{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,2,21]],"date-time":"2025-02-21T20:17:28Z","timestamp":1740169048243,"version":"3.37.3"},"reference-count":20,"publisher":"Institute of Electrical and Electronics Engineers (IEEE)","license":[{"start":{"date-parts":[[2017,1,1]],"date-time":"2017-01-01T00:00:00Z","timestamp":1483228800000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/ieeexplore.ieee.org\/Xplorehelp\/downloads\/license-information\/OAPA.html"}],"funder":[{"DOI":"10.13039\/501100004663","name":"Ministry of Science and Technology, Taiwan, R.O.C.","doi-asserted-by":"publisher","award":["MOST 105-2221-E-151-024-MY3","MOST 103-2221-E-153-004-MY2","MOST 105-2221-E-153-005"],"award-info":[{"award-number":["MOST 105-2221-E-151-024-MY3","MOST 103-2221-E-153-004-MY2","MOST 105-2221-E-153-005"]}],"id":[{"id":"10.13039\/501100004663","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["IEEE Access"],"published-print":{"date-parts":[[2017]]},"DOI":"10.1109\/access.2017.2699279","type":"journal-article","created":{"date-parts":[[2017,4,28]],"date-time":"2017-04-28T18:24:26Z","timestamp":1493403866000},"page":"7826-7838","source":"Crossref","is-referenced-by-count":3,"title":["Data-Driven Modeling Using System Integration Scaling Factors and Positioning Performance of an Exposure Machine System"],"prefix":"10.1109","volume":"5","author":[{"given":"Jinn-Tsong","family":"Tsai","sequence":"first","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Cheng-Chung","family":"Chang","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Wen-Ping","family":"Chen","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-8096-0586","authenticated-orcid":false,"given":"Jyh-Horng","family":"Chou","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"263","reference":[{"key":"ref10","doi-asserted-by":"publisher","DOI":"10.1109\/JSYST.2014.2303833"},{"key":"ref11","doi-asserted-by":"publisher","DOI":"10.1109\/ACCESS.2015.2508144"},{"journal-title":"Robust Engineering","year":"2000","author":"taguchi","key":"ref12"},{"key":"ref13","doi-asserted-by":"publisher","DOI":"10.1109\/JSYST.2012.2219912"},{"key":"ref14","doi-asserted-by":"publisher","DOI":"10.1109\/TASE.2016.2572223"},{"key":"ref15","first-page":"1","article-title":"Vision-based multi-axis servo control system","author":"chang","year":"2010","journal-title":"Proc Forum Ind Appl AOI Syst"},{"key":"ref16","first-page":"140","article-title":"Development of industrial applications of automatic alignment and assembly technologies","volume":"20","author":"wen","year":"2010","journal-title":"Elect Month"},{"article-title":"Contact photolithographic alignment tutorial","year":"2004","author":"hawkins","key":"ref17"},{"key":"ref18","doi-asserted-by":"publisher","DOI":"10.1090\/S0025-5718-98-00894-1"},{"journal-title":"Neural Networks A Comprehensive Foundation","year":"1999","author":"haykin","key":"ref19"},{"key":"ref4","first-page":"485","article-title":"A note on uniform distribution experimental design","volume":"26","author":"wang","year":"1981","journal-title":"KEXUETONGBO"},{"key":"ref3","doi-asserted-by":"publisher","DOI":"10.4028\/www.scientific.net\/AMM.764-765.587"},{"key":"ref6","first-page":"318","volume":"1","author":"rumelhart","year":"1986","journal-title":"Learning Internal Representations by Error Propagation"},{"key":"ref5","article-title":"Multiple regression analysis","author":"efroymson","year":"1960","journal-title":"Mathematical Methods for Digital Computers"},{"key":"ref8","doi-asserted-by":"publisher","DOI":"10.1109\/JSYST.2015.2409888"},{"key":"ref7","doi-asserted-by":"publisher","DOI":"10.1109\/JSYST.2013.2279415"},{"key":"ref2","doi-asserted-by":"publisher","DOI":"10.1109\/TII.2015.2489578"},{"key":"ref1","doi-asserted-by":"publisher","DOI":"10.1080\/23080477.2013.11665590"},{"key":"ref9","doi-asserted-by":"publisher","DOI":"10.1109\/21.256541"},{"journal-title":"Nonlinear Dynamical Systems Feed Forward Neural Network Perspectives","year":"2001","author":"sandberg","key":"ref20"}],"container-title":["IEEE Access"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/6287639\/7859429\/07914731.pdf?arnumber=7914731","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2022,1,12]],"date-time":"2022-01-12T16:29:49Z","timestamp":1642004989000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/7914731\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2017]]},"references-count":20,"URL":"https:\/\/doi.org\/10.1109\/access.2017.2699279","relation":{},"ISSN":["2169-3536"],"issn-type":[{"type":"electronic","value":"2169-3536"}],"subject":[],"published":{"date-parts":[[2017]]}}}