{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,6,14]],"date-time":"2025-06-14T07:23:56Z","timestamp":1749885836003,"version":"3.28.0"},"reference-count":16,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"DOI":"10.1109\/acc.2003.1240415","type":"proceedings-article","created":{"date-parts":[[2004,1,23]],"date-time":"2004-01-23T23:33:03Z","timestamp":1074900783000},"page":"3732-3737","source":"Crossref","is-referenced-by-count":5,"title":["Mathematical modeling, experimental validation and observer design for a capacitively actuated microcantilever"],"prefix":"10.1109","volume":"5","author":[{"given":"M.","family":"Napoli","sequence":"first","affiliation":[]},{"given":"B.","family":"Bamieh","sequence":"additional","affiliation":[]},{"given":"K.","family":"Turner","sequence":"additional","affiliation":[]}],"member":"263","reference":[{"key":"15","doi-asserted-by":"publisher","DOI":"10.1063\/1.108593"},{"key":"16","article-title":"Multi-Dimensional MEMS Motion Characterization using Laser Vibrometry","author":"turner","year":"1999","journal-title":"Transducers '99 10th International Conference on Solid-state Sensors and Actuators Digest of Technical Papers"},{"journal-title":"Lecture Notes on Nonlinear Vibrations","year":"0","author":"rand","key":"13"},{"key":"14","doi-asserted-by":"publisher","DOI":"10.1541\/ieejsmas.118.647"},{"key":"11","doi-asserted-by":"publisher","DOI":"10.1109\/9.67291"},{"key":"12","doi-asserted-by":"publisher","DOI":"10.1109\/CDC.2001.980866"},{"key":"3","doi-asserted-by":"publisher","DOI":"10.1116\/1.589171"},{"key":"2","doi-asserted-by":"publisher","DOI":"10.1109\/9.277236"},{"key":"1","doi-asserted-by":"publisher","DOI":"10.1016\/S0026-2692(98)00028-7"},{"key":"10","doi-asserted-by":"publisher","DOI":"10.1063\/1.115317"},{"key":"7","doi-asserted-by":"crossref","first-page":"267","DOI":"10.1016\/S0924-4247(99)00252-6","article-title":"A Simple Approach to Characterizing the Driving Force of Polysilicon Laterally Driven Thermal microactuators","volume":"80","author":"huang","year":"2000","journal-title":"Sensors and Actuators"},{"key":"6","doi-asserted-by":"crossref","first-page":"235","DOI":"10.1051\/jp4:1998945","article-title":"Piezoelectric Bimorph Cantilever for Actuationf and Sensing Applications","volume":"8","author":"gaucher","year":"1998","journal-title":"J Phys IV France"},{"key":"5","doi-asserted-by":"publisher","DOI":"10.1063\/1.121064"},{"key":"4","doi-asserted-by":"publisher","DOI":"10.1007\/978-1-4471-3037-6"},{"journal-title":"Theory and Application of Mathieu Functions","year":"1951","author":"mclachlan","key":"9"},{"key":"8","doi-asserted-by":"publisher","DOI":"10.1109\/MEMSYS.1996.494024"}],"event":{"name":"2003 American Control Conference","acronym":"ACC-03","location":"Denver, CO, USA"},"container-title":["Proceedings of the 2003 American Control Conference, 2003."],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx5\/8775\/27784\/01240415.pdf?arnumber=1240415","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2017,6,15]],"date-time":"2017-06-15T23:18:50Z","timestamp":1497568730000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/1240415\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[null]]},"references-count":16,"URL":"https:\/\/doi.org\/10.1109\/acc.2003.1240415","relation":{},"subject":[]}}