{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,2,20]],"date-time":"2026-02-20T08:05:51Z","timestamp":1771574751608,"version":"3.50.1"},"reference-count":21,"publisher":"IEEE","license":[{"start":{"date-parts":[[2025,10,12]],"date-time":"2025-10-12T00:00:00Z","timestamp":1760227200000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-029"},{"start":{"date-parts":[[2025,10,12]],"date-time":"2025-10-12T00:00:00Z","timestamp":1760227200000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-037"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2025,10,12]]},"DOI":"10.1109\/apccas67402.2025.11378293","type":"proceedings-article","created":{"date-parts":[[2026,2,19]],"date-time":"2026-02-19T20:54:40Z","timestamp":1771534480000},"page":"1-4","source":"Crossref","is-referenced-by-count":0,"title":["Mask 3D Parameter Prediction in EUV Lithography by Convolutional Neural Network"],"prefix":"10.1109","author":[{"given":"Atsushi","family":"Takahashi","sequence":"first","affiliation":[{"name":"Institute of Science Tokyo,Tokyo,Japan"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Moe","family":"Sugiyama","sequence":"additional","affiliation":[{"name":"Institute of Science Tokyo,Tokyo,Japan"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Masayuki","family":"Shimoda","sequence":"additional","affiliation":[{"name":"Institute of Science Tokyo,Tokyo,Japan"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Hiroyoshi","family":"Tanabe","sequence":"additional","affiliation":[{"name":"Institute of Science Tokyo,Tokyo,Japan"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"263","reference":[{"key":"ref1","doi-asserted-by":"publisher","DOI":"10.1117\/3.401208"},{"key":"ref2","doi-asserted-by":"publisher","DOI":"10.1145\/2593069.2593163"},{"key":"ref3","doi-asserted-by":"publisher","DOI":"10.1117\/1.jmm.20.3.030901"},{"key":"ref4","doi-asserted-by":"publisher","DOI":"10.1109\/dac56929.2023.10247704"},{"key":"ref5","doi-asserted-by":"publisher","DOI":"10.1109\/tcad.2025.3558148"},{"key":"ref6","doi-asserted-by":"publisher","DOI":"10.1587\/transfun.e99.a.2363"},{"key":"ref7","doi-asserted-by":"publisher","DOI":"10.2197\/ipsjtsldm.10.28"},{"key":"ref8","doi-asserted-by":"publisher","DOI":"10.1109\/tvlsi.2016.2616840"},{"key":"ref9","doi-asserted-by":"publisher","DOI":"10.1117\/12.2575971"},{"key":"ref10","doi-asserted-by":"publisher","DOI":"10.1117\/12.2583683"},{"key":"ref11","doi-asserted-by":"publisher","DOI":"10.1117\/1.jmm.20.4.041202"},{"key":"ref12","doi-asserted-by":"publisher","DOI":"10.1117\/12.2615267"},{"key":"ref13","doi-asserted-by":"publisher","DOI":"10.1117\/1.jmm.21.4.041602"},{"key":"ref14","doi-asserted-by":"publisher","DOI":"10.1117\/12.2659063"},{"key":"ref15","doi-asserted-by":"publisher","DOI":"10.1117\/1.jmm.22.2.024201"},{"key":"ref16","doi-asserted-by":"publisher","DOI":"10.1117\/12.2688029"},{"key":"ref17","doi-asserted-by":"publisher","DOI":"10.1117\/1.jmm.23.1.014201"},{"key":"ref18","doi-asserted-by":"publisher","DOI":"10.1117\/12.3009880"},{"key":"ref19","doi-asserted-by":"publisher","DOI":"10.1364\/josaa.516610"},{"key":"ref20","doi-asserted-by":"publisher","DOI":"10.1117\/12.3046583"},{"key":"ref21","doi-asserted-by":"publisher","DOI":"10.1117\/1.jmm.24.2.024201"}],"event":{"name":"2025 IEEE Asia Pacific Conference on Circuits and Systems (APCCAS)","location":"Busan, Korea, Republic of","start":{"date-parts":[[2025,10,12]]},"end":{"date-parts":[[2025,10,15]]}},"container-title":["2025 IEEE Asia Pacific Conference on Circuits and Systems (APCCAS)"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx8\/11373921\/11376610\/11378293.pdf?arnumber=11378293","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2026,2,20]],"date-time":"2026-02-20T07:12:59Z","timestamp":1771571579000},"score":1,"resource":{"primary":{"URL":"https:\/\/ieeexplore.ieee.org\/document\/11378293\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2025,10,12]]},"references-count":21,"URL":"https:\/\/doi.org\/10.1109\/apccas67402.2025.11378293","relation":{},"subject":[],"published":{"date-parts":[[2025,10,12]]}}}