{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,9,4]],"date-time":"2024-09-04T08:05:45Z","timestamp":1725437145779},"reference-count":12,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2007,7]]},"DOI":"10.1109\/acc.2007.4282545","type":"proceedings-article","created":{"date-parts":[[2007,8,8]],"date-time":"2007-08-08T12:01:54Z","timestamp":1186574514000},"page":"1269-1274","source":"Crossref","is-referenced-by-count":0,"title":["Robust Control for Linear Stages in Electronic Manufacturing"],"prefix":"10.1109","author":[{"given":"Rafael","family":"Quintanilla","sequence":"first","affiliation":[]},{"given":"John T.","family":"Wen","sequence":"additional","affiliation":[]},{"given":"Murat","family":"Arcak","sequence":"additional","affiliation":[]},{"given":"Joe","family":"Frankel","sequence":"additional","affiliation":[]},{"given":"Mark","family":"Peeples","sequence":"additional","affiliation":[]},{"given":"Mark","family":"Unrath","sequence":"additional","affiliation":[]}],"member":"263","reference":[{"article-title":"Robust and Optimal Control","year":"1996","author":"zhou","key":"ref4"},{"year":"0","key":"ref3","article-title":"Anorad Microglide T350 Air Bearing Positioning System"},{"key":"ref10","article-title":"A spatial operator algebra for manipulator modeling and control","author":"rodriguez","year":"1989","journal-title":"In NASA Conference on Space Telerobotics"},{"key":"ref6","article-title":"H? loop shaping design for nano-positioning","author":"sebastian","year":"2003","journal-title":"In Proceedings of the American Control Conference"},{"article-title":"Fundamentals of Robotic Mechanical Systems","year":"2002","author":"angeles","key":"ref11"},{"article-title":"A Course in Robust Control Theory","year":"2005","author":"dullerud","key":"ref5"},{"article-title":"Introduction to Robotics: Mechanics and Control","year":"2003","author":"craig","key":"ref12"},{"key":"ref8","doi-asserted-by":"crossref","DOI":"10.1109\/CDC.2001.981125","article-title":"Experimentally validated multivariable ? feedback controller design for high-precision wafer stage","author":"van de wal","year":"2001","journal-title":"Proc 40th IEEE Conf Dec Control"},{"key":"ref7","doi-asserted-by":"publisher","DOI":"10.1016\/S0957-4158(02)00037-5"},{"year":"0","key":"ref2","article-title":"Aerotech ABL9000 Air Bearing System"},{"key":"ref9","doi-asserted-by":"publisher","DOI":"10.1007\/978-3-322-90942-8"},{"year":"0","key":"ref1","article-title":"Newport Dynam YX 300 Dual Axis Air Bearing System"}],"event":{"name":"2007 American Control Conference","start":{"date-parts":[[2007,7,9]]},"location":"New York, NY, USA","end":{"date-parts":[[2007,7,13]]}},"container-title":["2007 American Control Conference"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx5\/4282134\/4282135\/04282545.pdf?arnumber=4282545","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2017,6,17]],"date-time":"2017-06-17T17:49:49Z","timestamp":1497721789000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/4282545\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2007,7]]},"references-count":12,"URL":"https:\/\/doi.org\/10.1109\/acc.2007.4282545","relation":{},"ISSN":["0743-1619"],"issn-type":[{"type":"print","value":"0743-1619"}],"subject":[],"published":{"date-parts":[[2007,7]]}}}