{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,4,15]],"date-time":"2026-04-15T06:40:16Z","timestamp":1776235216240,"version":"3.50.1"},"reference-count":48,"publisher":"Institute of Electrical and Electronics Engineers (IEEE)","license":[{"start":{"date-parts":[[2026,1,1]],"date-time":"2026-01-01T00:00:00Z","timestamp":1767225600000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/legalcode"}],"funder":[{"name":"The Science and Technology Development Fund (FDCT), Macau SAR","award":["0011\/2023\/RIA1"],"award-info":[{"award-number":["0011\/2023\/RIA1"]}]},{"name":"The Science and Technology Development Fund (FDCT), Macau SAR","award":["0120\/2024\/RIA2"],"award-info":[{"award-number":["0120\/2024\/RIA2"]}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["IEEE Access"],"published-print":{"date-parts":[[2026]]},"DOI":"10.1109\/access.2026.3679299","type":"journal-article","created":{"date-parts":[[2026,3,31]],"date-time":"2026-03-31T19:53:21Z","timestamp":1774986801000},"page":"1-1","source":"Crossref","is-referenced-by-count":0,"title":["Cycle Time Optimization in Scheduling Automated Bench Cleaning Tool for Semiconductor Manufacturing"],"prefix":"10.1109","author":[{"given":"Luetao","family":"Li","sequence":"first","affiliation":[{"name":"Institute of Systems Engineering and Collaborative Laboratory for Intelligent Science and Systems, Macau University of Science and Technology, Macao, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"ORCID":"https:\/\/orcid.org\/0009-0001-0701-3088","authenticated-orcid":false,"given":"Siwei","family":"Zhang","sequence":"additional","affiliation":[{"name":"Institute of Systems Engineering and Collaborative Laboratory for Intelligent Science and Systems, Macau University of Science and Technology, Macao, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-5162-0224","authenticated-orcid":false,"given":"Yan","family":"Qiao","sequence":"additional","affiliation":[{"name":"Institute of Systems Engineering and Collaborative Laboratory for Intelligent Science and Systems, Macau University of Science and Technology, Macao, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-6782-458X","authenticated-orcid":false,"given":"Naiqi","family":"Wu","sequence":"additional","affiliation":[{"name":"Institute of Systems Engineering and Collaborative Laboratory for Intelligent Science and Systems, Macau University of Science and Technology, Macao, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"ORCID":"https:\/\/orcid.org\/0009-0001-3030-9370","authenticated-orcid":false,"given":"Jie","family":"Li","sequence":"additional","affiliation":[{"name":"IKAS Industries Company, Ltd, Beijing, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Bai","family":"Yang","sequence":"additional","affiliation":[{"name":"The Information Science Academy, China Electronics Technology Group Corporation, Beijing, China"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"263","reference":[{"key":"ref1","doi-asserted-by":"publisher","DOI":"10.1016\/j.compchemeng.2011.02.014"},{"key":"ref2","doi-asserted-by":"publisher","DOI":"10.1109\/TASE.2024.3386562"},{"key":"ref3","doi-asserted-by":"publisher","DOI":"10.1109\/TASE.2010.2046891"},{"key":"ref4","doi-asserted-by":"publisher","DOI":"10.1080\/0951192X.2016.1224391"},{"key":"ref5","doi-asserted-by":"publisher","DOI":"10.1109\/TASE.2004.840069"},{"key":"ref6","doi-asserted-by":"publisher","DOI":"10.1109\/TSM.2011.2180547"},{"key":"ref7","doi-asserted-by":"publisher","DOI":"10.1109\/TASE.2013.2285221"},{"key":"ref8","doi-asserted-by":"publisher","DOI":"10.1109\/TASE.2015.2404921"},{"key":"ref9","doi-asserted-by":"publisher","DOI":"10.1109\/TSM.2003.815203"},{"key":"ref10","doi-asserted-by":"publisher","DOI":"10.1109\/TASE.2013.2255037"},{"key":"ref11","doi-asserted-by":"publisher","DOI":"10.1109\/TASE.2024.3399818"},{"key":"ref12","first-page":"1","article-title":"Workload balancing and scheduling of a single-armed cluster tool","volume-title":"Proc. 5th APIEMS Conf.","author":"Lee"},{"key":"ref13","doi-asserted-by":"publisher","DOI":"10.1080\/00207540600792531"},{"key":"ref14","doi-asserted-by":"publisher","DOI":"10.1109\/LRA.2024.3469823"},{"key":"ref15","doi-asserted-by":"publisher","DOI":"10.1109\/TSMC.2024.3466991"},{"key":"ref16","doi-asserted-by":"publisher","DOI":"10.1109\/TASE.2018.2815157"},{"key":"ref17","doi-asserted-by":"publisher","DOI":"10.3934\/jimo.2022137"},{"key":"ref18","doi-asserted-by":"publisher","DOI":"10.1109\/5.24143"},{"key":"ref19","doi-asserted-by":"publisher","DOI":"10.1109\/TSM.2015.2390644"},{"key":"ref20","doi-asserted-by":"publisher","DOI":"10.1109\/66.311340"},{"key":"ref21","doi-asserted-by":"publisher","DOI":"10.1109\/66.536110"},{"key":"ref22","doi-asserted-by":"publisher","DOI":"10.1109\/TSM.2012.2199338"},{"key":"ref23","doi-asserted-by":"publisher","DOI":"10.1109\/TASE.2012.2192476"},{"key":"ref24","doi-asserted-by":"publisher","DOI":"10.1109\/TCST.2016.2598762"},{"key":"ref25","doi-asserted-by":"publisher","DOI":"10.1109\/TSMC.2020.2964032"},{"key":"ref26","doi-asserted-by":"publisher","DOI":"10.1109\/TSM.2019.2910399"},{"key":"ref27","doi-asserted-by":"publisher","DOI":"10.1109\/66.641483"},{"key":"ref28","doi-asserted-by":"publisher","DOI":"10.1109\/CASE49997.2022.9926574"},{"key":"ref29","doi-asserted-by":"publisher","DOI":"10.1109\/TASE.2023.3332551"},{"key":"ref30","doi-asserted-by":"publisher","DOI":"10.1109\/TASE.2024.3349380"},{"key":"ref31","doi-asserted-by":"publisher","DOI":"10.1109\/5326.760564"},{"key":"ref32","volume-title":"System Modeling and Control With Resource-Oriented Petri Nets","author":"Wu","year":"2009"},{"key":"ref33","doi-asserted-by":"publisher","DOI":"10.1109\/TSM.2008.2000425"},{"key":"ref34","doi-asserted-by":"publisher","DOI":"10.1109\/TASE.2008.2008633"},{"key":"ref35","doi-asserted-by":"publisher","DOI":"10.1109\/TSM.2009.2039243"},{"key":"ref36","doi-asserted-by":"publisher","DOI":"10.1109\/TASE.2011.2160452"},{"key":"ref37","doi-asserted-by":"publisher","DOI":"10.1109\/TASE.2020.3014078"},{"key":"ref38","doi-asserted-by":"publisher","DOI":"10.1109\/TSMC.2022.3222915"},{"key":"ref39","doi-asserted-by":"publisher","DOI":"10.1109\/TASE.2007.906678"},{"key":"ref40","doi-asserted-by":"publisher","DOI":"10.1080\/0951192X.2017.1305504"},{"key":"ref41","doi-asserted-by":"publisher","DOI":"10.1109\/ACCESS.2016.2549546"},{"key":"ref42","doi-asserted-by":"publisher","DOI":"10.1109\/TSMC.2016.2598303"},{"key":"ref43","doi-asserted-by":"publisher","DOI":"10.1109\/JAS.2020.1003069"},{"key":"ref44","doi-asserted-by":"publisher","DOI":"10.1109\/TSMC.2023.3280207"},{"key":"ref45","doi-asserted-by":"publisher","DOI":"10.1109\/JAS.2023.123189"},{"key":"ref46","doi-asserted-by":"publisher","DOI":"10.1109\/TASE.2023.3275703"},{"key":"ref47","doi-asserted-by":"publisher","DOI":"10.1109\/70.964658"},{"key":"ref48","doi-asserted-by":"publisher","DOI":"10.1109\/TSM.2004.831524"}],"container-title":["IEEE Access"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx8\/6287639\/6514899\/11458700.pdf?arnumber=11458700","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2026,4,15]],"date-time":"2026-04-15T05:40:15Z","timestamp":1776231615000},"score":1,"resource":{"primary":{"URL":"https:\/\/ieeexplore.ieee.org\/document\/11458700\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2026]]},"references-count":48,"URL":"https:\/\/doi.org\/10.1109\/access.2026.3679299","relation":{},"ISSN":["2169-3536"],"issn-type":[{"value":"2169-3536","type":"electronic"}],"subject":[],"published":{"date-parts":[[2026]]}}}