{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,4,21]],"date-time":"2026-04-21T16:23:37Z","timestamp":1776788617688,"version":"3.51.2"},"reference-count":62,"publisher":"Institute of Electrical and Electronics Engineers (IEEE)","license":[{"start":{"date-parts":[[2023,1,1]],"date-time":"2023-01-01T00:00:00Z","timestamp":1672531200000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by-nc-nd\/4.0\/"}],"funder":[{"name":"University Fundamental Research Grant","award":["RDU200318"],"award-info":[{"award-number":["RDU200318"]}]},{"DOI":"10.13039\/501100005605","name":"Universiti Malaysia Pahang Al-Sultan Abdullah (UMPSA) Malaysia","doi-asserted-by":"publisher","id":[{"id":"10.13039\/501100005605","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/100007837","name":"Universiti Tun Hussein Onn Malaysia (UTHM) through Tier 1 vot. Q166","doi-asserted-by":"publisher","id":[{"id":"10.13039\/100007837","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["IEEE Access"],"published-print":{"date-parts":[[2023]]},"DOI":"10.1109\/access.2023.3321025","type":"journal-article","created":{"date-parts":[[2023,10,2]],"date-time":"2023-10-02T18:03:09Z","timestamp":1696269789000},"page":"108891-108905","source":"Crossref","is-referenced-by-count":13,"title":["An Attention-Augmented Convolutional Neural Network With Focal Loss for Mixed-Type Wafer Defect Classification"],"prefix":"10.1109","volume":"11","author":[{"ORCID":"https:\/\/orcid.org\/0000-0003-0589-5643","authenticated-orcid":false,"given":"Uzma","family":"Batool","sequence":"first","affiliation":[{"name":"Centre for Artificial Intelligence and Robotics iKohza, Malaysia–Japan International Institute of Technology, Universiti Teknologi Malaysia, Kuala Lumpur, Malaysia"}]},{"ORCID":"https:\/\/orcid.org\/0000-0003-0594-8231","authenticated-orcid":false,"given":"Mohd Ibrahim","family":"Shapiai","sequence":"additional","affiliation":[{"name":"Centre for Artificial Intelligence and Robotics iKohza, Malaysia–Japan International Institute of Technology, Universiti Teknologi Malaysia, Kuala Lumpur, Malaysia"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-5348-502X","authenticated-orcid":false,"given":"Salama A.","family":"Mostafa","sequence":"additional","affiliation":[{"name":"Faculty of Computer Science and Information Technology, Universiti Tun Hussein Onn Malaysia, Parit Raja, Johor, Malaysia"}]},{"ORCID":"https:\/\/orcid.org\/0000-0003-0795-4096","authenticated-orcid":false,"given":"Mohd Zamri","family":"Ibrahim","sequence":"additional","affiliation":[{"name":"Faculty of Electrical and Electronics Engineering Technology, Universiti Malaysia Pahang, Pekan, Pahang, Malaysia"}]}],"member":"263","reference":[{"key":"ref13","article-title":"Rich feature hierarchies for accurate object detection and semantic segmentation","author":"girshick","year":"2013","journal-title":"arXiv 1311 2524"},{"key":"ref57","first-page":"1","article-title":"Calibrating deep neural networks using focal loss","author":"mukhoti","year":"2020","journal-title":"Proc 34th Conf Neural Inf Process Syst"},{"key":"ref12","doi-asserted-by":"publisher","DOI":"10.1109\/ACCESS.2018.2815149"},{"key":"ref56","doi-asserted-by":"publisher","DOI":"10.1109\/ICCV.2017.324"},{"key":"ref15","article-title":"Faster R-CNN: Towards real-time object detection with region proposal networks","author":"ren","year":"2015","journal-title":"arXiv 1506 01497"},{"key":"ref59","article-title":"Network in network","author":"lin","year":"2023","journal-title":"arXiv 1312 4400"},{"key":"ref14","doi-asserted-by":"publisher","DOI":"10.1109\/ICCV.2015.169"},{"key":"ref58","doi-asserted-by":"publisher","DOI":"10.1016\/j.compbiomed.2020.103866"},{"key":"ref53","doi-asserted-by":"publisher","DOI":"10.1109\/TII.2023.3234030"},{"key":"ref52","doi-asserted-by":"publisher","DOI":"10.1109\/TIM.2022.3151926"},{"key":"ref11","doi-asserted-by":"publisher","DOI":"10.1115\/1.4049535"},{"key":"ref55","doi-asserted-by":"publisher","DOI":"10.1007\/978-3-030-01234-2_1"},{"key":"ref10","doi-asserted-by":"publisher","DOI":"10.1007\/s40684-021-00343-6"},{"key":"ref54","article-title":"BAM: Bottleneck attention module","author":"park","year":"2018","journal-title":"arXiv 1807 06514"},{"key":"ref17","article-title":"You only look once: Unified, real-time object detection","author":"redmon","year":"2015","journal-title":"arXiv 1506 02640"},{"key":"ref16","doi-asserted-by":"publisher","DOI":"10.1007\/978-3-319-10578-9_23"},{"key":"ref19","doi-asserted-by":"publisher","DOI":"10.1109\/TNNLS.2022.3230426"},{"key":"ref18","first-page":"21","article-title":"SSD: Single shot multibox detector","author":"liu","year":"2015","journal-title":"Proc Eur Conf Comput Vis"},{"key":"ref51","doi-asserted-by":"publisher","DOI":"10.1007\/s41095-022-0325-1"},{"key":"ref50","doi-asserted-by":"publisher","DOI":"10.1016\/j.neucom.2021.03.091"},{"key":"ref46","doi-asserted-by":"publisher","DOI":"10.1016\/j.compind.2022.103720"},{"key":"ref45","doi-asserted-by":"publisher","DOI":"10.1016\/j.engappai.2023.105975"},{"key":"ref48","article-title":"Neural machine translation by jointly learning to align and translate","author":"bahdanau","year":"2014","journal-title":"arXiv 1409 0473"},{"key":"ref47","doi-asserted-by":"publisher","DOI":"10.3390\/app12042209"},{"key":"ref42","doi-asserted-by":"publisher","DOI":"10.1016\/j.cie.2022.107996"},{"key":"ref41","doi-asserted-by":"publisher","DOI":"10.1109\/CSTIC49141.2020.9282438"},{"key":"ref44","doi-asserted-by":"publisher","DOI":"10.1109\/TSM.2022.3156583"},{"key":"ref43","doi-asserted-by":"publisher","DOI":"10.1109\/TSM.2020.3020985"},{"key":"ref49","doi-asserted-by":"publisher","DOI":"10.1145\/3465055"},{"key":"ref8","doi-asserted-by":"publisher","DOI":"10.1016\/j.compind.2014.10.006"},{"key":"ref7","doi-asserted-by":"publisher","DOI":"10.1016\/j.cie.2020.106358"},{"key":"ref9","doi-asserted-by":"publisher","DOI":"10.1007\/s00170-021-06592-8"},{"key":"ref4","doi-asserted-by":"publisher","DOI":"10.1109\/TSM.2011.2154870"},{"key":"ref3","doi-asserted-by":"publisher","DOI":"10.1080\/00207543.2017.1401233"},{"key":"ref6","volume":"52","author":"m\u00f6nch","year":"2012","journal-title":"Production Planning and Control for Semiconductor Wafer Fabrication Facilities Modeling Analysis and Systems"},{"key":"ref5","doi-asserted-by":"publisher","DOI":"10.1109\/TSM.2018.2870253"},{"key":"ref40","doi-asserted-by":"publisher","DOI":"10.1109\/TSM.2020.3027431"},{"key":"ref35","doi-asserted-by":"publisher","DOI":"10.1109\/TSM.2018.2825482"},{"key":"ref34","doi-asserted-by":"publisher","DOI":"10.3390\/s22197384"},{"key":"ref37","doi-asserted-by":"publisher","DOI":"10.1109\/SMILE45626.2019.8965309"},{"key":"ref36","doi-asserted-by":"publisher","DOI":"10.1109\/TSM.2018.2841416"},{"key":"ref31","doi-asserted-by":"publisher","DOI":"10.1016\/j.eswa.2022.118254"},{"key":"ref30","doi-asserted-by":"publisher","DOI":"10.1109\/TSM.2022.3146266"},{"key":"ref33","doi-asserted-by":"publisher","DOI":"10.1145\/3426826.3426832"},{"key":"ref32","doi-asserted-by":"publisher","DOI":"10.1038\/s41598-022-20630-9"},{"key":"ref2","doi-asserted-by":"publisher","DOI":"10.1016\/j.engappai.2012.11.009"},{"key":"ref1","doi-asserted-by":"publisher","DOI":"10.1109\/TSM.2013.2243766"},{"key":"ref39","doi-asserted-by":"publisher","DOI":"10.5220\/0009177909740979"},{"key":"ref38","doi-asserted-by":"publisher","DOI":"10.1109\/TSM.2020.3022431"},{"key":"ref24","doi-asserted-by":"publisher","DOI":"10.1109\/ICCV.2017.322"},{"key":"ref23","article-title":"SegNet: A deep convolutional encoder–decoder architecture for image segmentation","author":"badrinarayanan","year":"2015","journal-title":"arXiv 1511 00561"},{"key":"ref26","doi-asserted-by":"publisher","DOI":"10.1109\/ACCESS.2021.3106171"},{"key":"ref25","doi-asserted-by":"publisher","DOI":"10.3390\/s20041010"},{"key":"ref20","doi-asserted-by":"publisher","DOI":"10.1109\/ICASSP43922.2022.9747311"},{"key":"ref22","article-title":"U-net: Convolutional networks for biomedical image segmentation","author":"ronneberger","year":"2015","journal-title":"arXiv 1505 04597"},{"key":"ref21","article-title":"Fully convolutional networks for semantic segmentation","author":"long","year":"2014","journal-title":"arXiv 1411 4038"},{"key":"ref28","doi-asserted-by":"publisher","DOI":"10.1109\/TSM.2020.2994357"},{"key":"ref27","doi-asserted-by":"publisher","DOI":"10.1007\/s10845-022-01994-1"},{"key":"ref29","first-page":"3","article-title":"Oversampling based on data augmentation in convolutional neural network for silicon wafer defect classification","author":"batool","year":"2020","journal-title":"Frontiers in Artificial Intelligence and Applications"},{"key":"ref60","first-page":"448","article-title":"Batch normalization: Accelerating deep network training by reducing internal covariate shift","volume":"1","author":"ioffe","year":"2015","journal-title":"Proc 32nd Int Conf Mach Learn (ICML)"},{"key":"ref62","first-page":"1","article-title":"Adam: A method for stochastic optimization","author":"kingma","year":"2015","journal-title":"Proc 3rd Int Conf Learn Represent (ICLR)"},{"key":"ref61","first-page":"1","article-title":"Understanding batch normalization","author":"bjorck","year":"2018","journal-title":"Proc 32nd Conference on Neural Inf Process Syst (NeurIPS)"}],"container-title":["IEEE Access"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/6287639\/10005208\/10268403.pdf?arnumber=10268403","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2023,10,30]],"date-time":"2023-10-30T19:28:55Z","timestamp":1698694135000},"score":1,"resource":{"primary":{"URL":"https:\/\/ieeexplore.ieee.org\/document\/10268403\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2023]]},"references-count":62,"URL":"https:\/\/doi.org\/10.1109\/access.2023.3321025","relation":{},"ISSN":["2169-3536"],"issn-type":[{"value":"2169-3536","type":"electronic"}],"subject":[],"published":{"date-parts":[[2023]]}}}