{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,10,29]],"date-time":"2024-10-29T09:50:57Z","timestamp":1730195457907,"version":"3.28.0"},"reference-count":29,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2014,7]]},"DOI":"10.1109\/aim.2014.6878290","type":"proceedings-article","created":{"date-parts":[[2014,8,20]],"date-time":"2014-08-20T15:27:01Z","timestamp":1408548421000},"page":"1469-1473","source":"Crossref","is-referenced-by-count":2,"title":["Development of a MEMS position transducer using bulk piezoresistivity of suspensions"],"prefix":"10.1109","author":[{"given":"Ali","family":"Bazaei","sequence":"first","affiliation":[]},{"given":"Mohammad","family":"Maroufi","sequence":"additional","affiliation":[]},{"given":"Ali","family":"Mohammadi","sequence":"additional","affiliation":[]},{"given":"S. O. Reza","family":"Moheimani","sequence":"additional","affiliation":[]}],"member":"263","reference":[{"key":"19","doi-asserted-by":"publisher","DOI":"10.1088\/0960-1317\/22\/12\/125018"},{"key":"17","doi-asserted-by":"publisher","DOI":"10.1016\/j.sna.2010.01.024"},{"key":"18","doi-asserted-by":"publisher","DOI":"10.1016\/j.sna.2012.03.043"},{"key":"15","doi-asserted-by":"publisher","DOI":"10.1016\/j.sna.2007.10.058"},{"key":"16","doi-asserted-by":"publisher","DOI":"10.1109\/JMEMS.2009.2035370"},{"key":"13","doi-asserted-by":"publisher","DOI":"10.1088\/0957-0233\/23\/7\/074012"},{"journal-title":"SOIMUMPS Design Handbook","year":"2011","author":"cowen","key":"14"},{"key":"11","doi-asserted-by":"publisher","DOI":"10.1109\/LED.2011.2155027"},{"key":"12","doi-asserted-by":"publisher","DOI":"10.1109\/JPROC.2009.2013612"},{"key":"21","doi-asserted-by":"publisher","DOI":"10.1088\/0964-1726\/6\/5\/004"},{"key":"20","doi-asserted-by":"publisher","DOI":"10.1049\/mnl.2012.0789"},{"key":"22","doi-asserted-by":"publisher","DOI":"10.1109\/MEMSYS.2012.6170401"},{"key":"23","doi-asserted-by":"publisher","DOI":"10.1109\/AIM.2013.6584114"},{"key":"24","doi-asserted-by":"publisher","DOI":"10.1109\/JSEN.2011.2178236"},{"key":"25","volume":"5","author":"bae","year":"2006","journal-title":"MEMS\/NEMS Handbook Techniques And Applications"},{"key":"26","doi-asserted-by":"publisher","DOI":"10.1088\/0960-1317\/22\/5\/055002"},{"key":"27","doi-asserted-by":"publisher","DOI":"10.1088\/0957-0233\/15\/2\/020"},{"key":"28","doi-asserted-by":"publisher","DOI":"10.2307\/2685263"},{"key":"29","doi-asserted-by":"publisher","DOI":"10.1063\/1.116528"},{"key":"3","doi-asserted-by":"publisher","DOI":"10.1147\/rd.524.0493"},{"key":"2","article-title":"A feedback controlled mems nanopositioner for on-chip high-speed afm","author":"mohammadi","year":"2013","journal-title":"Journal of Microelectromechanical Systems"},{"key":"10","doi-asserted-by":"publisher","DOI":"10.1088\/0957-4484\/16\/8\/016"},{"key":"1","doi-asserted-by":"publisher","DOI":"10.1109\/TMTT.2013.2288222"},{"key":"7","doi-asserted-by":"publisher","DOI":"10.1108\/SR-05-2013-678"},{"key":"6","doi-asserted-by":"publisher","DOI":"10.1109\/NEMS.2011.6017280"},{"key":"5","doi-asserted-by":"publisher","DOI":"10.1109\/AUCC.2013.6697320"},{"key":"4","doi-asserted-by":"publisher","DOI":"10.1109\/TMECH.2012.2197216"},{"key":"9","doi-asserted-by":"publisher","DOI":"10.1109\/5.704269"},{"key":"8","doi-asserted-by":"publisher","DOI":"10.1016\/j.sna.2012.10.016"}],"event":{"name":"2014 IEEE\/ASME International Conference on Advanced Intelligent Mechatronics (AIM)","start":{"date-parts":[[2014,7,8]]},"location":"Besacon","end":{"date-parts":[[2014,7,11]]}},"container-title":["2014 IEEE\/ASME International Conference on Advanced Intelligent Mechatronics"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/6869121\/6878036\/06878290.pdf?arnumber=6878290","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2020,10,14]],"date-time":"2020-10-14T10:45:44Z","timestamp":1602672344000},"score":1,"resource":{"primary":{"URL":"https:\/\/ieeexplore.ieee.org\/document\/6878290"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2014,7]]},"references-count":29,"URL":"https:\/\/doi.org\/10.1109\/aim.2014.6878290","relation":{},"subject":[],"published":{"date-parts":[[2014,7]]}}}