{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,10,22]],"date-time":"2024-10-22T22:31:20Z","timestamp":1729636280380,"version":"3.28.0"},"reference-count":10,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2015,11]]},"DOI":"10.1109\/asicon.2015.7517066","type":"proceedings-article","created":{"date-parts":[[2016,7,26]],"date-time":"2016-07-26T16:38:31Z","timestamp":1469551111000},"page":"1-4","source":"Crossref","is-referenced-by-count":0,"title":["3D resist modeling for OPC correction and verification"],"prefix":"10.1109","author":[{"given":"Liang","family":"Zhu","sequence":"first","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Qian","family":"Ren","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Neo","family":"Tan","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Zhibo","family":"Ai","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"263","reference":[{"key":"ref4","first-page":"868162","volume":"8681","author":"gao","year":"2013","journal-title":"Proc SPIE"},{"key":"ref3","first-page":"868166","volume":"8681","author":"chou","year":"2013","journal-title":"Proc SPIE"},{"key":"ref10","doi-asserted-by":"crossref","first-page":"69251d","DOI":"10.1117\/12.772872","volume":"6925","author":"kapasi","year":"2008","journal-title":"Proc SPIE"},{"key":"ref6","doi-asserted-by":"crossref","first-page":"727432","DOI":"10.1117\/12.813606","volume":"7274","author":"takahashi","year":"2009","journal-title":"Proc SPIE"},{"key":"ref5","doi-asserted-by":"crossref","first-page":"763802","DOI":"10.1117\/12.846550","volume":"7638","author":"foucher","year":"2010","journal-title":"Proc SPIE"},{"key":"ref8","doi-asserted-by":"crossref","first-page":"1168","DOI":"10.1117\/12.474497","volume":"4691","author":"tollkuehn","year":"2002","journal-title":"Proc SPIE"},{"key":"ref7","doi-asserted-by":"crossref","first-page":"76410b","DOI":"10.1117\/12.846637","volume":"7641","author":"sarma","year":"2010","journal-title":"Proc SPIE"},{"key":"ref2","doi-asserted-by":"crossref","first-page":"905211","DOI":"10.1117\/12.2045901","volume":"9052","author":"gao","year":"2014","journal-title":"Proc SPIE"},{"key":"ref9","doi-asserted-by":"crossref","first-page":"76401u","DOI":"10.1117\/12.848440","volume":"7640","author":"stock","year":"2010","journal-title":"Proc SPIE"},{"key":"ref1","first-page":"905232","volume":"9052","author":"fan","year":"2014","journal-title":"Proc SPIE"}],"event":{"name":"2015 IEEE 11th International Conference on ASIC (ASICON )","start":{"date-parts":[[2015,11,3]]},"location":"Chengdu, China","end":{"date-parts":[[2015,11,6]]}},"container-title":["2015 IEEE 11th International Conference on ASIC (ASICON)"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/7506193\/7516874\/07517066.pdf?arnumber=7517066","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2017,6,24]],"date-time":"2017-06-24T15:15:15Z","timestamp":1498317315000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/7517066\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2015,11]]},"references-count":10,"URL":"https:\/\/doi.org\/10.1109\/asicon.2015.7517066","relation":{},"subject":[],"published":{"date-parts":[[2015,11]]}}}