{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,8,2]],"date-time":"2025-08-02T17:56:27Z","timestamp":1754157387491,"version":"3.41.2"},"reference-count":18,"publisher":"Emerald","issue":"1","license":[{"start":{"date-parts":[[2005,2,1]],"date-time":"2005-02-01T00:00:00Z","timestamp":1107216000000},"content-version":"tdm","delay-in-days":0,"URL":"https:\/\/www.emerald.com\/insight\/site-policies"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2005,2,1]]},"abstract":"<jats:sec><jats:title content-type=\"abstract-heading\">Purpose<\/jats:title><jats:p>Semiconductor manufacturing industry requires highly accurate robot operation with short install\/setup downtime.<\/jats:p><\/jats:sec><jats:sec><jats:title content-type=\"abstract-heading\">Design\/methodology\/approach<\/jats:title><jats:p>We develop a fast, low cost and easy\u2010to\u2010operate calibration system for wafer\u2010handling robots. The system is defined by a fixture and a simple compensation algorithm. Given robot repeatability, end effector uncertainties, and the tolerance requirements of wafer placement points, we derive fixture design and placement specifications based on a statistical tolerance model.<\/jats:p><\/jats:sec><jats:sec><jats:title content-type=\"abstract-heading\">Findings<\/jats:title><jats:p>By employing the fixture\u2010based calibration, we successfully relax the tolerance requirement of the end effector by 20 times.<\/jats:p><\/jats:sec><jats:sec><jats:title content-type=\"abstract-heading\">Originality\/value<\/jats:title><jats:p>Semiconductor manufacturing requires fast and easy\u2010to\u2010operate calibration systems for wafer\u2010handling robots. In this paper, we describe a new methodology to solve this problem using fixtures. We develop fixture design criteria and a simple compensate algorithm to satisfy calibration requirements. We also verify our approach by a physical example.<\/jats:p><\/jats:sec>","DOI":"10.1108\/01439910510573282","type":"journal-article","created":{"date-parts":[[2005,2,9]],"date-time":"2005-02-09T11:07:23Z","timestamp":1107947243000},"page":"43-48","source":"Crossref","is-referenced-by-count":5,"title":["Fixture\u2010based industrial robot calibration for silicon wafer handling"],"prefix":"10.1108","volume":"32","author":[{"given":"Mike","family":"Tao Zhang","sequence":"first","affiliation":[]},{"given":"Ken","family":"Goldberg","sequence":"additional","affiliation":[]}],"member":"140","reference":[{"key":"key2022020920042248100_b1","unstructured":"Bernhardt, R. and Albright, S. (1993), Robot Calibration, Chapman & Hall, London."},{"key":"key2022020920042248100_b2","doi-asserted-by":"crossref","unstructured":"Edwards, C. and Galloway, R. 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