{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,9,8]],"date-time":"2024-09-08T09:53:00Z","timestamp":1725789180782},"reference-count":10,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2008,6]]},"DOI":"10.1109\/acc.2008.4586792","type":"proceedings-article","created":{"date-parts":[[2008,8,12]],"date-time":"2008-08-12T14:28:20Z","timestamp":1218551300000},"page":"2034-2039","source":"Crossref","is-referenced-by-count":4,"title":["On intermittent-contact mode sensing using electrostatically-actuated micro-cantilevers with integrated thermal sensors"],"prefix":"10.1109","author":[{"given":"D. R.","family":"Sahoo","sequence":"first","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"W.","family":"Haberle","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"P.","family":"Bachtold","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"A.","family":"Sebastian","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"H.","family":"Pozidis","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"E.","family":"Eleftheriou","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"263","reference":[{"key":"3","doi-asserted-by":"publisher","DOI":"10.1109\/5.763314"},{"key":"2","doi-asserted-by":"publisher","DOI":"10.1007\/s003390051247"},{"key":"10","article-title":"dynamics of silicon microheaters: modeling and experimental identification","author":"wiesmann","year":"2006","journal-title":"Proc IEEE MEMS Conf"},{"key":"1","doi-asserted-by":"publisher","DOI":"10.1103\/PhysRevLett.56.930"},{"key":"7","doi-asserted-by":"publisher","DOI":"10.1063\/1.2006968"},{"key":"6","doi-asserted-by":"publisher","DOI":"10.1109\/TMAG.2003.808953"},{"key":"5","doi-asserted-by":"publisher","DOI":"10.1109\/TNANO.2002.1005425"},{"key":"4","doi-asserted-by":"publisher","DOI":"10.1147\/rd.443.0323"},{"key":"9","doi-asserted-by":"publisher","DOI":"10.1063\/1.1365440"},{"key":"8","doi-asserted-by":"publisher","DOI":"10.1109\/JMEMS.2004.835761"}],"event":{"name":"2008 American Control Conference (ACC '08)","start":{"date-parts":[[2008,6,11]]},"location":"Seattle, WA","end":{"date-parts":[[2008,6,13]]}},"container-title":["2008 American Control Conference"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx5\/4547420\/4586444\/04586792.pdf?arnumber=4586792","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2017,3,16]],"date-time":"2017-03-16T18:31:22Z","timestamp":1489689082000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/4586792\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2008,6]]},"references-count":10,"URL":"https:\/\/doi.org\/10.1109\/acc.2008.4586792","relation":{},"subject":[],"published":{"date-parts":[[2008,6]]}}}