{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,10,26]],"date-time":"2026-10-26T17:35:19Z","timestamp":1793036119919,"version":"4.5.0"},"reference-count":47,"publisher":"Oxford University Press (OUP)","issue":"20","license":[{"start":{"date-parts":[[2026,8,22]],"date-time":"2026-08-22T00:00:00Z","timestamp":1787356800000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"DOI":"10.13039\/501100001809","name":"National Natural Science Foundation of China","doi-asserted-by":"publisher","award":["T2525026"],"award-info":[{"award-number":["T2525026"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100001809","name":"National Natural Science Foundation of China","doi-asserted-by":"publisher","award":["12161141 010"],"award-info":[{"award-number":["12161141 010"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100012166","name":"National Key Research and Development Program of China","doi-asserted-by":"publisher","award":["2022YFA1404301"],"award-info":[{"award-number":["2022YFA1404301"]}],"id":[{"id":"10.13039\/501100012166","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2026,10,26]]},"abstract":"<jats:title>ABSTRACT<\/jats:title>\n                  <jats:p>In the field of snapshot hyperspectral imaging, a long-pursuit objective is to develop advanced spectral information encoding elements with both high spatial resolution and large sensor size. Among various strategies, Fabry\u2013P\u00e9rot (F\u2013P) cavity color filter, which has both high transmittance and narrow-color filtering function, represents a promising platform. However, it is extremely challenging to make F\u2013P color filters by using multi-layer deposition method. Here, we demonstrate that a commercial-sensor-compatible F\u2013P cavity color filter array can be fabricated through the single-step grayscale electron beam lithography. In the proof-of-concept experiment, the silver\u2013dielectric\u2013silver F\u2013P color filter array, which has spatial resolution of 5.2\u00a0\u00b5m \u00d7 5.2\u00a0\u00b5m and pixel number of 1.26 million, is successfully used to demonstrate the hyperspectral imaging function. As the diameter of the electron beam is at the level of tens of nanometers, the pixel size of the F\u2013P cavity can be down to 3.45\u00a0\u00b5m \u00d7 3.45\u00a0\u00b5m and even further. The proposed method may have great potential in high-resolution snapshot hyperspectral imaging and related applications in optical inspection, remote sensing, biomedical imaging and so on.<\/jats:p>","DOI":"10.1093\/nsr\/nwag526","type":"journal-article","created":{"date-parts":[[2026,8,21]],"date-time":"2026-08-21T11:46:44Z","timestamp":1787312804000},"source":"Crossref","is-referenced-by-count":0,"title":["Megapixel snapshot hyperspectral imaging with high resolution Fabry\u2013P\u00e9rot color filter array"],"prefix":"10.1093","volume":"13","author":[{"given":"Yu","family":"Chen","sequence":"first","affiliation":[{"name":"Department of Materials Science and Engineering, Southern University of Science and Technology , Shenzhen 518055 ,","place":["China"]},{"name":"Department of Physics, Hong Kong Baptist University , Hong Kong 999077 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