{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,9,4]],"date-time":"2024-09-04T21:16:49Z","timestamp":1725484609240},"reference-count":6,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2012,1]]},"DOI":"10.1109\/3dic.2012.6262976","type":"proceedings-article","created":{"date-parts":[[2012,8,22]],"date-time":"2012-08-22T14:48:43Z","timestamp":1345646923000},"page":"1-4","source":"Crossref","is-referenced-by-count":1,"title":["200&amp;#x00B0;C direct bonding copper interconnects : Electrical results and reliability"],"prefix":"10.1109","author":[{"given":"L.","family":"Di Cioccio","sequence":"first","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"R.","family":"Taibi","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"C.","family":"Chappaz","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"S.","family":"Moreau","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"L. L.","family":"Chapelon","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"T.","family":"Signamarcheix","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"263","reference":[{"doi-asserted-by":"publisher","key":"3","DOI":"10.1109\/ECTC.2010.5490904"},{"doi-asserted-by":"publisher","key":"2","DOI":"10.1109\/ECTC.2010.5490697"},{"key":"1","first-page":"81","article-title":"An overview of patterned metal \/dielectric surface bonding: Mechanism, alignment and characterization","author":"di cioccio","year":"2011","journal-title":"JECS"},{"key":"6","article-title":"Chip-to-wafer technologies for high density 3D integration","author":"augendre","year":"0","journal-title":"MINAPAD 2011"},{"doi-asserted-by":"publisher","key":"5","DOI":"10.1063\/1.342443"},{"doi-asserted-by":"publisher","key":"4","DOI":"10.1109\/IEDM.2011.6131502"}],"event":{"name":"2011 IEEE International 3D Systems Integration Conference (3DIC)","start":{"date-parts":[[2012,1,31]]},"location":"Osaka","end":{"date-parts":[[2012,2,2]]}},"container-title":["2011 IEEE International 3D Systems Integration Conference (3DIC), 2011 IEEE International"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx5\/6253019\/6262941\/06262976.pdf?arnumber=6262976","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2017,3,22]],"date-time":"2017-03-22T02:10:35Z","timestamp":1490148635000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/6262976\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2012,1]]},"references-count":6,"URL":"https:\/\/doi.org\/10.1109\/3dic.2012.6262976","relation":{},"subject":[],"published":{"date-parts":[[2012,1]]}}}