\/jfm.2015.716","article-title":"Explosive fragmentation of liquid shells","volume":"788","author":"Vledouts","year":"2016","journal-title":"J Fluid Mech"},{"key":"2026091709120752100_bib96","doi-asserted-by":"publisher","first-page":"A21","DOI":"10.1017\/jfm.2025.10665","article-title":"Laser-induced droplet deformation: curvature inversion explained from instantaneous pressure impulse","volume":"1020","author":"Fran\u00e7a","year":"2025","journal-title":"J Fluid Mech"},{"key":"2026091709120752100_bib97","doi-asserted-by":"publisher","first-page":"103604","DOI":"10.1103\/PhysRevFluids.7.103604","article-title":"Numerical modeling of droplet rim fragmentation by laser-pulse impact using a multiscale two-fluid approach","volume":"7","author":"Nykteri","year":"2022","journal-title":"Phys Rev Fluids"},{"key":"2026091709120752100_bib98","doi-asserted-by":"publisher","first-page":"294706","DOI":"10.1007\/s11433-024-2604-6","article-title":"Flow pattern and wave propagation induced by local energy deposition at droplet surface","volume":"68","author":"Li","year":"2025","journal-title":"Sci China Phys Mech"},{"key":"2026091709120752100_bib99","article-title":"A radiation two-phase flow model for simulating plasma\u2013liquid interactions [preprint]","author":"Qian"},{"key":"2026091709120752100_bib100","doi-asserted-by":"crossref","first-page":"957","DOI":"10.1117\/3.613774.ch36","article-title":"Origin of debris in EUV sources and its mitigation","volume-title":"Sources for Lithography","author":"Ruzic","year":"2006"},{"key":"2026091709120752100_bib101","first-page":"285","article-title":"Normal incidence (multilayer) collector contamination","author":"Ruzic","year":"2009","journal-title":"EUV Lithography"},{"key":"2026091709120752100_bib102","first-page":"973","article-title":"Laser-produced plasma light source for EUVL","volume-title":"Extreme Ultraviolet (EUV) Lithography","author":"Fomenkov","year":"2010"},{"key":"2026091709120752100_bib103","doi-asserted-by":"publisher","first-page":"294704","DOI":"10.1007\/s11433-024-2571-4","article-title":"On simplified scenario of annular purging jet issuing from moving wafer stage in lithography machine","volume":"68","author":"Cao","year":"2025","journal-title":"Sci China Phys Mech"},{"key":"2026091709120752100_bib104","doi-asserted-by":"publisher","first-page":"547","DOI":"10.1007\/s00340-006-2532-3","article-title":"Ion debris mitigation from tin plasma using ambient gas, magnetic field and combined effects","volume":"86","author":"Harilal","year":"2007","journal-title":"Appl Phys B"},{"key":"2026091709120752100_bib105","doi-asserted-by":"publisher","first-page":"063301","DOI":"10.1063\/1.5017303","article-title":"Ion energy distributions in highly transient EUV induced plasma in hydrogen","volume":"123","author":"Van De Ven","year":"2018","journal-title":"J Appl Phys"},{"key":"2026091709120752100_bib106","doi-asserted-by":"publisher","first-page":"304","DOI":"10.3367\/UFNe.2018.06.038447","article-title":"Plasma-based sources of extreme ultraviolet radiation for lithography and mask inspection (50th anniversary of the institute of spectroscopy, russian academy of sciences)","volume":"62","author":"Abramenko","year":"2019","journal-title":"Phys Usp"},{"key":"2026091709120752100_bib107","doi-asserted-by":"publisher","first-page":"063301","DOI":"10.1063\/1.2175471","article-title":"Ion debris characterization from a z-pinch extreme ultraviolet light source","volume":"99","author":"Antonsen","year":"2006","journal-title":"J Appl Phys"},{"key":"2026091709120752100_bib108","doi-asserted-by":"publisher","first-page":"1549","DOI":"10.1364\/OL.31.001549","article-title":"Extreme-ultraviolet spectral purity and magnetic ion debris mitigation by use of low-density tin targets","volume":"31","author":"Harilal","year":"2006","journal-title":"Opt Lett"},{"key":"2026091709120752100_bib109","doi-asserted-by":"publisher","first-page":"053510","DOI":"10.1063\/1.2337106","article-title":"Effect of xenon bombardment on ruthenium-coated grazing incidence collector mirror lifetime for extreme ultraviolet lithography","volume":"100","author":"Nieto","year":"2006","journal-title":"J Appl Phys"},{"key":"2026091709120752100_bib110","doi-asserted-by":"publisher","first-page":"053303","DOI":"10.1063\/1.5033541","article-title":"Controlling ion kinetic energy distributions in laser produced plasma sources by means of a picosecond pulse pair","volume":"124","author":"Stodolna","year":"2018","journal-title":"J Appl Phys"},{"key":"2026091709120752100_bib111","doi-asserted-by":"publisher","first-page":"023182","DOI":"10.1103\/PhysRevResearch.6.023182","article-title":"Scaling relations in laser-induced vaporization of thin free-flying liquid metal sheets","volume":"6","author":"Schubert","year":"2024","journal-title":"Phys Rev Res."},{"key":"2026091709120752100_bib112","doi-asserted-by":"publisher","first-page":"024035","DOI":"10.1103\/PhysRevApplied.13.024035","article-title":"Mass loss from a stretching semitransparent sheet of liquid tin","volume":"13","author":"Liu","year":"2020","journal-title":"Phys Rev Appl"},{"key":"2026091709120752100_bib113","doi-asserted-by":"publisher","first-page":"A39","DOI":"10.1017\/jfm.2020.698","article-title":"Growth and breakup of ligaments in unsteady fragmentation","volume":"910","author":"Wang","year":"2021","journal-title":"J Fluid Mech"},{"key":"2026091709120752100_bib114","doi-asserted-by":"publisher","first-page":"043304","DOI":"10.1063\/1.3176494","article-title":"Ionic debris measurement of three extreme ultraviolet sources","volume":"106","author":"Sporre","year":"2009","journal-title":"J Appl Phys"},{"key":"2026091709120752100_bib115","article-title":"Diagnosis of the flux emanating from the intermediate focus of an extreme ultraviolet light lithography source","volume-title":"Doctoral Thesis.","author":"Sporre","year":"2013"},{"key":"2026091709120752100_bib116","doi-asserted-by":"publisher","first-page":"123306","DOI":"10.1063\/1.3601346","article-title":"Simulation of particle velocity in a laser-produced tin plasma extreme ultraviolet source","volume":"109","author":"Masnavi","year":"2011","journal-title":"J Appl Phys"},{"key":"2026091709120752100_bib117","doi-asserted-by":"publisher","first-page":"073301","DOI":"10.1063\/1.3558988","article-title":"Angular and energy distribution of Sn ion debris ejected from a laser-produced plasma source, for laser power densities in the range suitable for extreme ultraviolet lithography","volume":"109","author":"O\u2019Connor","year":"2011","journal-title":"J Appl Phys"},{"key":"2026091709120752100_bib118","doi-asserted-by":"publisher","first-page":"39","DOI":"10.1007\/s00340-022-07767-1","article-title":"Cross-calibration of a combined electrostatic and time-of-flight analyzer for energy-and charge-state-resolved spectrometry of tin laser-produced plasma","volume":"128","author":"Poirier","year":"2022","journal-title":"Appl Phys B"},{"key":"2026091709120752100_bib119","doi-asserted-by":"publisher","first-page":"034101","DOI":"10.1063\/5.0174499","article-title":"Influence of a laser intensity on EUV brightness and ion speed from a laser-assisted discharge-produced plasma","volume":"124","author":"Sato","year":"2024","journal-title":"Appl Phys Lett"},{"key":"2026091709120752100_bib120","doi-asserted-by":"publisher","first-page":"234711","DOI":"10.1007\/s11433-025-2842-x","article-title":"The dynamics and distribution of debris on laser-ablated Ga-In-Sn liquid film","volume":"69","author":"Zhai","year":"2026","journal-title":"Sci China Phys Mech"},{"key":"2026091709120752100_bib121","doi-asserted-by":"publisher","first-page":"241503","DOI":"10.1063\/1.2142102","article-title":"Properties of ion debris emitted from laser-produced mass-limited tin plasmas for extreme ultraviolet light source applications","volume":"87","author":"Fujioka","year":"2005","journal-title":"Appl Phys Lett"},{"key":"2026091709120752100_bib122","doi-asserted-by":"publisher","first-page":"294707","DOI":"10.1007\/s11433-024-2645-2","article-title":"Exploration of electron and ion thermodynamic models in laser-plasma expansion","volume":"68","author":"Hu","year":"2025","journal-title":"Sci China Phys Mech"},{"key":"2026091709120752100_bib123","doi-asserted-by":"publisher","first-page":"125101","DOI":"10.1103\/PhysRevLett.133.125101","article-title":"Power-law scaling relating the average charge state and kinetic energy in expanding laser-driven plasmas","volume":"133","author":"Sheil","year":"2024","journal-title":"Phys Rev Lett"},{"key":"2026091709120752100_bib124","doi-asserted-by":"publisher","first-page":"093002","DOI":"10.1103\/PhysRevLett.134.093002","article-title":"Sequential synchronous mechanism for double-electron capture: Insights into unforeseen large cross sections in low-energy Sn$^{3+}$+ H$_2$ collisions","volume":"134","author":"Oltra","year":"2025","journal-title":"Phys Rev Lett"},{"key":"2026091709120752100_bib125","doi-asserted-by":"publisher","first-page":"052806","DOI":"10.1103\/x84b-5kcn","article-title":"Electron capture in low-energy collisions of Sn$^{3+}$ ions with H$_2$ and D$_2$","volume":"112","author":"Bijlsma","year":"2025","journal-title":"Phys Rev A"},{"key":"2026091709120752100_bib126","doi-asserted-by":"publisher","first-page":"785","DOI":"10.1116\/1.1667511","article-title":"High conversion efficiency mass-limited Sn-based laser plasma source for extreme ultraviolet lithography","volume":"22","author":"Richardson","year":"2004","journal-title":"J Vac Sci Technol B"},{"key":"2026091709120752100_bib127","doi-asserted-by":"publisher","first-page":"279","DOI":"10.1117\/12.596753","article-title":"High conversion efficiency microscopic tin-doped droplet target laser-plasma source for EUVL","volume-title":"Emerging Lithographic Technologies IX","author":"Koay","year":"2005"},{"key":"2026091709120752100_bib128","doi-asserted-by":"publisher","first-page":"260","DOI":"10.1117\/12.598650","article-title":"Integrating Philips\u2019 extreme UV source in the alpha-tools","volume":"5751","author":"Pankert","year":"2005","journal-title":"Emerging Lithographic Technologies IX"},{"key":"2026091709120752100_bib129","doi-asserted-by":"publisher","first-page":"1755","DOI":"10.1016\/j.ijhydene.2006.08.043","article-title":"The investigation of the kinetics and mechanism of hydrogen evolution reaction on tin","volume":"32","author":"Azizi","year":"2007","journal-title":"Int J Hydrog Energy"},{"key":"2026091709120752100_bib130","doi-asserted-by":"publisher","first-page":"124104","DOI":"10.1063\/5.0318617","article-title":"Debris mitigation of a Xe discharge-produced plasma source combined gas jet and Halbach cylinder","volume":"128","author":"Zheng","year":"2026","journal-title":"Appl Phys Lett"},{"key":"2026091709120752100_bib131","doi-asserted-by":"crossref","first-page":"472","DOI":"10.1117\/12.2658352","article-title":"Scattering cross sections of tin ions with molecular hydrogen","volume-title":"Optical and EUV Nanolithography XXXVI","author":"Bartlett","year":"2023"},{"key":"2026091709120752100_bib132","doi-asserted-by":"publisher","first-page":"164102","DOI":"10.1063\/1.5025914","article-title":"Measurements of hydrogen gas stopping efficiency for tin ions from laser-produced plasma","volume":"112","author":"Abramenko","year":"2018","journal-title":"Appl Phys Lett"},{"key":"2026091709120752100_bib133","doi-asserted-by":"publisher","first-page":"021117","DOI":"10.1117\/1.JMM.11.2.021117","article-title":"Debris transport analysis at the intermediate focus of an extreme ultraviolet light source","volume":"11","author":"Sporre","year":"2012","journal-title":"J Micro\/Nanolithogr MEMS MOEMS"},{"key":"2026091709120752100_bib134","doi-asserted-by":"publisher","first-page":"013503","DOI":"10.1117\/1.JMM.15.1.013503","article-title":"Modeling and measuring the transport and scattering of energetic debris in an extreme ultraviolet plasma source","volume":"15","author":"Sporre","year":"2016","journal-title":"J Micro\/Nanolithogr MEMS MOEMS"},{"key":"2026091709120752100_bib135","doi-asserted-by":"crossref","first-page":"292","DOI":"10.1117\/12.3049436","article-title":"High energy and thermal transport of tin ions in an extreme ultraviolet lithography source","volume-title":"Optical and EUV Nanolithography XXXVIII","author":"Bartlett","year":"2025"},{"key":"2026091709120752100_bib136","doi-asserted-by":"publisher","first-page":"042603","DOI":"10.1116\/6.0001852","article-title":"Theoretical research on suppression ratio of dynamic gas lock for extreme ultraviolet lithography contamination control","volume":"40","author":"Sun","year":"2022","journal-title":"J Vac Sci Technol B"},{"key":"2026091709120752100_bib137","doi-asserted-by":"publisher","first-page":"530","DOI":"10.1016\/j.jiec.2025.02.013","article-title":"Implementation of a dynamic gas lock mechanism reducing contamination in extreme ultraviolet cleanrooms","volume":"149","author":"Hao","year":"2025","journal-title":"J Ind Eng Chem"},{"key":"2026091709120752100_bib138","doi-asserted-by":"publisher","first-page":"796933","DOI":"10.1117\/12.882210","article-title":"Laser produced plasma light source for EUVL","volume":"7969","author":"Fomenkov","year":"2011","journal-title":"Proc SPIE"},{"key":"2026091709120752100_bib139","first-page":"101431I","article-title":"Scaling LPP EUV sources to meet high volume manufacturing requirements","volume":"10143","author":"Schafgans","year":"2017","journal-title":"Proc SPIE"},{"key":"2026091709120752100_bib140","article-title":"Debris-free EUVL sources based on gas jets","volume-title":"Extreme Ultraviolet Lithography","author":"Kubiak"},{"key":"2026091709120752100_bib141","doi-asserted-by":"publisher","first-page":"475203","DOI":"10.1088\/0022-3727\/45\/47\/475203","article-title":"Debris mitigation power of various buffer gases for CO$_2$ laser produced tin plasmas","volume":"45","author":"Wu","year":"2012","journal-title":"J Phys D Appl Phys"},{"key":"2026091709120752100_bib142","doi-asserted-by":"publisher","first-page":"392","DOI":"10.1007\/s11433-012-4644-6","article-title":"Characteristics of ion debris from laser-produced tin plasma and mitigation of energetic ions by ambient gas","volume":"55","author":"Sun","year":"2012","journal-title":"Sci China Phys Mech"},{"key":"2026091709120752100_bib143","doi-asserted-by":"publisher","first-page":"294703","DOI":"10.1007\/s11433-024-2546-4","article-title":"Experimental study of the circular subsonic pipe jet expanding into near vacuum environment","volume":"68","author":"Chen","year":"2025","journal-title":"Sci China Phys Mech"},{"key":"2026091709120752100_bib144","doi-asserted-by":"publisher","first-page":"105336","DOI":"10.1016\/j.ijmultiphaseflow.2025.105336","article-title":"Numerical investigation of particle transport and deposition mechanisms driven by multiphase explosion coupling with buffer gas stream","volume":"192","author":"Liu","year":"2025","journal-title":"Int J Multiphas Flow"},{"key":"2026091709120752100_bib145","first-page":"033801","article-title":"EUV-induced hydrogen plasma: pulsed mode operation and confinement in scanner","volume":"20","author":"Van De Kerkhof","year":"2021","journal-title":"J Micro\/Nanopattern Mater Metrol"},{"key":"2026091709120752100_bib146","doi-asserted-by":"publisher","first-page":"111","DOI":"10.1146\/annurev.fluid.010908.165243","article-title":"Turbulent dispersed multiphase flow","volume":"42","author":"Balachandar","year":"2010","journal-title":"Annu Rev Fluid Mech"},{"key":"2026091709120752100_bib147","doi-asserted-by":"publisher","first-page":"084501","DOI":"10.1103\/PhysRevLett.106.084501","article-title":"Generalized Basset\u2013Boussinesq\u2013Oseen equation for unsteady forces on a sphere in a compressible flow","volume":"106","author":"Parmar","year":"2011","journal-title":"Phys Rev Lett"},{"key":"2026091709120752100_bib148","doi-asserted-by":"publisher","first-page":"379","DOI":"10.1146\/annurev-fluid-121021-015818","article-title":"Gas\u2013particle dynamics in high-speed flows","volume":"56","author":"Capecelatro","year":"2024","journal-title":"Annu Rev Fluid Mech"},{"key":"2026091709120752100_bib149","doi-asserted-by":"publisher","first-page":"2219","DOI":"10.2514\/1.28943","article-title":"Compressibility and rarefaction effects on drag of a spherical particle","volume":"46","author":"Loth","year":"2008","journal-title":"AIAA J"},{"key":"2026091709120752100_bib150","doi-asserted-by":"crossref","DOI":"10.1093\/oso\/9780198561958.001.0001","volume-title":"Molecular Gas Dynamics and the Direct Simulation of Gas Flows","author":"Bird","year":"1994"},{"key":"2026091709120752100_bib151","doi-asserted-by":"publisher","first-page":"109858","DOI":"10.1016\/j.jcp.2020.109858","article-title":"A hybrid particle approach based on the unified stochastic particle Bhatnagar\u2013Gross\u2013Krook and DSMC methods","volume":"424","author":"Fei","year":"2021","journal-title":"J Comput Phys"},{"key":"2026091709120752100_bib152","doi-asserted-by":"publisher","first-page":"18","DOI":"10.1186\/s42774-021-00069-8","article-title":"An efficient algorithm of the unified stochastic particle bhatnagar-gross-krook method for the simulation of multi-scale gas flows","volume":"3","author":"Fei","year":"2021","journal-title":"Adv Aerodyn"},{"key":"2026091709120752100_bib153","doi-asserted-by":"publisher","first-page":"429","DOI":"10.1006\/jcph.2000.6548","article-title":"Discrete-velocity models and numerical schemes for the Boltzmann-BGK equation in plane and axisymmetric geometries","volume":"162","author":"Mieussens","year":"2000","journal-title":"J Comput Phys"},{"key":"2026091709120752100_bib154","doi-asserted-by":"publisher","first-page":"033305","DOI":"10.1103\/PhysRevE.88.033305","article-title":"Discrete unified gas kinetic scheme for all knudsen number flows: Low-speed isothermal case","volume":"88","author":"Guo","year":"2013","journal-title":"Phys Rev E"},{"key":"2026091709120752100_bib155","doi-asserted-by":"publisher","first-page":"2668","DOI":"10.1063\/1.1597472","article-title":"Regularization of Grad\u2019s 13 moment equations: Derivation and linear analysis","volume":"15","author":"Struchtrup","year":"2003","journal-title":"Phys Fluids"},{"key":"2026091709120752100_bib156","doi-asserted-by":"publisher","first-page":"109245","DOI":"10.1016\/j.jcp.2020.109245","article-title":"Can we find steady-state solutions to multiscale rarefied gas flows within dozens of iterations?","volume":"407","author":"Su","year":"2020","journal-title":"J Comput Phys"},{"key":"2026091709120752100_bib157","doi-asserted-by":"publisher","first-page":"254511","DOI":"10.1007\/s11433-025-2880-3","article-title":"Optical diagnostics of flow velocity in pressure-matched near-vacuum gaseous micro jets","volume":"69","author":"Song","year":"2026","journal-title":"Sci China Phys Mech"},{"key":"2026091709120752100_bib158","doi-asserted-by":"crossref","DOI":"10.2514\/6.2009-1265","article-title":"An experimental investigation of accurate particle tracking in supersonic, rarefied, axisymmetric jets","volume-title":"Proceedings of the 47th AIAA Aerospace Sciences Meeting Including the New Horizons Forum and Aerospace Exposition","author":"Huffman","year":"2009"},{"key":"2026091709120752100_bib159","doi-asserted-by":"publisher","first-page":"A12","DOI":"10.1017\/jfm.2025.10269","article-title":"Experimental investigation of turbulent and laminar flow regimes in a supersonic free jet under near-vacuum conditions","volume":"1014","author":"Park","year":"2025","journal-title":"J Fluid Mech"},{"key":"2026091709120752100_bib160","doi-asserted-by":"publisher","first-page":"230401","DOI":"10.1063\/5.0247819","article-title":"Plasma sources for advanced semiconductor applications","volume":"125","author":"Versolato","year":"2024","journal-title":"Appl Phys Lett"},{"key":"2026091709120752100_bib161","doi-asserted-by":"publisher","first-page":"422","DOI":"10.1038\/s42254-021-00314-5","article-title":"Physics-informed machine learning","volume":"3","author":"Karniadakis","year":"2021","journal-title":"Nat Rev Phys"}],"container-title":["National Science Review"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/academic.oup.com\/nsr\/advance-article-pdf\/doi\/10.1093\/nsr\/nwag298\/68368948\/nwag298.pdf","content-type":"application\/pdf","content-version":"am","intended-application":"syndication"},{"URL":"https:\/\/academic.oup.com\/nsr\/article-pdf\/13\/17\/nwag298\/68368948\/nwag298.pdf","content-type":"application\/pdf","content-version":"vor","intended-application":"syndication"},{"URL":"https:\/\/academic.oup.com\/nsr\/article-pdf\/13\/17\/nwag298\/68368948\/nwag298.pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2026,9,17]],"date-time":"2026-09-17T13:12:20Z","timestamp":1789650740000},"score":1,"resource":{"primary":{"URL":"https:\/\/academic.oup.com\/nsr\/article\/doi\/10.1093\/nsr\/nwag298\/8690707"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2026,5,22]]},"references-count":161,"journal-issue":{"issue":"17","published-print":{"date-parts":[[2026,9,7]]}},"URL":"https:\/\/doi.org\/10.1093\/nsr\/nwag298","relation":{},"ISSN":["2095-5138","2053-714X"],"issn-type":[{"value":"2095-5138","type":"print"},{"value":"2053-714X","type":"electronic"}],"subject":[],"published-other":{"date-parts":[[2026,9]]},"published":{"date-parts":[[2026,5,22]]},"article-number":"nwag298"}}