{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,5,21]],"date-time":"2026-05-21T16:35:30Z","timestamp":1779381330856,"version":"3.53.1"},"reference-count":26,"publisher":"Institute of Electrical and Electronics Engineers (IEEE)","license":[{"start":{"date-parts":[[2022,1,1]],"date-time":"2022-01-01T00:00:00Z","timestamp":1640995200000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/legalcode"}],"funder":[{"DOI":"10.13039\/501100001809","name":"National Natural Science Foundation of China","doi-asserted-by":"publisher","award":["52075505"],"award-info":[{"award-number":["52075505"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100001809","name":"Innovative Research Group Project of National Science Foundation of China","doi-asserted-by":"publisher","award":["51821003"],"award-info":[{"award-number":["51821003"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]},{"name":"National Science and Technology Major Project of China","award":["J2019-V-0015-0110"],"award-info":[{"award-number":["J2019-V-0015-0110"]}]},{"DOI":"10.13039\/501100002980","name":"Open Project Program of Key Laboratory for Micro\/Nano Technology and System of Liaoning Province of China, Dalian University of Technology","doi-asserted-by":"publisher","id":[{"id":"10.13039\/501100002980","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["IEEE Access"],"published-print":{"date-parts":[[2022]]},"DOI":"10.1109\/access.2022.3168350","type":"journal-article","created":{"date-parts":[[2022,4,18]],"date-time":"2022-04-18T16:13:24Z","timestamp":1650298404000},"page":"42908-42915","source":"Crossref","is-referenced-by-count":23,"title":["A MEMS Fiber-Optic Fabry-Perot Vibration Sensor for High-Temperature Applications"],"prefix":"10.1109","volume":"10","author":[{"ORCID":"https:\/\/orcid.org\/0000-0003-2048-9555","authenticated-orcid":false,"given":"Jiang","family":"Qian","sequence":"first","affiliation":[{"name":"State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-4547-0992","authenticated-orcid":false,"given":"Pinggang","family":"Jia","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Hua","family":"Liu","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Qianyu","family":"Ren","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Jia","family":"Liu","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Li","family":"Qin","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0003-1560-9858","authenticated-orcid":false,"given":"Jijun","family":"Xiong","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan, China"}],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"263","reference":[{"key":"ref1","doi-asserted-by":"publisher","DOI":"10.1016\/j.ceramint.2020.02.241"},{"key":"ref2","doi-asserted-by":"publisher","DOI":"10.3390\/s17112511"},{"key":"ref3","doi-asserted-by":"publisher","DOI":"10.1016\/j.msea.2007.02.047"},{"key":"ref4","doi-asserted-by":"publisher","DOI":"10.3390\/aerospace8090261"},{"key":"ref5","doi-asserted-by":"publisher","DOI":"10.1109\/TIE.2020.2992002"},{"key":"ref6","doi-asserted-by":"publisher","DOI":"10.1109\/TEPM.2004.843109"},{"key":"ref7","doi-asserted-by":"publisher","DOI":"10.1063\/1.3598115"},{"key":"ref8","doi-asserted-by":"publisher","DOI":"10.1109\/TIE.2020.3044792"},{"key":"ref9","doi-asserted-by":"publisher","DOI":"10.3390\/s140100144"},{"key":"ref10","doi-asserted-by":"publisher","DOI":"10.1109\/JSEN.2004.830301"},{"key":"ref11","doi-asserted-by":"publisher","DOI":"10.1088\/0960-1317\/17\/4\/009"},{"key":"ref12","doi-asserted-by":"publisher","DOI":"10.1080\/10739149.2014.883530"},{"key":"ref13","doi-asserted-by":"publisher","DOI":"10.1109\/JLT.2014.2367001"},{"key":"ref14","doi-asserted-by":"publisher","DOI":"10.1016\/j.optlaseng.2018.06.003"},{"key":"ref15","doi-asserted-by":"publisher","DOI":"10.1109\/JSEN.2006.888617"},{"key":"ref16","doi-asserted-by":"publisher","DOI":"10.1117\/12.2040022"},{"key":"ref17","doi-asserted-by":"publisher","DOI":"10.1117\/1.OE.52.5.055004"},{"key":"ref18","doi-asserted-by":"publisher","DOI":"10.1109\/JSEN.2013.2251879"},{"key":"ref19","doi-asserted-by":"publisher","DOI":"10.1109\/LPT.2017.2753279"},{"key":"ref20","doi-asserted-by":"publisher","DOI":"10.1109\/JLT.2017.2783882"},{"key":"ref21","doi-asserted-by":"publisher","DOI":"10.1364\/JOSAB.30.001211"},{"key":"ref22","doi-asserted-by":"publisher","DOI":"10.1364\/OE.27.004204"},{"key":"ref23","doi-asserted-by":"publisher","DOI":"10.1063\/1.333965"},{"key":"ref24","doi-asserted-by":"publisher","DOI":"10.1109\/JMEMS.2009.2030074"},{"key":"ref25","doi-asserted-by":"publisher","DOI":"10.1007\/s10717-016-9820-0"},{"key":"ref26","doi-asserted-by":"publisher","DOI":"10.1364\/OE.438258"}],"container-title":["IEEE Access"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/6287639\/9668973\/09759293.pdf?arnumber=9759293","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2026,4,28]],"date-time":"2026-04-28T19:48:59Z","timestamp":1777405739000},"score":1,"resource":{"primary":{"URL":"https:\/\/ieeexplore.ieee.org\/document\/9759293\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2022]]},"references-count":26,"URL":"https:\/\/doi.org\/10.1109\/access.2022.3168350","relation":{},"ISSN":["2169-3536"],"issn-type":[{"value":"2169-3536","type":"electronic"}],"subject":[],"published":{"date-parts":[[2022]]}}}