{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,4,21]],"date-time":"2026-04-21T16:23:43Z","timestamp":1776788623707,"version":"3.51.2"},"reference-count":39,"publisher":"Institute of Electrical and Electronics Engineers (IEEE)","license":[{"start":{"date-parts":[[2020,1,1]],"date-time":"2020-01-01T00:00:00Z","timestamp":1577836800000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/legalcode"}],"funder":[{"DOI":"10.13039\/501100001809","name":"National Natural Science Foundation","doi-asserted-by":"publisher","award":["61971343"],"award-info":[{"award-number":["61971343"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100001809","name":"National Natural Science Foundation","doi-asserted-by":"publisher","award":["61773147"],"award-info":[{"award-number":["61773147"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]},{"name":"Natural Science Basic Research Plan in Shaanxi Province of China","award":["2020JM-012"],"award-info":[{"award-number":["2020JM-012"]}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["IEEE Access"],"published-print":{"date-parts":[[2020]]},"DOI":"10.1109\/access.2020.2990535","type":"journal-article","created":{"date-parts":[[2020,4,28]],"date-time":"2020-04-28T00:04:19Z","timestamp":1588032259000},"page":"79056-79068","source":"Crossref","is-referenced-by-count":20,"title":["A Method for Wafer Defect Detection Using Spatial Feature Points Guided Affine Iterative Closest Point Algorithm"],"prefix":"10.1109","volume":"8","author":[{"ORCID":"https:\/\/orcid.org\/0000-0002-0315-1686","authenticated-orcid":false,"given":"Jing","family":"Yang","sequence":"first","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Yi","family":"Xu","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Hai-Jun","family":"Rong","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Shaoyi","family":"Du","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Hongmei","family":"Zhang","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"263","reference":[{"key":"ref39","doi-asserted-by":"publisher","DOI":"10.1109\/34.295913"},{"key":"ref38","doi-asserted-by":"publisher","DOI":"10.1007\/s12647-010-0012-z"},{"key":"ref33","first-page":"1995","article-title":"An improved algorithm for Harris corner detection","volume":"16","author":"wang","year":"2008","journal-title":"Opt Precis Eng"},{"key":"ref32","doi-asserted-by":"publisher","DOI":"10.1007\/s00530-017-0573-6"},{"key":"ref31","doi-asserted-by":"publisher","DOI":"10.1109\/ICME.2007.4284894"},{"key":"ref30","first-page":"228","article-title":"Improve efficiency of line detection using Hough transform","author":"bao-ying","year":"2012","journal-title":"Comput Syst Appl"},{"key":"ref37","author":"qidwai","year":"2017","journal-title":"Digital Image Processing An Algorithmic Approach with MATLAB"},{"key":"ref36","doi-asserted-by":"publisher","DOI":"10.1016\/j.patrec.2010.01.020"},{"key":"ref35","doi-asserted-by":"publisher","DOI":"10.1109\/IM.2003.1240280"},{"key":"ref34","author":"schaap","year":"2007","journal-title":"DTFE The Delaunay Tesselation Field Estima Tor"},{"key":"ref10","doi-asserted-by":"publisher","DOI":"10.1117\/1.JEI.26.3.033006"},{"key":"ref11","first-page":"640","article-title":"Fully convolutional networks for semantic segmentation","volume":"39","author":"long","year":"2014","journal-title":"IEEE Trans Pattern Anal Mach Intell"},{"key":"ref12","first-page":"234","article-title":"U-Net: Convolutional networks for biomedical image segmentation","author":"ronneberger","year":"2015","journal-title":"Proc Int Conf Med Image Comput Comput -Assist Intervent"},{"key":"ref13","doi-asserted-by":"publisher","DOI":"10.1109\/TPAMI.2017.2699184"},{"key":"ref14","doi-asserted-by":"publisher","DOI":"10.1016\/j.eswa.2007.02.014"},{"key":"ref15","doi-asserted-by":"publisher","DOI":"10.1109\/TSM.2014.2364237"},{"key":"ref16","first-page":"912","article-title":"Wafer defect patterns recognition based on OPTICS and multi-label classification","author":"fan","year":"2016","journal-title":"Proc IEEE Adv Inf Manage Commun Electron Autom Control Conf (IMCEC)"},{"key":"ref17","doi-asserted-by":"publisher","DOI":"10.1109\/ICIP.2005.1529764"},{"key":"ref18","doi-asserted-by":"publisher","DOI":"10.1109\/TSM.2009.2039185"},{"key":"ref19","doi-asserted-by":"publisher","DOI":"10.1117\/12.479689"},{"key":"ref28","doi-asserted-by":"publisher","DOI":"10.1109\/TIP.2005.863021"},{"key":"ref4","doi-asserted-by":"publisher","DOI":"10.1016\/j.patrec.2006.03.009"},{"key":"ref27","doi-asserted-by":"publisher","DOI":"10.1016\/j.physb.2007.08.066"},{"key":"ref3","first-page":"3000","article-title":"An unsupervised self-organizing neural network for automatic semiconductor wafer defect inspection","author":"chang","year":"2006","journal-title":"Proc IEEE Int Conf Robot Autom"},{"key":"ref6","doi-asserted-by":"publisher","DOI":"10.1080\/07408170701592556"},{"key":"ref29","first-page":"v2-354","article-title":"An improved Hough transform for line detection","author":"duan","year":"2010","journal-title":"Proc Int Conf Comput Appl Syst Modeling (ICCASM)"},{"key":"ref5","doi-asserted-by":"publisher","DOI":"10.1016\/j.ejor.2005.11.032"},{"key":"ref8","doi-asserted-by":"publisher","DOI":"10.1007\/s11042-018-6800-0"},{"key":"ref7","doi-asserted-by":"publisher","DOI":"10.1080\/07408170600733236"},{"key":"ref2","first-page":"302","article-title":"The application and use of an automated spatial pattern recognition (SPR) system in the identification and solving of yield issues in semiconductor manufacturing","author":"drozda-freeman","year":"2007","journal-title":"Proc IEEE\/SEMI Adv Semiconduct Manufact Conf"},{"key":"ref9","doi-asserted-by":"publisher","DOI":"10.1109\/TII.2010.2092783"},{"key":"ref1","doi-asserted-by":"publisher","DOI":"10.1109\/66.857947"},{"key":"ref20","doi-asserted-by":"publisher","DOI":"10.1117\/1.1762518"},{"key":"ref22","doi-asserted-by":"publisher","DOI":"10.1109\/DCABES.2010.119"},{"key":"ref21","doi-asserted-by":"publisher","DOI":"10.1109\/ICEMI.2007.4351196"},{"key":"ref24","doi-asserted-by":"publisher","DOI":"10.3788\/OPE.20152312.3480"},{"key":"ref23","doi-asserted-by":"publisher","DOI":"10.1109\/ICCSP.2014.6950057"},{"key":"ref26","doi-asserted-by":"publisher","DOI":"10.1016\/j.protcy.2012.05.134"},{"key":"ref25","doi-asserted-by":"publisher","DOI":"10.5201\/ipol.2012.gjmr-lsd"}],"container-title":["IEEE Access"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/6287639\/8948470\/09078806.pdf?arnumber=9078806","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2021,12,17]],"date-time":"2021-12-17T19:51:40Z","timestamp":1639770700000},"score":1,"resource":{"primary":{"URL":"https:\/\/ieeexplore.ieee.org\/document\/9078806\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2020]]},"references-count":39,"URL":"https:\/\/doi.org\/10.1109\/access.2020.2990535","relation":{},"ISSN":["2169-3536"],"issn-type":[{"value":"2169-3536","type":"electronic"}],"subject":[],"published":{"date-parts":[[2020]]}}}