{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,8,2]],"date-time":"2025-08-02T17:50:02Z","timestamp":1754157002910,"version":"3.41.2"},"reference-count":11,"publisher":"Emerald","issue":"6","license":[{"start":{"date-parts":[[2010,6,15]],"date-time":"2010-06-15T00:00:00Z","timestamp":1276560000000},"content-version":"tdm","delay-in-days":0,"URL":"https:\/\/www.emerald.com\/insight\/site-policies"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2010,6,15]]},"abstract":"<jats:sec><jats:title content-type=\"abstract-heading\">Purpose<\/jats:title><jats:p>The purpose of this paper is to develop the multi\u2010degree\u2010of\u2010freedom measurement system to test, verify, and control the nano\u2010measuring machine.<\/jats:p><\/jats:sec><jats:sec><jats:title content-type=\"abstract-heading\">Design\/methodology\/approach<\/jats:title><jats:p>A generic differential model approach is constructed to numerically describe the hysteresis effects of piezoelectric actuators. Based on the generic differential model, a feedforward compensator with a proportional integral (PI) type controller is designed to compensate for the hysteresis nonlinearity of a piezoelectric actuated three degree\u2010of\u2010freedom coplanar nanostage which can provide high\u2010precision applications.<\/jats:p><\/jats:sec><jats:sec><jats:title content-type=\"abstract-heading\">Findings<\/jats:title><jats:p>The Z\u2010tilts (z, pitch, and roll motion) error compensation stage of the nano\u2010measuring machine is accomplished. Moreover, a high\u2010resolution laser interferometer is used to measure position accurately.<\/jats:p><\/jats:sec><jats:sec><jats:title content-type=\"abstract-heading\">Originality\/value<\/jats:title><jats:p>This paper contributes to develop a tracking control design method for the piezoelectric motion platform which combines a closed\u2010loop feedforward compensator with a PI type controller.<\/jats:p><\/jats:sec>","DOI":"10.1108\/03684921011046807","type":"journal-article","created":{"date-parts":[[2010,7,11]],"date-time":"2010-07-11T21:09:32Z","timestamp":1278882572000},"page":"1029-1039","source":"Crossref","is-referenced-by-count":0,"title":["Measurement and tracking control of the Z\u2010tilts error compensating stage of the nano\u2010measuring machine"],"prefix":"10.1108","volume":"39","author":[{"given":"Van\u2010Tsai","family":"Liu","sequence":"first","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Chien\u2010Hung","family":"Liu","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Hau\u2010Wei","family":"Li","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Chieh\u2010Li","family":"Chen","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Chun\u2010Liang","family":"Lin","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Yu\u2010Chen","family":"Lin","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"140","reference":[{"key":"key2022021520220909100_b2","doi-asserted-by":"crossref","unstructured":"Adriaens, H.J.M.T.A., Koning, W.L.D. and Banning, R. 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