{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,9,5]],"date-time":"2024-09-05T23:16:14Z","timestamp":1725578174482},"reference-count":13,"publisher":"IEEE","license":[{"start":{"date-parts":[[2021,11,10]],"date-time":"2021-11-10T00:00:00Z","timestamp":1636502400000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/ieeexplore.ieee.org\/Xplorehelp\/downloads\/license-information\/IEEE.html"},{"start":{"date-parts":[[2021,11,10]],"date-time":"2021-11-10T00:00:00Z","timestamp":1636502400000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-029"},{"start":{"date-parts":[[2021,11,10]],"date-time":"2021-11-10T00:00:00Z","timestamp":1636502400000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-037"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2021,11,10]]},"DOI":"10.1109\/cce53527.2021.9633117","type":"proceedings-article","created":{"date-parts":[[2021,12,14]],"date-time":"2021-12-14T20:45:53Z","timestamp":1639514753000},"page":"1-6","source":"Crossref","is-referenced-by-count":0,"title":["Micromotors unit based on CMOS-MEMS technology integrated on a single chip"],"prefix":"10.1109","author":[{"given":"Andrea","family":"Lopez-Tapia","sequence":"first","affiliation":[]},{"given":"Luis","family":"Sanchez-Marquez","sequence":"additional","affiliation":[]},{"given":"Mario Alfredo","family":"Reyes-Barranca","sequence":"additional","affiliation":[]},{"given":"Griselda Stephany","family":"Abarca-Jimenez","sequence":"additional","affiliation":[]},{"given":"Luis Martin","family":"Flores-Nava","sequence":"additional","affiliation":[]}],"member":"263","reference":[{"journal-title":"MEMS and Microsystems Design and Manufacture","year":"2002","author":"hsu","key":"ref10"},{"key":"ref11","doi-asserted-by":"publisher","DOI":"10.1109\/ICEEE.2019.8884566"},{"key":"ref12","doi-asserted-by":"publisher","DOI":"10.1109\/CCE50788.2020.9299176"},{"key":"ref13","doi-asserted-by":"publisher","DOI":"10.1109\/ICEEE.2019.8884574"},{"journal-title":"Micromotor Fabrication by Surface Micromachining Technique","year":"2010","author":"barbade","key":"ref4"},{"key":"ref3","first-page":"1139","author":"basha","year":"2007","journal-title":"Design and fabrication of an electrostatic micromotor with a low operating voltage"},{"key":"ref6","first-page":"196","author":"kraus","year":"1997","journal-title":"Design and fabrication of surface micromachined micromotors with large dimensions"},{"key":"ref5","doi-asserted-by":"publisher","DOI":"10.1088\/0960-1317\/6\/1\/026"},{"key":"ref8","doi-asserted-by":"publisher","DOI":"10.1007\/978-3-030-40560-1"},{"year":"2011","key":"ref7"},{"key":"ref2","doi-asserted-by":"publisher","DOI":"10.1016\/S0167-9317(03)00094-7"},{"journal-title":"FAQ","year":"0","key":"ref1"},{"journal-title":"0 5 Micron Technology Design Rules","year":"2011","key":"ref9"}],"event":{"name":"2021 18th International Conference on Electrical Engineering, Computing Science and Automatic Control (CCE)","start":{"date-parts":[[2021,11,10]]},"location":"Mexico City, Mexico","end":{"date-parts":[[2021,11,12]]}},"container-title":["2021 18th International Conference on Electrical Engineering, Computing Science and Automatic Control (CCE)"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/9632874\/9632875\/09633117.pdf?arnumber=9633117","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2022,5,10]],"date-time":"2022-05-10T16:54:29Z","timestamp":1652201669000},"score":1,"resource":{"primary":{"URL":"https:\/\/ieeexplore.ieee.org\/document\/9633117\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2021,11,10]]},"references-count":13,"URL":"https:\/\/doi.org\/10.1109\/cce53527.2021.9633117","relation":{},"subject":[],"published":{"date-parts":[[2021,11,10]]}}}