{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,10,23]],"date-time":"2024-10-23T09:39:23Z","timestamp":1729676363071,"version":"3.28.0"},"reference-count":16,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2014,7]]},"DOI":"10.1109\/aim.2014.6878324","type":"proceedings-article","created":{"date-parts":[[2014,8,20]],"date-time":"2014-08-20T15:27:01Z","timestamp":1408548421000},"page":"1670-1675","source":"Crossref","is-referenced-by-count":2,"title":["Nanometer control of the markerless overlay process using thermal scanning probe lithography"],"prefix":"10.1109","author":[{"given":"Colin","family":"Rawlings","sequence":"first","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Urs","family":"Duerig","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"James","family":"Hedrick","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Dan","family":"Coady","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Armin","family":"Knoll","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"263","reference":[{"key":"15","doi-asserted-by":"publisher","DOI":"10.1021\/la804191m"},{"journal-title":"Statistical Mechanics Kinetic Theory and Stochastic Processes","year":"1972","author":"heer","key":"16"},{"key":"13","doi-asserted-by":"publisher","DOI":"10.1021\/la403105q"},{"key":"14","doi-asserted-by":"publisher","DOI":"10.1103\/PhysRevLett.83.3470"},{"key":"11","doi-asserted-by":"publisher","DOI":"10.1109\/66.762881"},{"key":"12","doi-asserted-by":"publisher","DOI":"10.1103\/PhysRevLett.15.621"},{"key":"3","doi-asserted-by":"publisher","DOI":"10.1088\/0957-4484\/22\/27\/275306"},{"key":"2","doi-asserted-by":"publisher","DOI":"10.1002\/adma.200904386"},{"key":"1","doi-asserted-by":"crossref","first-page":"732","DOI":"10.1126\/science.1187851","article-title":"Nanoscale three-dimensional patterning of molecular resists by scanning probes","volume":"328","author":"pires","year":"2010","journal-title":"Science"},{"key":"10","doi-asserted-by":"publisher","DOI":"10.1002\/adma.200904386"},{"key":"7","doi-asserted-by":"publisher","DOI":"10.1088\/0957-4484\/22\/27\/275306"},{"key":"6","doi-asserted-by":"publisher","DOI":"10.1615\/AnnualRevHeatTransfer.v16.100"},{"key":"5","doi-asserted-by":"publisher","DOI":"10.1021\/nl070328r"},{"key":"4","doi-asserted-by":"publisher","DOI":"10.1021\/nl4024066"},{"key":"9","doi-asserted-by":"publisher","DOI":"10.1364\/OL.33.000156"},{"key":"8","doi-asserted-by":"publisher","DOI":"10.1116\/1.3237099"}],"event":{"name":"2014 IEEE\/ASME International Conference on Advanced Intelligent Mechatronics (AIM)","start":{"date-parts":[[2014,7,8]]},"location":"Besacon","end":{"date-parts":[[2014,7,11]]}},"container-title":["2014 IEEE\/ASME International Conference on Advanced Intelligent Mechatronics"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/6869121\/6878036\/06878324.pdf?arnumber=6878324","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2020,10,14]],"date-time":"2020-10-14T10:44:57Z","timestamp":1602672297000},"score":1,"resource":{"primary":{"URL":"https:\/\/ieeexplore.ieee.org\/document\/6878324"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2014,7]]},"references-count":16,"URL":"https:\/\/doi.org\/10.1109\/aim.2014.6878324","relation":{},"subject":[],"published":{"date-parts":[[2014,7]]}}}