{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,3,12]],"date-time":"2026-03-12T13:03:54Z","timestamp":1773320634324,"version":"3.50.1"},"reference-count":36,"publisher":"IEEE","license":[{"start":{"date-parts":[[2026,1,19]],"date-time":"2026-01-19T00:00:00Z","timestamp":1768780800000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-029"},{"start":{"date-parts":[[2026,1,19]],"date-time":"2026-01-19T00:00:00Z","timestamp":1768780800000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-037"}],"funder":[{"DOI":"10.13039\/501100001809","name":"National Natural Science Foundation of China","doi-asserted-by":"publisher","id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2026,1,19]]},"DOI":"10.1109\/asp-dac66049.2026.11420514","type":"proceedings-article","created":{"date-parts":[[2026,3,10]],"date-time":"2026-03-10T19:51:15Z","timestamp":1773172275000},"page":"618-624","source":"Crossref","is-referenced-by-count":0,"title":["Understand and Detect: Lithographic Hotspot Detection by the Interpretable Graph Attention Network"],"prefix":"10.1109","author":[{"given":"Andy","family":"Liu","sequence":"first","affiliation":[{"name":"Nanjing University,School of Integrated Circuits,Suzhou,China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Silin","family":"Chen","sequence":"additional","affiliation":[{"name":"Nanjing University,School of Integrated Circuits,Suzhou,China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Guohao","family":"Wang","sequence":"additional","affiliation":[{"name":"ZetaTech Co., Ltd.,China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Wenzheng","family":"Zhao","sequence":"additional","affiliation":[{"name":"ZetaTech Co., Ltd.,China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Yuxiang","family":"Fu","sequence":"additional","affiliation":[{"name":"Nanjing University,School of Integrated Circuits,Suzhou,China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Ningmu","family":"Zou","sequence":"additional","affiliation":[{"name":"Nanjing University,School of Integrated Circuits,Suzhou,China"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"263","reference":[{"key":"ref1","doi-asserted-by":"publisher","DOI":"10.1145\/1065579.1065678"},{"key":"ref2","doi-asserted-by":"publisher","DOI":"10.1117\/12.601590"},{"key":"ref3","doi-asserted-by":"publisher","DOI":"10.1109\/TCAD.2014.2351273"},{"key":"ref4","first-page":"1","article-title":"A novel fuzzy matching model for lithography hotspot detection","volume-title":"Proceedings of the 50th Annual Design Automation Conference","author":"Lin"},{"key":"ref5","doi-asserted-by":"publisher","DOI":"10.1117\/1.JMM.16.3.033504"},{"key":"ref6","first-page":"1","article-title":"Machine-learning based hotspot detection using topological classification and critical feature extraction","volume-title":"Proc. 50th Annu. Design Autom. Conf.","author":"Yu"},{"key":"ref7","doi-asserted-by":"publisher","DOI":"10.1109\/ICICDT.2009.5166300"},{"key":"ref8","doi-asserted-by":"publisher","DOI":"10.1145\/3061639.3062270"},{"key":"ref9","doi-asserted-by":"publisher","DOI":"10.1145\/3400302.3415661"},{"key":"ref10","doi-asserted-by":"publisher","DOI":"10.1109\/TCAD.2020.3015918"},{"key":"ref11","article-title":"Enhancing layout hotspot detection efficiency with YOLOv8 and PCA-guided augmentation","author":"Wu","year":"2024","journal-title":"arXiv preprint arXiv:2407.14498"},{"key":"ref12","doi-asserted-by":"publisher","DOI":"10.1016\/j.eswa.2023.121566"},{"key":"ref13","first-page":"1","article-title":"LLM-HD: Layout Language Model for Hotspot Detection with GDS Semantic Encoding","volume-title":"Proc. 61st ACM\/IEEE Design Automation Conference","author":"Chen"},{"key":"ref14","doi-asserted-by":"publisher","DOI":"10.1109\/TNN.2008.2005605"},{"key":"ref15","article-title":"Graph attention networks","author":"Veli\u010dkovi\u0107","year":"2017","journal-title":"arXiv preprint arXiv:1710.10903"},{"key":"ref16","doi-asserted-by":"publisher","DOI":"10.23919\/DATE54114.2022.9774579"},{"key":"ref17","doi-asserted-by":"publisher","DOI":"10.1109\/TCAD.2025.3543436"},{"key":"ref18","doi-asserted-by":"publisher","DOI":"10.1109\/TCAD.2024.3468016"},{"key":"ref19","doi-asserted-by":"publisher","DOI":"10.1145\/3721129"},{"key":"ref20","first-page":"349","article-title":"ICCAD-2012 CAD contest in fuzzy pattern matching for physical verification and benchmark suite","volume-title":"2012 IEEE\/ACM International Conference on Computer-Aided Design (ICCAD)","author":"Torres"},{"key":"ref21","doi-asserted-by":"publisher","DOI":"10.1109\/ICCAD45719.2019.8942128"},{"key":"ref22","doi-asserted-by":"publisher","DOI":"10.18653\/v1\/N16-3020"},{"key":"ref23","doi-asserted-by":"publisher","DOI":"10.1145\/2966986.2980073"},{"key":"ref24","article-title":"GNNExplainer: Generating explanations for graph neural networks","volume":"32","author":"Ying","year":"2019","journal-title":"Advances in Neural Information Processing Systems"},{"key":"ref25","first-page":"19620","article-title":"Parameterized explainer for graph neural network","volume":"33","author":"Luo","year":"2020","journal-title":"Advances in Neural Information Processing Systems"},{"key":"ref26","doi-asserted-by":"publisher","DOI":"10.1145\/3447548.3467283"},{"key":"ref27","doi-asserted-by":"publisher","DOI":"10.1145\/3685678"},{"key":"ref28","doi-asserted-by":"publisher","DOI":"10.1145\/3372044"},{"key":"ref29","doi-asserted-by":"publisher","DOI":"10.1109\/DAC18074.2021.9586273"},{"key":"ref30","doi-asserted-by":"publisher","DOI":"10.23919\/DATE56975.2023.10137142"},{"key":"ref31","doi-asserted-by":"publisher","DOI":"10.1145\/3649476.3658707"},{"key":"ref32","doi-asserted-by":"publisher","DOI":"10.1145\/3517130"},{"key":"ref33","doi-asserted-by":"publisher","DOI":"10.1109\/CVPR.2016.90"},{"key":"ref34","doi-asserted-by":"publisher","DOI":"10.1109\/CVPR.2018.00474"},{"key":"ref35","article-title":"An image is worth 16x16 words: Transformers for image recognition at scale","volume-title":"Int. Conf. Learn. Represent. (ICLR)","author":"Dosovitskiy"},{"key":"ref36","doi-asserted-by":"publisher","DOI":"10.1109\/ICCV48922.2021.00986"}],"event":{"name":"2026 31st Asia and South Pacific Design Automation Conference (ASP-DAC)","location":"Lantau, Hong Kong","start":{"date-parts":[[2026,1,19]]},"end":{"date-parts":[[2026,1,22]]}},"container-title":["2026 31st Asia and South Pacific Design Automation Conference (ASP-DAC)"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx8\/11420221\/11420229\/11420514.pdf?arnumber=11420514","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2026,3,11]],"date-time":"2026-03-11T19:36:06Z","timestamp":1773257766000},"score":1,"resource":{"primary":{"URL":"https:\/\/ieeexplore.ieee.org\/document\/11420514\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2026,1,19]]},"references-count":36,"URL":"https:\/\/doi.org\/10.1109\/asp-dac66049.2026.11420514","relation":{},"subject":[],"published":{"date-parts":[[2026,1,19]]}}}