{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,7,8]],"date-time":"2026-07-08T17:51:52Z","timestamp":1783533112235,"version":"3.55.0"},"reference-count":32,"publisher":"Institute of Electrical and Electronics Engineers (IEEE)","license":[{"start":{"date-parts":[[2025,1,1]],"date-time":"2025-01-01T00:00:00Z","timestamp":1735689600000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/legalcode"}],"funder":[{"DOI":"10.13039\/501100001809","name":"Fund of the National Natural Science Foundation of China","doi-asserted-by":"publisher","award":["U20A20293"],"award-info":[{"award-number":["U20A20293"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["IEEE Access"],"published-print":{"date-parts":[[2025]]},"DOI":"10.1109\/access.2025.3566650","type":"journal-article","created":{"date-parts":[[2025,5,2]],"date-time":"2025-05-02T17:17:39Z","timestamp":1746206259000},"page":"86498-86508","source":"Crossref","is-referenced-by-count":3,"title":["Research on Wafer CMP Temperature Online Detection Compensation Algorithm Based on GA-BP Improved Neural Network"],"prefix":"10.1109","volume":"13","author":[{"ORCID":"https:\/\/orcid.org\/0009-0007-0754-3736","authenticated-orcid":false,"given":"Binjie","family":"Li","sequence":"first","affiliation":[{"name":"College of Mechanical Engineering, Zhejiang University of Technology, Hangzhou, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0009-0008-2231-1164","authenticated-orcid":false,"given":"Kuan","family":"Shen","sequence":"additional","affiliation":[{"name":"College of Mechanical Engineering, Zhejiang University of Technology, Hangzhou, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0009-0009-4100-5346","authenticated-orcid":false,"given":"Zhilong","family":"Song","sequence":"additional","affiliation":[{"name":"College of Mechanical Engineering, Zhejiang University of Technology, Hangzhou, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-1628-1084","authenticated-orcid":false,"given":"Binghai","family":"Lyu","sequence":"additional","affiliation":[{"name":"College of Mechanical Engineering, Zhejiang University of Technology, Hangzhou, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0009-0002-8881-166X","authenticated-orcid":false,"given":"Wenhong","family":"Zhao","sequence":"additional","affiliation":[{"name":"College of Mechanical Engineering, Zhejiang University of Technology, Hangzhou, China"}],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"263","reference":[{"key":"ref1","doi-asserted-by":"publisher","DOI":"10.1557\/s43578-020-00060-x"},{"key":"ref2","doi-asserted-by":"publisher","DOI":"10.1007\/s40544-016-0112-z"},{"key":"ref3","doi-asserted-by":"publisher","DOI":"10.1016\/j.jmatprotec.2005.11.025"},{"key":"ref4","doi-asserted-by":"publisher","DOI":"10.1143\/JJAP.34.6314"},{"key":"ref5","doi-asserted-by":"publisher","DOI":"10.1149\/1.1925070"},{"key":"ref6","doi-asserted-by":"publisher","DOI":"10.1149\/2.0101507jss"},{"key":"ref7","doi-asserted-by":"publisher","DOI":"10.1109\/ICMA.2006.257602"},{"key":"ref8","article-title":"Chemical mechanical polishing apparatus, has temperature monitoring system including non-contact thermal imaging camera","author":"Cherial","year":"2022"},{"key":"ref9","doi-asserted-by":"publisher","DOI":"10.4018\/IJITWE.337491"},{"key":"ref10","doi-asserted-by":"publisher","DOI":"10.1109\/TIM.2019.2910922"},{"key":"ref11","article-title":"Design of high precision infrared temperature measurement system","author":"Mo","year":"2020"},{"key":"ref12","doi-asserted-by":"publisher","DOI":"10.3390\/s22062396"},{"key":"ref13","doi-asserted-by":"publisher","DOI":"10.1007\/s00170-016-9254-4"},{"key":"ref14","doi-asserted-by":"publisher","DOI":"10.1007\/s10033-017-0098-0"},{"key":"ref15","doi-asserted-by":"publisher","DOI":"10.1007\/s00170-011-3564-3"},{"key":"ref16","doi-asserted-by":"publisher","DOI":"10.1007\/s00170-019-04375-w"},{"key":"ref17","doi-asserted-by":"publisher","DOI":"10.1109\/MIE.2009.934790"},{"key":"ref18","doi-asserted-by":"publisher","DOI":"10.3390\/s18072176"},{"key":"ref19","doi-asserted-by":"publisher","DOI":"10.1016\/j.sna.2020.112393"},{"key":"ref20","doi-asserted-by":"publisher","DOI":"10.1016\/j.measurement.2020.108019"},{"key":"ref21","doi-asserted-by":"publisher","DOI":"10.1016\/j.compeleceng.2015.12.011"},{"key":"ref22","doi-asserted-by":"publisher","DOI":"10.1109\/ICARM58088.2023.10218778"},{"key":"ref23","doi-asserted-by":"publisher","DOI":"10.1080\/09500340.2025.2484550"},{"key":"ref24","doi-asserted-by":"publisher","DOI":"10.1016\/j.anucene.2023.109859"},{"key":"ref25","doi-asserted-by":"publisher","DOI":"10.1063\/1.5121214"},{"key":"ref26","doi-asserted-by":"publisher","DOI":"10.1016\/j.precisioneng.2021.08.022"},{"key":"ref27","doi-asserted-by":"publisher","DOI":"10.1016\/j.biortech.2018.02.071"},{"key":"ref28","doi-asserted-by":"publisher","DOI":"10.1007\/s11769-019-1027-1"},{"key":"ref29","doi-asserted-by":"publisher","DOI":"10.1016\/j.jvcir.2019.02.015"},{"key":"ref30","doi-asserted-by":"publisher","DOI":"10.1109\/ISWCS.2014.6933473"},{"key":"ref31","doi-asserted-by":"publisher","DOI":"10.1109\/TIP.2011.2168232"},{"key":"ref32","doi-asserted-by":"publisher","DOI":"10.1109\/IFEEA57288.2022.10038121"}],"container-title":["IEEE Access"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx8\/6287639\/10820123\/10982261.pdf?arnumber=10982261","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,5,24]],"date-time":"2025-05-24T04:55:33Z","timestamp":1748062533000},"score":1,"resource":{"primary":{"URL":"https:\/\/ieeexplore.ieee.org\/document\/10982261\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2025]]},"references-count":32,"URL":"https:\/\/doi.org\/10.1109\/access.2025.3566650","relation":{},"ISSN":["2169-3536"],"issn-type":[{"value":"2169-3536","type":"electronic"}],"subject":[],"published":{"date-parts":[[2025]]}}}